Mikrostrukturierte Oberflächen

Hexagonales Muster einer Periode von 8 µm in einem Positiv-Photoresist nach der Interferenzlithographie. Diese Struktur wird als Master verwendet.

Oberflächen: Konditionierung, Passivierung, Lichteinfang

Die Oberflächenbeschaffenheit einer Solarzelle beeinflusst maßgeblich deren Effizienzpotential. Daher arbeiten wir an unterschiedlichen Methoden und Technologien zur Konditionierung und Passivierung sowie der Optimierung des Lichteinfangs von Silicium-Solarzellen. Schwerpunkte unserer Arbeit bilden u.a.:

Beschichtung:

  • Ein- und mehrlagige Anti-Reflexionsschichten
  • Dotierstoffprecursoren und Multifunktionsschichten
  • Passivierungsschichten und –schichtsysteme (u.a. SiN x , SiO x , SiC x , Al 2 O 3 )
  • Barriereschichten


Trockenchemisches Ätzen:

  • Texturierung (Fluorchemie, HCl)
  • Prozesse zum Konditionieren vor Passivierung sowie zur Emitteroptimierung und -entfernung
  • Strukturierung
  • Selektives Entfernen von dielektrischen Schichten

 

 

 

 

Ausgewählte Forschungsprojekte

 

MASSE

Massenfertigungstaugliche Vefahren für die Herstellung von monokristallinen Solarzellen mit 20% Wirkungsgrad

 

 

Aktuelle Veröffentlichungen zum Thema Oberflächen: Konditionierung, Passivierung, Lichteinfang:

YearTitle/AuthorDocument Type
2017Angle dependence of solar cells and modules: The role of cell texturization
Geisemeyer, I.; Tucher, N.; Müller, B.; Steinkemper, H.; Hohl-Ebinger, J.; Schubert, M.C.; Warta, W.
Journal Article
2017Characterizing the degradation of PDMS stamps in nanoimprint lithography
Tucher, N.; Höhn, O.; Hauser, H.; Müller, C.; Bläsi, B.
Journal Article
2017Influence of surface preparation and cleaning on the passivation of boron diffused silicon surfaces for high efficiency photovoltaics
Ali, H.; Moldovan, A.; Mack, S.; Wilson, M.; Schoenfeld, W.V.; Davis, K.O.
Journal Article
2017Interference and nanoimprint lithography for the patterning of large areas
Tucher, N.; Hauser, H.; Höhn, O.; Kübler, V.; Wellens, C.; Müller, C.; Bläsi, B.
Conference Paper
2017On the nature of emitter diffusion and screen-printing contact formation on nanostructured silicon surfaces
Kafle, B.; Freund, T.; Schön, J.; Werner, S.; Lorenz, A.; Wolf, A.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Journal Article
2016Activation Energy of Negative Fixed Charges in Thermal ALD Al2O3
Kühnhold-Pospischil, S.; Saint-Cast, P.; Richter, A.; Hofmann, M.
Journal Article
2016Efficiency increase of crystalline silicon solar cells with nanoimprinted rear side gratings for enhanced light trapping
Eisenlohr, J.; Tucher, N.; Hauser, H.; Graf, M.; Benick, J.; Bläsi, B.; Goldschmidt, J.C.; Hermle, M.
Journal Article
2016High-efficiency n-type silicon solar cells: Advances in PassDop technology and NiCu plating on boron emitter
Steinhauser, B.; Kamp, M.; Brand, A.A.; Jäger, U.; Bartsch, J.; Benick, J.; Hermle, M.
Journal Article
2016The influence of nitrogen on laser doping from phosphorous doped a-SiNx layers
Steinhauser, B.; Jäger, U.; Benick, J.; Chong, E.; Lam, J.; Steeman, R.; Rostan, H.; Nekarda, J.; Hermle, M.; Preu, R.; Glunz, S.W.
Journal Article
2016Influence of surface near doping concentration on contact formation of silver thick film contacts
Rothhardt, P.; Meier, S.; Hoenig, R.; Wolf, A.; Biro, D.
Journal Article
2016Large area patterning using interference and nanoimprint lithography
Bläsi, B.; Tucher, N.; Höhn, O.; Kübler, V.; Kroyer, T.; Wellens, C.; Hauser, H.
Conference Paper
2016Optical Modeling of Honeycomb Textures for Multicrystalline Silicon Solar Cells
Peters, I.; Hauser, H.; Tucher, N.; Bläsi, B.
Journal Article
2016Optical simulation of photovoltaic modules with multiple textured interfaces using the matrix-based formalism OPTOS
Tucher, N.; Eisenlohr, J.; Gebrewold, H.; Kiefel, P.; Höhn, O.; Hauser, H.; Goldschmidt, J.C.; Bläsi, B.
Journal Article
2016Ozone-Based Surface Conditioning Focused on an Improved Passivation for SHJ Solar Cells
Moldovan, A.; Dannenberg, T.; Temmler, J.; Kroely, L.; Zimmer, M.; Rentsch, J.
Journal Article
2016Ozone-based surface conditioning: Combining excellent surface passivation and industrial feasibility for SHJ solar cells: Presentation held at 26th PVSEC 2016, Singapore, 24.10.2016-28.10.2016
Moldovan, A.; Fischer, A.; Dannenberg, T.; Temmler, J.; Bivour, M.; Zimmer, M.; Hermle, M.; Rentsch, J.; Adou-Ras, D.; Sonntag D.; Zhao, J.; Wissen, A.
Presentation
2016Rear side gratings for silicon solar cells: Efficiency enhancement finally demonstrated
Bläsi, B.; Tucher, N.; Eisenlohr, J.; Lee, B.G.; Benick, J.; Hauser, H.; Hermle, M.; Goldschmidt, J.C.
Conference Paper
2016Systematic analysis of diffuse rear reflectors for enhanced light trapping in silicon solar cells
Pfeffer, F.; Eisenlohr, J.; Basch, A.; Hermle, M.; Lee, B.G.; Goldschmidt, J.C.
Journal Article
2016Ultrathin titanium dioxide nanolayers by atomic layer deposition for surface passivation of crystalline silicon
Gad, K.M.; Vössing, D.; Richter, A.; Rayner, B.; Reindl, L.M.; Mohney, S.E.; Kasemann, M.
Journal Article
20153D optical simulation formalism OPTOS for textured silicon solar cells
Tucher, N.; Eisenlohr, J.; Kiefel, P.; Höhn, O.; Hauser, H.; Peters, M.; Müller, C.; Goldschmidt, J.C.; Bläsi, B.
Journal Article
2015Charge carrier separation in solar cells
Würfel, U.; Cuevas, A.; Würfel, P.
Journal Article
2015Crystalline silicon solar cells with enhanced light trapping via rear side diffraction grating
Tucher, N.; Eisenlohr, J.; Hauser, H.; Benick, J.; Graf, M.; Müller, C.; Hermle, M.; Goldschmidt, J.C.; Bläsi, B.
Journal Article
2015Degradation of hydrogenated amorphous silicon passivation films caused by sputtering deposition
Meiners, B.-M.; Borchert, D.; Hohage, S.; Holinksi, S.; Schäfer, P.
Journal Article
2015Honeycomb structure on multicrystalline silicon Al-BSF solar cell with 17.8% efficiency
Volk, A.-K.; Tucher, N.; Seiffe, J.; Hauser, H.; Zimmer, M.; Bläsi, B.; Hofmann, M.; Rentsch, J.
Journal Article
2015Impact of rear side roughness on optical and electrical properties of a high-efficiency solar cell
Richter, M.; Saint-Cast, P.; Dannenberg, T.; Zimmer, M.; Rentsch, J.
Journal Article
2015Manufacturing 100-µm-thick silicon solar cells with efficiencies greater than 20% in a pilot production line
Terheiden, B.; Ballmann, T.; Horbelt, R.; Schiele, Y.; Seren, S.; Ebser, J.; Hahn, G.; Mertens, V.; Koentopp, M.B.; Scherff, M.; Müller, J.W.; Holman, Z.C.; Descoeudres, A.; Wolf, S. de; Nicolas, S.M. de; Geissbuehler, J.; Ballif, C.; Weber, B.; Saint-Cast, P.; Rauer, M.; Schmiga, C.; Glunz, S.W.; Morrison, D.J.; Devenport, S.; Antonelli, D.; Busto, C.; Grasso, F.; Ferrazza, F.; Tonelli, E.; Oswald, W.
Journal Article
2015Matrix formalism for light propagation and absorption in thick textured optical sheets
Eisenlohr, J.; Tucher, N.; Höhn, O.; Hauser, H.; Peters, M.; Kiefel, P.; Goldschmidt, J.C.; Bläsi, B.
Journal Article
2015Nanostructuring of c-Si surface by F2-based atmospheric pressure dry texturing process
Kafle, B.; Seiffe, J.; Clochard, L.; Duffy, E.; Rentsch, J.; Hofmann, M.
Journal Article
2015Nanotextured multicrystalline Al-BSF solar cells reaching 18% conversion efficiency using industrially viable solar cell processes
Bishal, K.; Mannan, A.; Freund, T.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2015Optical properties of textured sheets. An efficient matrix-based modelling approach
Tucher, N.; Eisenlohr, J.; Kiefel, P.; Höhn, O.; Hauser, H.; Peters, M.; Müller, C.; Goldschmidt, J.C.; Bläsi, B.
Conference Paper
2015Passivation-induced cavity defects in laser-doped selective emitter Si solar cells - formation model and recombination analysis
Geisler, C.; Kluska, S.; Hopman, S.; Glatthaar, M.
Journal Article
2015Rear side diffractive gratings for silicon wafer solar cells
Peters, M.; Hauser, H.; Bläsi, B.; Kroll, M.; Helgert, C.; Fahr, S.; Wiesendanger, S.; Rockstuhl, C.; Kirchartz, T.; Rau, U.; Mellor, A.; Steidl, L.; Zentel, R.
Book Article
2015Rear side sphere gratings for improved light trapping in crystalline silicon single junction and silicon-based tandem solar cells
Eisenlohr, J.; Lee, B.G.; Benick, J.; Feldmann, F.; Drießen, M.; Milenkovic, N.; Bläsi, B.; Goldschmidt, J.C.; Hermle, M.
Journal Article
2015Relation between light trapping and surface topography of plasma textured crystalline silicon wafers
Souren, F.M.M.; Rentsch, J.; Sanden, M.C.M. van de
Journal Article
2015Tunnel oxide passivated carrier-selective contacts based on ultra-thin SiO2 layers
Moldovan, A.; Feldmann, F.; Zimmer, M.; Rentsch, J.; Hermle, M.; Benick, J.
Journal Article
2015Tunnel oxide passivated carrier-selective contacts based on ultra-thin SiO2 layers grown by photo-oxidation or wet-chemical oxidation in ozonized water
Moldovan, A.; Feldmann, F.; Kaufmann, K.; Richter, S.; Werner, M.; Hagendorf, C.; Zimmer, M.; Rentsch, J.; Hermle, M.
Conference Paper
2015A versatile formalism for optical simulation of textured sheets
Tucher, N.; Eisenlohr, J.; Goldschmidt, J.C.; Bläsi, B.
Journal Article
2014Accurate potential drop sheet resistance measurements of laser-doped areas in semiconductors
Heinrich, M.; Kluska, S.; Binder, S.; Hameiri, Z.; Hoex, B.; Aberle, A.G.
Journal Article
2014Firing-stable PassDop passivation for screen printed n-type PERL solar cells based on a-SiNx:P
Steinhauser, B.; Mansoor, M. bin; Jäger, U.; Benick, J.; Hermle, M.
Journal Article
2014Fluid wrap around during wet chemical single side treatments
Richter, M.; Narayanan, S.; Hain, A.; Zimmer, M.; Rentsch, J.; Reinecke, H.
Conference Paper
2014Front side antireflection concepts for silicon solar cells with diffractive rear side structures
Bett, A.; Eisenlohr, J.; Höhn, O.; Bläsi, B.; Benick, J.; Repo, P.; Savin, H.; Goldschmidt, J.C.; Hermle, M.
Conference Paper
2014Hexagonal sphere gratings for enhanced light trapping in crystalline silicon solar cells
Eisenlohr, J.; Benick, J.; Peters, M.; Bläsi, B.; Goldschmidt, J.C.; Hermle, M.
Journal Article
2014High-temperature Degradation in Plasma-enhanced Chemical Vapor Deposition Al2O3 Surface Passivation Layers on Crystalline Silicon
Kühnhold, S.; Saint-Cast, P.; Kafle, B.; Hofmann, M.; Colonna, F.; Zacharias, M.
Journal Article
2014Inkjet-printing for maskless separation of metal structures for back-contact silicon solar cells
Stüwe, D.; Hartmann, P.; Keding, R.; Thaidigsmann, B.; Clement, F.; Prokopiak, S.; Fastnacht, P.; Jesswein, R.; Geppert, T.; Woehl, R.; Korvink, J.G.; Biro, D.
Journal Article
2014Investigations on the passivation mechanism of AlN:H and AlN:H-SiN:H stacks
Krugel, G.; Jenkner, F.; Moldovan, A.; Wolke, W.; Rentsch, J.; Preu, R.
Journal Article
2014Large area plasmonic nanoparticle arrays with well-defined size and shape
Meisenheimer, S.-K.; Jüchter, S.; Höhn, O.; Hauser, H.; Wellens, C.; Kübler, V.; Hauff, E. von; Bläsi, B.
Journal Article
2014Large-area honeycomb texturing of Si-solar cells via nanoimprint lithography
Tucher, N.; Volk, A.; Seiffe, J.; Hauser, H.; Müller, C.; Bläsi, B.
Conference Paper
2014MF-Sputtered AZO for a-Si SHJ Solar Cells
Jeurink, J.; Wagner, F.; Park, S.; Kroely, L.; Wolke, W.
Conference Paper
2014Multicrystalline silicon solar cell improvement by atmospheric pressure dry etching process
Kafle, B.; Trogus, D.; Seiffe, J.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Conference Paper
2014Novel light trapping concepts for crystalline silicon solar cells using diffractive rear side structures
Eisenlohr, J.; Tucher, N.; Bett, A.; Hauser, H.; Graf, M.; Benick, J.; Goldschmidt, J.; Bläsi, B.; Hermle, M.
Conference Paper
2014On the location and stability of charge in SiO2/SiNX dielectric double layers used for silicon surface passivation
Bonilla, R.S.; Reichel, C.; Hermle, M.; Wilshaw, P.R.
Journal Article
2014Online process control of alkaline texturing baths: Determination of the chemical concentrations
Zimmer, M.; Krieg, K.; Rentsch, J.
Journal Article
2014PECVD Al2O3 for Surface Passivation: A Review of Solar Cell and Thin Layer Characteristics Silicon Solar Cell
Kühnhold, S.; Saint-Cast, P.; Hofmann, M.; Paramanathan, R.; El-Safoury, M.; Kafle, B.; Kania, D.; Weiss, L.; Heo, Y.-H.; Billot, E.; Olwal, P.; Rentsch, J.; Preu, R.
Conference Paper
2014Silicon heterojunction rear emitter solar cells: Less restrictions on the optoelectrical properties of front side TCOs
Bivour, M.; Schröer, S.; Hermle, M.; Glunz, S.W.
Journal Article
2014Simple Applicable Cleaning and Conditioning of Silicon Surfaces with UV/Ozone Sources
Moldovan, A.; Krugel, G.; Feldmann, F.; Zimmer, M.; Rentsch, J.; Roth-Fölsch, A.; Kaufmann, K.; Hagendorf, C.; Hermle, M.
Conference Paper
2014Study of dielectric layers for bifacial n-type silicon solar cells with regard to optical properties, surface passivation quality, and contact formation
Kalio, A.; Richter, A.; Schmiga, C.; Glatthaar, M.; Wilde, J.
Journal Article
2014Study of plasmonic nanoparticle arrays for photon management in solar cells
Bläsi, B.; Jüchter, S.; Meisenheimer, S.-K.; Höhn, O.; Hauser, H.; Wellens, C.
Conference Paper
2013Aspects of surface conditioning for high-efficient hetero-junction silicon solar cells
Breitenstein, L.; Ritzau, K.U.; Hermle, M.; Warta, W.
Conference Paper
2013Boron emitter passivation with AI2O3 and AI2O3/SiNx stacks using ALD AI2O3
Richter, A.; Benick, J.; Hermle, M.
Journal Article
2013Comparison of cleaning processes for enabling solderability of LFC-PERC silicon solar cells with evaporated Al as rear side metallization
Samadi, H.; Kumm, J.; Eberlein, D.; Hartmann, P.; Wolf, A.; Mack, S.
Conference Paper
2013Effective passivation of black silicon surfaces by atomic layer deposition
Repo, P.; Haarahiltunen, A.; Sainiemi, L.; Yli-Koski, M.; Talvitie, H.; Schubert, M.C.; Savin, H.
Journal Article
2013Effects of high-temperature treatment on the hydrogen distribution in silicon oxynitride/silicon nitride stacks for crystalline silicon surface passivation
Schwab, C.; Hofmann, M.; Heller, R.; Seiffe, J.; Rentsch, J.; Preu, R.
Journal Article
2013Etching of PVD metal layers for contact separation of back contact silicon solar cells using inkjet-printing
Stüwe, D.; Hartmann, P.; Keding, R.; Clement, F.; Woehl, R.; Biro, D.; Fastnacht, P.; Jesswein, R.; Geppert, T.; Prokopiak, S.; Korvink, J.G.
Conference Paper
2013Fill factor limitation of silicon heterojunction solar cells by junction recombination
Reusch, M.; Bivour, M.; Hermle, M.; Glunz, S.W.
Journal Article
2013High-power-plasma PECVD of SiNx and Al2O3 for industrial solar cell manufacturing
Hofmann, M.; Kohn, N.; Schwarz, F.; Nölker, S.; Kastl, S.; Beckmann, R.; Ferré, R.; Pernau, T.; Trogus, D.; Kühnhold, S.; Saint-Cast, P.; Rentsch, J.
Conference Paper
2013Impact on iron surface contamination on the lifetime degradation of samples passivated by fired AL2O3/SiNx
Breitenstein, L.; Schön, J.; Schubert, M.; Warta, W.
Journal Article
2013Industrial screen-printed solar cells with novel atmospheric pressure dry texturing process
Kafle, B.; Trogus, D.; Dresler, B.; Mäder, G.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Conference Paper
2013Integrating diffractive rear side structures for light trapping into crystalline silicon solar cells
Eisenlohr, J.; Hauser, H.; Benick, J.; Mellor, A.; Bläsi, B.; Goldschmidt, J.; Hermle, M.
Conference Paper
2013Laser assisted honeycomb-texturing on multicrystalline silicon for industrial applications
Volk, A.-K.; Gutscher, S.; Brand, A.; Wolke, W.; Zimmer, M.; Reinecke, H.
Conference Paper
2013Microscopy analysis of pyramid formation evolution with ultra-low concentrated Na2CO3/NaHCO3 solution on (100) Si for solar cell application
Montesdeoca-Santana, A.; Orive, A.G.; Creus, A.H.; Gonzalez-Diaz, B.; Borchert, D.; Guerrero-Lemus, R.
Journal Article
2013Multifunctional PECVD layers: Dopant source, passivation, and optics
Seiffe, J.; Pillath, F.; Trogus, D.; Brand, A.; Savio, C.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2013A novel approach for single side wet chemical polishing of crystalline silicon solar cells
Richter, M.; Kästner, G.; Zimmer, M.; Fischer, A.; Corda, M.; Hain, A.
Conference Paper
2013PassDop based on firing stable a-SiNx:P as a concept for the industrial implementation of n-Type PERL silicon solar cells
Steinhauser, B.; Mansoor, M. bin; Jäger, U.; Benick, J.; Hermle, M.
Conference Paper
2013Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide
Repo, P.; Benick, J.; Gastrow, G. von; Vähänissi, V.; Heinz, F.D.; Schön, J.; Schubert, M.C.; Savin, H.
Journal Article
2013Passivation of solar cell emitters using aluminum nitride
Krugel, G.; Sharma, A.; Moldovan, A.; Wolke, W.; Rentsch, J.; Preu, R.
Conference Paper
2013PECVD Al2O3/a-Si:B as a dopant source and surface passivation
Seiffe, J.; Gahoi, A.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2013A predictive optical simulation model for the rear surface roughness of passivated silicon solar cells
Wöhrle, M.; Greulich, J.; Schwab, C.; Glatthaar, M.; Rein, S.
Journal Article
2013Recombination and optical properties of wet chemically polished thermal oxide passivated Si surfaces
Schwab, C.; Wolf, A.; Graf, M.; Wöhrle, N.; Greulich, J.; Kühnhold, S.; Kästner, G.; Biro, D.; Preu, R.
Journal Article
2013Study of hydrogenated AlN as an anti-reflective coating and for the effective surface passivation of silicon
Krugel, G.; Sharma, A.; Wolke, W.; Rentsch, J.; Preu, R.
Journal Article
2013Technologies for mass production of > 20% efficient P-Type silicon solar cells
Mack, S.; Wolf, A.; Thaidigsmann, B.; Lohmüller, E.; Jäger, U.; Pospischil, M.; Clement, F.; Eberlein, D.; Preu, R.; Biro, D.
Conference Paper
2013Two-step plasma texturing process for industrial solar cell manufacturing
Seiffe, J.; Bremen, B.; Rappl, S.; Hofmann, M.; Rentsch, J.
Conference Paper
This publication list has been generated from the publication database Fraunhofer-Publica.