Siliziummaterial und Halbleitersubstrate

FuE-Infrastruktur

Für unsere Forschungs- und Entwicklungstätigkeiten zu Siliziummaterial und Halbleitersubstraten steht uns am Fraunhofer ISE diese Infrastruktur zur Verfügung:

Mikroelektronik CVD-Reaktor für hochreine Si- und Ge-Epitaxie für bis M6 Substrate (PEpi)

Labor-CVD-Reaktoren für Si-Epitaxie (RTCVD100 / RTCVD160)

Labor-CVD-Reaktor für SiC-Abscheidung (ZS-RTCVD)

Mehrere Nasschemielabore zur Vorbereitung der Substrate und für Defektätzen

Elektrochemische Porosifikationsanlagen für 4“ bis 300 mm rund und 166x166 mm²

Temperöfen verschiedener Sauberkeitsklassen (H2-, Ar-, N2-Atmosphäre)

Flächendefinitions- und lift-off Equipment

Optische Mikroskope zur Oberflächenuntersuchung, automatischen Defektanalyse und Schichtdickenbestimmung

Aktuelle Veröffentlichungen zum Thema »Siliziummaterial und Halbleitersubstrate«

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2023	High Lifetime Ga-doped Cz-Si for Carrier-Selective Junction Solar Cells Horzel, Jörg; Mack, Sebastian; Voicu Vulcanean, Ioan; Zimmermann, Karin; Pingel, Sebastian; Kwapil, Wolfram; Maischner, Felix; Höffler, Hannes; Bashardoust, Sattar; Wagenmann, Dirk; Greulich, Johannes; Seif, Johannes; Steinmetz, Anamaria; Rentsch, Jochen	Zeitschriftenaufsatz Journal Article
2023	Silizium: Vom Material zum Wafer - Status und notwendige Entwicklungsschritte Dold, Peter	Konferenzbeitrag Conference Paper
2023	Epitaxially Grown p-type Silicon Wafers Ready for Cell Efficiencies Exceeding 25% Rittmann, Clara; Schindler, Florian; Richter, Armin; Niewelt, Tim; Stolzenburg, Hannah; Steinhauser, Bernd; Dalke, Jonas; Drießen, Marion; Weiss, Charlotte; Janz, Stefan; Schubert, Martin	Zeitschriftenaufsatz Journal Article
2023	A Grain Orientation-Independent Single-Step Saw Damage Gettering/Wet texturing Process for Efficient Silicon Solar Cells Jung, Yujin; Min, Kwan Hong; Post, Regina; Kwapil, Wolfram; Schubert, Martin; Kim, Donghwan; Kang, Yoonmook; Lee, Hae-Sok	Zeitschriftenaufsatz Journal Article
2022	Epitaxially grown p-type silicon wafers ready for cell efficiencies exceeding 25 % Rittmann, Clara; Dalke, Jonas; Richter, Armin; Steinhauser, Bernd; Drießen, Marion; Weiss, Charlotte; Schindler, Florian; Schubert, Martin; Janz, Stefan; Niewelt, Tim; Stolzenburg, Hannah	Vortrag Presentation
2022	High Lifetime Ga-Doped Cz-Si for Carrier Selective Junction Solar Cells Horzel, Jörg; Mack, Sebastian; Voicu Vulcanean, Ioan; Zimmermann, Karin; Pingel, Sebastian; Kwapil, Wolfram; Maischner, Felix; Höffler, Hannes; Bashardoust, Sattar; Wagenmann, Dirk; Greulich, Johannes; Seif, Johannes; Steinmetz, Anamaria; Rentsch, Jochen	Konferenzbeitrag Conference Paper
2022	Electronic Characteristics of Ultra-Thin Passivation Layers for Silicon Photovoltaics Pain, Sophie L.; Khorani, Edris; Niewelt, Tim; Wratten, Ailish; Paez Fajardo, Galo J.; Winfield, Ben P.; Bonilla, Ruy S.; Walker, Marc; Piper, Louis F. J.; Grant, Nicholas E.; Murphy, John D.	Zeitschriftenaufsatz Journal Article
2022	LeTID mitigation via an adapted firing process in p-type PERC cells from SMART cast-monocrystalline, Czochralski and high-performance multicrystalline silicon Maischner, Felix; Maus, Stephan; Greulich, Johannes M.; Lohmüller, Sabrina; Lohmüller, Elmar; Saint-Cast, Pierre; Ourinson, Daniel; Vahlman, Henri; Hergert, K.; Riepe, Stephan; Glunz, Stefan W.; Rein, Stefan	Zeitschriftenaufsatz Journal Article
2022	PERC-Cells from 100% Recycling-Silicon from End-of-Life PV-Modules Dold, Peter; Obst, Andreas; Henatsch, Peter; Zobel, Frank; Riepe, Stephan; Wagenmann, Dirk; Lohmüller, Elmar; Lohmüller, Sabrina	Meeting Abstract
2022	21.4% Efficient SMART mono-Si PERC Solar Cells with Adapted Firing Process for LeTID Mitigation Maischner, Felix; Maus, Stephan; Greulich, Johannes; Lohmüller, Sabrina; Lohmüller, Elmar; Saint-Cast, Pierre; Ourinson, Daniel; Hergert, Karin; Riepe, Stephan; Glunz, Stefan; Rein, Stefan	Konferenzbeitrag Conference Paper
2022	Growth of Highly Doped Silicon Cz-Monocrystals with Alternate Doping Substances Zobel, Frank; Kunert, Roland; Dold, Peter	Vortrag Presentation
2021	Efficiency Potential Analysis of p- and n-Type Epitaxially Grown Si Wafers Rittmann, Clara; Dalke, Jonas; Drießen, Marion; Weiss, Charlotte; Schindler, Florian; Sorgenfrei, Ralf; Schubert, Martin C.; Janz, Stefan	Konferenzbeitrag Conference Paper
2021	The Potential of Cast Silicon Schubert, Martin C.; Schindler, Florian; Benick, Jan; Riepe, Stephan; Krenckel, Patricia; Richter, Armin; Müller, Ralph; Hammann, Benjamin; Nold, Sebastian	Zeitschriftenaufsatz Journal Article
2021	Propagation of Crystal Defects During Directional Solidification of Silicon via Induction of Functional Defects Krenckel, Patricia; Hayama, Y.; Schindler, Florian; Trötschler, Theresa; Riepe, Stephan; Usami, N.	Zeitschriftenaufsatz Journal Article
2021	Influence of Dopant Elements on Degradation Phenomena in B- and Ga-Doped Czochralski-grown Silicon Kwapil, Wolfram; Dalke, Jonas; Post, Regina; Niewelt, Tim	Zeitschriftenaufsatz Journal Article
2020	LeTID- and (Extended) BO-Related Degradation and Regeneration in B- and Ga-Doped Monocrystalline Silicon during Dark and Illuminated Anneals Kwapil, Wolfram; Dalke, Jonas; Niewelt, Tim; Schubert, Martin C.	Konferenzbeitrag Conference Paper
2020	The Crystal Growth Explorer: Real-Time Navigable 3D Visualization of Silicon Grains and Defect Related Data in Cast-Mono and Multicrystalline Bricks Schönauer, J.; Demant, Matthias; Trötschler, Theresa; Kovvali, Aditya Sai; Schremmer, H.; Krenckel, Patricia; Riepe, Stephan; Rein, Stefan	Konferenzbeitrag Conference Paper
2020	Atom Probe Tomography Study of Gettering in High-Performance Multicrystalline Silicon Tweddle, D.; Hamer, P.; Shen, Z.; Heinz, Friedemann D.; Krenckel, Patricia; Riepe, Stephan; Schindler, Florian; Wilshaw, Peter R.; Moody, M.P.	Zeitschriftenaufsatz Journal Article
2020	Early Stage Quality Assesment in Silicon Ingots from MDP Brick Characterization Kovvali, Aditya Sai; Demant, Matthias; Rebba, B.; Schüler, N.; Haunschild, Jonas; Rein, Stefan	Konferenzbeitrag Conference Paper
2019	Correlation of defect luminescence and recombination in multicrystalline silicon Wyller, Guro Marie; Schindler, Florian; Kwapil, Wolfram; Schön, Jonas; Olsen, Espen; Haug, Halvard; Riepe, Stephan; Schubert, Martin C.	Zeitschriftenaufsatz Journal Article
2019	Enhanced Material Quality in SMART Moni-Si Block Cast Ingots by Introduction of Functional Defects Riepe, Stephan; Krenckel, Patricia; Hayama, Y.; Hess, Adam; Trötschler, Theresa; Kutsukake, K.; Maus, Stephan; Schindler, Florian; Usami, N.	Konferenzbeitrag Conference Paper
2018	Development of high performance multicrystalline silicon with controlled seeding Hess, Adam; Krenckel, Patricia; Trötschler, Theresa; Fehrenbach, Tobias; Riepe, Stephan	Konferenzbeitrag Conference Paper
2018	Slurry Sawing of Multicrystalline Silicon with Low-Viscosity Carrier Liquid Kaden, Thomas; Look, C.; Ischenko, V.; Gröschel, M.; Anspach, O.	Konferenzbeitrag Conference Paper
2018	Towards the Efficiency Limits of Multicrystalline Silicon Solar Cells Schindler, Florian; Fell, Andreas; Müller, Ralph; Benick, Jan; Richter, Armin; Feldmann, Frank; Krenckel, Patricia; Riepe, Stephan; Schubert, Martin C.; Glunz, Stefan W.	Zeitschriftenaufsatz Journal Article
2018	Metal Contamination in the Diamond Wire Sawing Process of Silicon and Influence on the Solar Cell Efficiency Kaden, Thomas; Lottspeich, Lydia	Konferenzbeitrag Conference Paper
2018	Trends in Solar Electricity Bett, Andreas W.	Vortrag Presentation
2018	Photonic structures for III-V//Si multi-junction solar cells with efficiency >33% Bläsi, Benedikt; Höhn, Oliver; Hauser, Hubert; Tucher, Nico; Cariou, Romain; Benick, Jan; Feldmann, Frank; Beutel, Paul; Lackner, David; Siefer, Gerald; Glunz, Stefan W.; Bett, Andreas W.; Dimroth, Frank; Hermle, Martin	Konferenzbeitrag Conference Paper
2017	Determination of impurity distributions in ingots of solar grade silicon by neutron activation analysis Karches, B.; Schön, Jonas; Gerstenberg, H.; Hampel, G.; Krenckel, Patricia; Plonka, C.; Ponsard, B.; Riepe, Stephan; Stieghorst, C.; Wiehl, N.	Zeitschriftenaufsatz Journal Article
2017	Optimized multicrystalline silicon for solar cells enabling conversion efficiencies of 22% Schindler, Florian; Michl, Bernhard; Krenckel, Patricia; Riepe, Stephan; Benick, Jan; Müller, Ralph; Richter, Armin; Glunz, Stefan W.; Schubert, Martin C.	Zeitschriftenaufsatz Journal Article
2017	Instrumental determination of phosphorus in silicon for photovoltaics by v spectroscopy: A new approach Karches, B.; Welter, K.; Stieghorst, C.; Wiehl, N.; Reich, T.; Riepe, Stephan; Krenckel, Patricia; Gerstenberg, H.; Plonka, C.	Zeitschriftenaufsatz Journal Article
2017	The influence of material properties on the wire sawing process of multicrystalline silicon Kaden, Thomas; Ershova, E.; Lottspeich, Lydia; Fuchs, M.	Konferenzbeitrag Conference Paper
2017	High-Efficiency n-Type HP MC Silicon Solar Cells Benick, Jan; Richter, Armin; Müller, Ralph; Hauser, Hubert; Feldmann, Frank; Krenckel, Patricia; Riepe, Stephan; Schindler, Florian; Schubert, Martin C.; Hermle, Martin; Bett, Andreas W.; Glunz, Stefan W.	Zeitschriftenaufsatz Journal Article
2017	Growth of large scale silicon crystals by the rf-heated float zone technique Zobel, Frank; Mosel, F.; Störensen, J.; Dold, Peter	Konferenzbeitrag Conference Paper
2017	Feeding of liquid silicon for high performance multicrystalline silicon with increased ingot height and homogenized resistivity Krenckel, Patricia; Riepe, Stephan; Schindler, Florian; Strauch, T.	Zeitschriftenaufsatz Journal Article
2017	Rapid vapor-phase direct diffused emitter for solar cell applications Kühnhold-Pospischil, Saskia; Gust, Elke; Amiri, Diana; Richter, Armin; Steinhauser, Bernd; Drießen, Marion; Michl, Bernhard; Greulich, Johannes M.; Benick, Jan; Lindekugel, Stefan; Janz, Stefan	Konferenzbeitrag Conference Paper
2017	A novel approach to determine the diamond occupancy of diamond wires for optimized cutting processes for crystalline silicon Lottspeich, Lydia; Theophil, L.; Fuchs, M.; Kaden, Thomas	Konferenzbeitrag Conference Paper
2017	Characterization of the diamond wire sawing process for monocrystalline silicon by raman spectroscopy and SIREX polarimetry Würzner, S.; Herms, M.; Kaden, Thomas; Möller, H.J.; Wagner, M.	Zeitschriftenaufsatz Journal Article
2017	Approaching 22% efficiency with multicrystalline n-type silicon solar cells Benick, Jan; Müller, Ralph; Schindler, Florian; Richter, Armin; Hauser, Hubert; Feldmann, Frank; Krenckel, Patricia; Riepe, Stephan; Schubert, Martin C.; Hermle, Martin; Glunz, Stefan W.	Konferenzbeitrag Conference Paper
2017	How to achieve efficiencies exceeding 22% with multicrystalline n-type silicon solar cells Schindler, Florian; Michl, Bernhard; Krenckel, Patricia; Riepe, Stephan; Benick, Jan; Müller, Ralph; Richter, Armin; Glunz, Stefan W.; Schubert, Martin C.	Zeitschriftenaufsatz Journal Article
2016	Insights into metastability of photovoltaic materials at the mesoscale through massive I-V analytics Peshek, T.J.; Fada, J.S.; Hu, Y.; Xu, Y.; Elsaeiti, M.A.; Schnabel, Erdmut; Köhl, Michael; French, Roger H.	Zeitschriftenaufsatz Journal Article
2016	Changes of solar cell parameters during damp-heat exposure Zhu, J.; Köhl, Michael; Hoffmann, Stephan; Berger, K.A.; Zamini, S.; Bennett, I.; Gerritsen, E.; Malbranche, P.; Pugliatti, P.; Di Stefano, A.; Aleo, F.; Bertani, D.; Paletta, F.; Roca, F.; Graditi, G.; Pellegrino, M.; Zubillaga, O.; Iranzo, F.J.C.; Pozza, A.; Sample, T.; Gottschalg, Ralph	Zeitschriftenaufsatz Journal Article
2016	Cost Effective Growth of Silicon Mono Ingots by the Application of a Mobile Recharge System in CZ-Puller Mosel, F.; Denisov, A.V.; Klipp, B.; Spill, B.; Sharma, R.; Kunert, Roland; Dold, Peter	Konferenzbeitrag Conference Paper
2016	Impact of rain and soiling on potential induced degradation Köhl, Michael; Hoffmann, Stephan	Zeitschriftenaufsatz Journal Article
2016	Improving the material quality of silicon ingots by aluminum gettering during crystal growth Schön, Jonas; Krenckel, Patricia; Karches, B.; Schindler, Florian; Giesecke, Johannes A; Stieghorst, C.; Wiehl, N.; Schubert, Martin C.; Riepe, Stephan	Zeitschriftenaufsatz Journal Article
2016	N-type multicrystalline silion for high efficiency solar cells Riepe, Stephan; Krenckel, Patricia; Schindler, Florian; Schubert, Martin C.; Benick, Jan	Zeitschriftenaufsatz Journal Article
2016	Optimized Grain Size of Seed Plates for High Performance Multicrystalline Silicon Krenckel, Patricia; Riepe, Stephan; Schindler, Florian; Strauch, T.	Konferenzbeitrag Conference Paper
2016	Effect of thermal insulation of the back side of PV modules in the module temperature Köhl, Michael; Hamperl, S.; Heck, Markus	Zeitschriftenaufsatz Journal Article

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Epitaktisch gewachsene Wafer mit geringem CO₂-Fußabdruck

Siliziummaterial und Halbleitersubstrate

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Aktuelle Veröffentlichungen zum Thema »Siliziummaterial und Halbleitersubstrate«

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Dr. rer. nat. Charlotte Weiss