Siliziummaterial und Halbleitersubstrate

FuE-Infrastruktur

Für unsere Forschungs- und Entwicklungstätigkeiten zu Siliziummaterial und Halbleitersubstraten steht uns am Fraunhofer ISE diese Infrastruktur zur Verfügung:

Mikroelektronik CVD-Reaktor für hochreine Si- und Ge-Epitaxie für bis M6 Substrate (PEpi)

Labor-CVD-Reaktoren für Si-Epitaxie (RTCVD100 / RTCVD160)

Labor-CVD-Reaktor für SiC-Abscheidung (ZS-RTCVD)

Mehrere Nasschemielabore zur Vorbereitung der Substrate und für Defektätzen

Elektrochemische Porosifikationsanlagen für 4“ bis 300 mm rund und 166x166 mm²

Temperöfen verschiedener Sauberkeitsklassen (H2-, Ar-, N2-Atmosphäre)

Flächendefinitions- und lift-off Equipment

Optische Mikroskope zur Oberflächenuntersuchung, automatischen Defektanalyse und Schichtdickenbestimmung

Aktuelle Veröffentlichungen zum Thema »Siliziummaterial und Halbleitersubstrate«

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2023	Silizium: Vom Material zum Wafer - Status und notwendige Entwicklungsschritte Dold, Peter	Konferenzbeitrag Conference Paper
2023	A Grain Orientation-Independent Single-Step Saw Damage Gettering/Wet texturing Process for Efficient Silicon Solar Cells Jung, Yujin; Min, Kwan Hong; Post, Regina; Kwapil, Wolfram; Schubert, Martin; Kim, Donghwan; Kang, Yoonmook; Lee, Hae-Sok	Zeitschriftenaufsatz Journal Article
2023	High Lifetime Ga-doped Cz-Si for Carrier-Selective Junction Solar Cells Horzel, Jörg; Mack, Sebastian; Voicu Vulcanean, Ioan; Zimmermann, Karin; Pingel, Sebastian; Kwapil, Wolfram; Maischner, Felix; Höffler, Hannes; Bashardoust, Sattar; Wagenmann, Dirk; Greulich, Johannes; Seif, Johannes; Steinmetz, Anamaria; Rentsch, Jochen	Zeitschriftenaufsatz Journal Article
2023	Epitaxially Grown p-type Silicon Wafers Ready for Cell Efficiencies Exceeding 25% Rittmann, Clara; Schindler, Florian; Richter, Armin; Niewelt, Tim; Stolzenburg, Hannah; Steinhauser, Bernd; Dalke, Jonas; Drießen, Marion; Weiss, Charlotte; Janz, Stefan; Schubert, Martin	Zeitschriftenaufsatz Journal Article
2022	LeTID mitigation via an adapted firing process in p-type PERC cells from SMART cast-monocrystalline, Czochralski and high-performance multicrystalline silicon Maischner, Felix; Maus, Stephan; Greulich, Johannes M.; Lohmüller, Sabrina; Lohmüller, Elmar; Saint-Cast, Pierre; Ourinson, Daniel; Vahlman, Henri; Hergert, K.; Riepe, Stephan; Glunz, Stefan W.; Rein, Stefan	Zeitschriftenaufsatz Journal Article
2022	Epitaxially grown p-type silicon wafers ready for cell efficiencies exceeding 25 % Rittmann, Clara; Dalke, Jonas; Richter, Armin; Steinhauser, Bernd; Drießen, Marion; Weiss, Charlotte; Schindler, Florian; Schubert, Martin; Janz, Stefan; Niewelt, Tim; Stolzenburg, Hannah	Vortrag Presentation
2022	PERC-Cells from 100% Recycling-Silicon from End-of-Life PV-Modules Dold, Peter; Obst, Andreas; Henatsch, Peter; Zobel, Frank; Riepe, Stephan; Wagenmann, Dirk; Lohmüller, Elmar; Lohmüller, Sabrina	Meeting Abstract
2022	21.4% Efficient SMART mono-Si PERC Solar Cells with Adapted Firing Process for LeTID Mitigation Maischner, Felix; Maus, Stephan; Greulich, Johannes; Lohmüller, Sabrina; Lohmüller, Elmar; Saint-Cast, Pierre; Ourinson, Daniel; Hergert, Karin; Riepe, Stephan; Glunz, Stefan; Rein, Stefan	Konferenzbeitrag Conference Paper
2022	High Lifetime Ga-Doped Cz-Si for Carrier Selective Junction Solar Cells Horzel, Jörg; Mack, Sebastian; Voicu Vulcanean, Ioan; Zimmermann, Karin; Pingel, Sebastian; Kwapil, Wolfram; Maischner, Felix; Höffler, Hannes; Bashardoust, Sattar; Wagenmann, Dirk; Greulich, Johannes; Seif, Johannes; Steinmetz, Anamaria; Rentsch, Jochen	Konferenzbeitrag Conference Paper
2022	Electronic Characteristics of Ultra-Thin Passivation Layers for Silicon Photovoltaics Pain, Sophie L.; Khorani, Edris; Niewelt, Tim; Wratten, Ailish; Paez Fajardo, Galo J.; Winfield, Ben P.; Bonilla, Ruy S.; Walker, Marc; Piper, Louis F. J.; Grant, Nicholas E.; Murphy, John D.	Zeitschriftenaufsatz Journal Article
2022	Growth of Highly Doped Silicon Cz-Monocrystals with Alternate Doping Substances Zobel, Frank; Kunert, Roland; Dold, Peter	Vortrag Presentation
2021	The Potential of Cast Silicon Schubert, Martin C.; Schindler, Florian; Benick, Jan; Riepe, Stephan; Krenckel, Patricia; Richter, Armin; Müller, Ralph; Hammann, Benjamin; Nold, Sebastian	Zeitschriftenaufsatz Journal Article
2021	Efficiency Potential Analysis of p- and n-Type Epitaxially Grown Si Wafers Rittmann, Clara; Dalke, Jonas; Drießen, Marion; Weiss, Charlotte; Schindler, Florian; Sorgenfrei, Ralf; Schubert, Martin C.; Janz, Stefan	Konferenzbeitrag Conference Paper
2021	Influence of Dopant Elements on Degradation Phenomena in B- and Ga-Doped Czochralski-grown Silicon Kwapil, Wolfram; Dalke, Jonas; Post, Regina; Niewelt, Tim	Zeitschriftenaufsatz Journal Article
2021	Propagation of Crystal Defects During Directional Solidification of Silicon via Induction of Functional Defects Krenckel, Patricia; Hayama, Y.; Schindler, Florian; Trötschler, Theresa; Riepe, Stephan; Usami, N.	Zeitschriftenaufsatz Journal Article
2020	Atom Probe Tomography Study of Gettering in High-Performance Multicrystalline Silicon Tweddle, D.; Hamer, P.; Shen, Z.; Heinz, Friedemann D.; Krenckel, Patricia; Riepe, Stephan; Schindler, Florian; Wilshaw, Peter R.; Moody, M.P.	Zeitschriftenaufsatz Journal Article
2020	The Crystal Growth Explorer: Real-Time Navigable 3D Visualization of Silicon Grains and Defect Related Data in Cast-Mono and Multicrystalline Bricks Schönauer, J.; Demant, Matthias; Trötschler, Theresa; Kovvali, Aditya Sai; Schremmer, H.; Krenckel, Patricia; Riepe, Stephan; Rein, Stefan	Konferenzbeitrag Conference Paper
2020	Early Stage Quality Assesment in Silicon Ingots from MDP Brick Characterization Kovvali, Aditya Sai; Demant, Matthias; Rebba, B.; Schüler, N.; Haunschild, Jonas; Rein, Stefan	Konferenzbeitrag Conference Paper
2020	LeTID- and (Extended) BO-Related Degradation and Regeneration in B- and Ga-Doped Monocrystalline Silicon during Dark and Illuminated Anneals Kwapil, Wolfram; Dalke, Jonas; Niewelt, Tim; Schubert, Martin C.	Konferenzbeitrag Conference Paper
2019	Correlation of defect luminescence and recombination in multicrystalline silicon Wyller, Guro Marie; Schindler, Florian; Kwapil, Wolfram; Schön, Jonas; Olsen, Espen; Haug, Halvard; Riepe, Stephan; Schubert, Martin C.	Zeitschriftenaufsatz Journal Article
2019	Enhanced Material Quality in SMART Moni-Si Block Cast Ingots by Introduction of Functional Defects Riepe, Stephan; Krenckel, Patricia; Hayama, Y.; Hess, Adam; Trötschler, Theresa; Kutsukake, K.; Maus, Stephan; Schindler, Florian; Usami, N.	Konferenzbeitrag Conference Paper
2018	Slurry Sawing of Multicrystalline Silicon with Low-Viscosity Carrier Liquid Kaden, Thomas; Look, C.; Ischenko, V.; Gröschel, M.; Anspach, O.	Konferenzbeitrag Conference Paper
2018	Development of high performance multicrystalline silicon with controlled seeding Hess, Adam; Krenckel, Patricia; Trötschler, Theresa; Fehrenbach, Tobias; Riepe, Stephan	Konferenzbeitrag Conference Paper
2018	Photonic structures for III-V//Si multi-junction solar cells with efficiency >33% Bläsi, Benedikt; Höhn, Oliver; Hauser, Hubert; Tucher, Nico; Cariou, Romain; Benick, Jan; Feldmann, Frank; Beutel, Paul; Lackner, David; Siefer, Gerald; Glunz, Stefan W.; Bett, Andreas W.; Dimroth, Frank; Hermle, Martin	Konferenzbeitrag Conference Paper
2018	Towards the Efficiency Limits of Multicrystalline Silicon Solar Cells Schindler, Florian; Fell, Andreas; Müller, Ralph; Benick, Jan; Richter, Armin; Feldmann, Frank; Krenckel, Patricia; Riepe, Stephan; Schubert, Martin C.; Glunz, Stefan W.	Zeitschriftenaufsatz Journal Article
2018	Trends in Solar Electricity Bett, Andreas W.	Vortrag Presentation
2018	Metal Contamination in the Diamond Wire Sawing Process of Silicon and Influence on the Solar Cell Efficiency Kaden, Thomas; Lottspeich, Lydia	Konferenzbeitrag Conference Paper
2017	Optimized multicrystalline silicon for solar cells enabling conversion efficiencies of 22% Schindler, Florian; Michl, Bernhard; Krenckel, Patricia; Riepe, Stephan; Benick, Jan; Müller, Ralph; Richter, Armin; Glunz, Stefan W.; Schubert, Martin C.	Zeitschriftenaufsatz Journal Article
2017	Determination of impurity distributions in ingots of solar grade silicon by neutron activation analysis Karches, B.; Schön, Jonas; Gerstenberg, H.; Hampel, G.; Krenckel, Patricia; Plonka, C.; Ponsard, B.; Riepe, Stephan; Stieghorst, C.; Wiehl, N.	Zeitschriftenaufsatz Journal Article
2017	Instrumental determination of phosphorus in silicon for photovoltaics by v spectroscopy: A new approach Karches, B.; Welter, K.; Stieghorst, C.; Wiehl, N.; Reich, T.; Riepe, Stephan; Krenckel, Patricia; Gerstenberg, H.; Plonka, C.	Zeitschriftenaufsatz Journal Article
2017	Characterization of the diamond wire sawing process for monocrystalline silicon by raman spectroscopy and SIREX polarimetry Würzner, S.; Herms, M.; Kaden, Thomas; Möller, H.J.; Wagner, M.	Zeitschriftenaufsatz Journal Article
2017	Approaching 22% efficiency with multicrystalline n-type silicon solar cells Benick, Jan; Müller, Ralph; Schindler, Florian; Richter, Armin; Hauser, Hubert; Feldmann, Frank; Krenckel, Patricia; Riepe, Stephan; Hermle, Martin; Schubert, Martin C.; Glunz, Stefan W.	Konferenzbeitrag Conference Paper
2017	A novel approach to determine the diamond occupancy of diamond wires for optimized cutting processes for crystalline silicon Lottspeich, Lydia; Theophil, L.; Fuchs, M.; Kaden, Thomas	Konferenzbeitrag Conference Paper
2017	Rapid vapor-phase direct diffused emitter for solar cell applications Kühnhold-Pospischil, Saskia; Gust, Elke; Amiri, Diana; Michl, Bernhard; Lindekugel, Stefan; Richter, Armin; Steinhauser, Bernd; Greulich, Johannes M.; Drießen, Marion; Janz, Stefan; Benick, Jan	Konferenzbeitrag Conference Paper
2017	Feeding of liquid silicon for high performance multicrystalline silicon with increased ingot height and homogenized resistivity Krenckel, Patricia; Riepe, Stephan; Schindler, Florian; Strauch, T.	Zeitschriftenaufsatz Journal Article
2017	How to achieve efficiencies exceeding 22% with multicrystalline n-type silicon solar cells Schindler, Florian; Michl, Bernhard; Krenckel, Patricia; Riepe, Stephan; Benick, Jan; Müller, Ralph; Richter, Armin; Glunz, Stefan W.; Schubert, Martin C.	Zeitschriftenaufsatz Journal Article
2017	Growth of large scale silicon crystals by the rf-heated float zone technique Zobel, Frank; Mosel, F.; Störensen, J.; Dold, Peter	Konferenzbeitrag Conference Paper
2017	The influence of material properties on the wire sawing process of multicrystalline silicon Kaden, Thomas; Ershova, E.; Lottspeich, Lydia; Fuchs, M.	Konferenzbeitrag Conference Paper
2017	High-Efficiency n-Type HP MC Silicon Solar Cells Benick, Jan; Richter, Armin; Müller, Ralph; Hauser, Hubert; Feldmann, Frank; Krenckel, Patricia; Riepe, Stephan; Schindler, Florian; Schubert, Martin C.; Hermle, Martin; Bett, Andreas W.; Glunz, Stefan W.	Zeitschriftenaufsatz Journal Article
2016	Cost Effective Growth of Silicon Mono Ingots by the Application of a Mobile Recharge System in CZ-Puller Mosel, F.; Denisov, A.V.; Klipp, B.; Spill, B.; Sharma, R.; Kunert, Roland; Dold, Peter	Konferenzbeitrag Conference Paper
2016	Changes of solar cell parameters during damp-heat exposure Zhu, J.; Köhl, Michael; Hoffmann, Stephan; Berger, K.A.; Zamini, S.; Bennett, I.; Gerritsen, E.; Malbranche, P.; Pugliatti, P.; Di Stefano, A.; Aleo, F.; Bertani, D.; Paletta, F.; Roca, F.; Graditi, G.; Pellegrino, M.; Zubillaga, O.; Iranzo, F.J.C.; Pozza, A.; Sample, T.; Gottschalg, Ralph	Zeitschriftenaufsatz Journal Article
2016	Insights into metastability of photovoltaic materials at the mesoscale through massive I-V analytics Peshek, T.J.; Fada, J.S.; Hu, Y.; Xu, Y.; Elsaeiti, M.A.; Schnabel, Erdmut; Köhl, Michael; French, Roger H.	Zeitschriftenaufsatz Journal Article
2016	Optimized Grain Size of Seed Plates for High Performance Multicrystalline Silicon Krenckel, Patricia; Riepe, Stephan; Schindler, Florian; Strauch, T.	Konferenzbeitrag Conference Paper
2016	N-type multicrystalline silion for high efficiency solar cells Riepe, Stephan; Krenckel, Patricia; Schindler, Florian; Schubert, Martin C.; Benick, Jan	Zeitschriftenaufsatz Journal Article
2016	Improving the material quality of silicon ingots by aluminum gettering during crystal growth Schön, Jonas; Krenckel, Patricia; Karches, B.; Schindler, Florian; Giesecke, Johannes A; Stieghorst, C.; Wiehl, N.; Schubert, Martin C.; Riepe, Stephan	Zeitschriftenaufsatz Journal Article
2016	Impact of rain and soiling on potential induced degradation Köhl, Michael; Hoffmann, Stephan	Zeitschriftenaufsatz Journal Article
2016	Effect of thermal insulation of the back side of PV modules in the module temperature Köhl, Michael; Hamperl, S.; Heck, Markus	Zeitschriftenaufsatz Journal Article

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Epitaktisch gewachsene Wafer mit geringem CO₂-Fußabdruck

Siliziummaterial und Halbleitersubstrate

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Aktuelle Veröffentlichungen zum Thema »Siliziummaterial und Halbleitersubstrate«

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Dr. rer. nat. Charlotte Weiss