In order to produce perovskite layers of the highest quality for perovskite-silicon tandem solar cells, we are pursuing a hybrid route combining vacuum evaporation and solution deposition. The two processes complement each other perfectly to enable the deposition of perovskite layers on micrometer-sized silicon pyramids. This has enabled us to achieve efficiencies of over 32%. We are now transferring this technology to our Pero-Si-SCALE technology platform using industrially scalable equipment for full wafer sizes (M12).