High-Speed Laser Processing

While modern ultrashort pulse lasers achieve unprecedented power levels, unlocking their full potential for industrial applications requires advances in beam delivery and process automation. Traditional systems face critical bottlenecks in scan speeds, positioning accuracy, and thermal management – particularly when processing large-area substrates.

We’ve pioneered a dynamic processing architecture combining polygon scanners (>1 km/s scan speeds), real-time workpiece tracking, and adaptive beam control to achieve 8× faster throughput than conventional galvanometer systems.


Our Key Innovations Include:

  • Large-field processing with >200mm scan fields at <10 μm spot sizes, Wafer-scale uniformity <2% variation across 210 mm substrates
  • Synchronized NIR/UV ultrashort pulses for contact opening speeds exceeding 500,000 holes/second 

This platform has demonstrated record-breaking performance in photovoltaic manufacturing, including 15,000 wafers/hour processing rates for PERC solar cells.

For functional surface modifications, we also integrate DLIP (Direct Laser Interference Patterning) with high-energy pulsed lasers to create periodic structures. This capability enables cost-effective production of anti-reflective, self-cleaning, or tribologically optimized surfaces. 


Our Solutions Bridge the Gap Between Lab-Scale R&D and Full Production:

  • Modular tool designs compatible with roll-to-roll and conveyor systems
  • Sensor and actuator integration for on-the-fly workpiece detection, workpiece tracking and process control 


Our R&D Service for Industries Include:

  • Leveraging ultrashort pulse lasers for your industrial application
  • Integration of optical position sensors in your laser processes for real-time position feedback
  • Custom sensor development to ensure precision and efficiency for your workpieces
  • Optimization of your processing strategy
Laser-Bearbeitung von Solarzellen im laufenden Betrieb.
© Fraunhofer ISE
Photo of on-the-fly laser processing of solar cells.
© Fraunhofer ISE
Schematic representation of on-the-fly processing with a polygon scanner. The workpiece is transported on a conveyor belt underneath the scanner. Its position is detected by optical sensors and signals are generated for the laser and the scanner.
UV-Polygonscanner für starke Fokussierung und großflächige Bearbeitung bei höchstem Durchsatz.
© Fraunhofer ISE
UV polygon scanner for strong focusing and large field processing at highest throughput.

Video: High-Throughput On-the-Fly Laser Processing

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Language: English | Duration: 0:56 Min.

Our on-the-fly laser processing technology enables a throughput of up to 15000 silicon wafer-based solar cells per hour per scanner. We have developed a combination of smart sensors and polygon-based laser scanning at deflection velocities of up to 1000m/s to achieve almost an order of magnitude increase in productivity compared to conventional systems.

The process seen in this video is known as “laser contact opening.” It is applied to the majority of solar cells produced today.

More Information on this Research Topic

 

Photovoltaic Technology Evaluation Center

PV-TEC

Production and Measurement Technology for Crystalline Silicon Solar Cells

Research Project

Miracle

High-Throughput Microablation for Electroplating Next-Generation Solar Cells

News

Laser Processing System

for Large-Format Wafers Combines High-Throughput and Precision