Fraunhofer Institute for Solar Energy Systems ISE
Fraunhofer Institute for Solar Energy Systems ISE

Dr. Ralf Preu

Director, Division Photovoltaics - Production Technology

Curriculum vitae

Since 2018 Director, Division Photovoltaics - Production Technology
Since 2008  Private Lecturer
Albert-Ludwigs-Universität Freiburg im Breisgau
Lecture photovoltaic technology in Renewable energy management master
1/2011 - 12/2017 Head of Division PV Production Technology and Quality Assurance
1/2007 - 12/2010

Head of Department PV Production Technology and Quality Assurance
Fraunhofer ISE
1/2002 - 12/2006

Department PV Production Technology and Quality Assurance
Head of Group
Fraunhofer ISE
3/2004 - 6/2006 CEO
PSE project company Solare Energiesysteme GmbH
1996 - 2003 Open University Hagen
Diploma Econophysicist
1996 - 2000 Open University Hagen
Dr.-Ing., Electrical Engineering and Electronics
1988 - 1996 Albert-Ludwigs-University Freiburg im Breisgau
Diploma, Physics
1992 – 1993 University of Toronto
Physics, Graduate Student 

Awards & outstanding achievements

5/2016

Laser Fired Contact Technology for the Production of Highly Efficient Silicon Solar Cells

Joseph von Fraunhofer Prize
Fraunhofer Society e.V. 
5/2014

Innovation Award Laser Technology

Working Group Laser Technology e.V. / European Laser Institute
1/2003

Dr. Meyer-Struckmann Science Award

Brandenburg University of Technology Cottbus (BTU)

Publications

YearTitle/AuthorDocument Type
2020Postmetallization "Passivated Edge Technology" for Separated Silicon Solar Cells
Baliozian, P.; Al-Akash, M.; Lohmüller, E.; Richter, A.; Fellmeth, T.; Münzer, A.; Wöhrle, N.; Saint-Cast, P.; Stolzenburg, H.; Spribille, A.; Preu, R.		Journal Article
2019Competitiveness of a European PV Manufacturing Chain
Rentsch, J.; Nold, S.; Preu, R.; Bett, A.W.; Jooss, W.; Trube, J.; Fath, P.		Journal Article
2019Digitalisierung bei der Produktion von Solar- und Batteriezellen
Preu, R.; Rein, S.; Zimmer, M.; Fleischer, J.; Weinmann, H.; Hofmann, J.		Conference Paper
2019Impact of POCl3 Diffusion Process Parameters on Oxygen Precipitation in Czochralski-Grown Silicon
Maus, S.; Lohmüller, S.; Mu, D.; Schön, J.; Niewelt, T.; Wolf, A.; Preu, R.		Conference Paper
2019PERC-Based Shingled Solar Cells and Modules at Fraunhofer ISE
Baliozian, P.; Klasen, N.; Wöhrle, N.; Kutter, C.; Stolzenburg, H.; Münzer, A.; Saint-Cast, P.; Mittag, M.; Lohmüller, E.; Fellmeth, T.; Al-Akash, M.; Kraft, A.; Heinrich, M.; Richter, A.; Fell, A.; Neuhaus, H.; Preu, R.		Journal Article
2019Precise Selective Doping and Metallization for Next-Generation PERC Technology: Presentation held at 13th International Photovoltaic Power Generation and Smart Energy Exhibition & Conference, SNEC 2019, Shanghai, China (R.O.), June 4 - June 6, 2019
Keding, R.; Efinger, R.; Lohmüller, E.; Jahn, M.; Fellmeth, T.; Messmer, M.; Meier-Meybrunn, S.; Horzel, J.; Lohmüller, S.; Weber, J.; Demant, M.; Lorenz, A.; Saint-Cast, P.; Brand, A.A.; Nekarda, J.; Clement, F.; Greulich, J.; Preu, R.; Pickrell, M.; Hermans, J.		Presentation
2019"Project FINALE" - Screen and Screen Printing Process Development for Ultra-Fine-Line Contacts below 20µm Finger Width
Clement, F.; Linse, M.; Tepner, S.; Wengenmeyer, N.; Ney, L.; Krieg, K.; Lorenz, A.; Pospischil, M.; Bechmann, S.; Oehrle, K.; Steckemetz, S.; Preu, R.		Conference Paper
2018Bifacial p-type silicon shingle solar cells - the "pSPEER" concept
Baliozian, P.; Lohmüller, E.; Fellmeth, T.; Wöhrle, N.; Krieg, A.; Preu, R.		Journal Article
2018Bifacial pSPEER Solar Cells for Shingle Modules
Baliozian, P.; Fellmeth, T.; Wöhrle, N.; Lohmüller, E.; Preu, R.		Conference Paper
2018Bifacial shingle solar cells on p-type Cz-Si (pSPEER)
Baliozian, P.; Lohmüller, E.; Fellmeth, T.; Wöhrle, N.; Krieg, A.; Preu, R.		Conference Paper
2018Digitalisierung bei der Produktion von Solar- und Batteriezellen: Vortrag gehalten auf der FVEE-Jahrestagung 2018, Berlin, Germany, 17.10.2018-18.10.2018
Preu, R.; Rein, S.; Zimmer, M.; Fleischer, J.; Weinmann, H.; Hofmann, J.		Presentation
2018Emitter Formation and Passivation Dependence on Crystal Grain Orientations after Atmospheric Pressure Dry Nanotexturing
Ridoy, A.I.; Kafle, B.; Saint-Cast, P.; Lohmüller, S.; Norouzi, M.H.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2018Impact of solidification dynamics on crystal properties of silicon molten by a nanosecond laser pulse
Meyer, F.; Büchler, A.; Brand, A.A.; Dasa, M.K.; Nekarda, J.F.; Preu, R.		Journal Article
2018Industry related approaches for bifacial p-type PERX solar cells
Fellmeth, T.; Meier, S.; Lohmüller, E.; Wöhrle, N.; Spribille, A.; Lohmüller, S.; Saint-Cast, P.; Wolf, A.; Clement, F.; Rein, S.; Preu, R.; Nakahara, M.; Dhamrin, M.; Knauss, H.; Haverkamp, H.; Steckemetz, S.; Bitnar, B.; Weber, T.; Palinginis, P.; Neuhaus, H.		Journal Article
2018Metallization Fraction of Bifacial pSPEER Shingle Solar Cells
Al-Akash, M.; Baliozian, P.; Lohmüller, E.; Fellmeth, T.; Wöhrle, N.; Preu, R.		Conference Paper
2018Verfahren zum Anheften einer metallischen Folie an eine Oberfläche eines Halbleitersubstrats und Halbleiterbauelement mit einer metallischen Folie:
Graf, Martin; Nekarda, Jan; Preu, Ralf		Patent
2017Analysis of the losses of industrial-type PERC solar cells
Saint-Cast, P.; Werner, S.; Greulich, J.; Jäger, U.; Lohmüller, E.; Höffler, H.; Preu, R.		Journal Article
2017The development of shingled cells and modules: Presentation held at Workshop on Crystalline Silicon Solar Cells and Modules. Materials and Processes 2017, Breckenridge, Colorado, USA, 30.07.2017-02.08.2017
Preu, R.		Presentation
2017High throughput printing for highly efficient cost-effective Si solar cells
Clement, F.; Lorenz, A.; Pospischil, M.; Biro, D.; Brocker, H.; Bangel, D.; Greutmann, R.; Lehner, M.; Ott, T.; Hage, F.; Oppelt, K.; Honold, T.; Wende, L.; Ringel, M.; Senne, A.; Rohde, J.; Preu, R.		Conference Paper
2017Increasing the efficiency of multicrystalline silicon PERC solar cells from currently 19% to 20%
Greulich, J.; Lohmüller, E.; Saint-Cast, P.; Werner, S.; Wasmer, S.; Horst, A.J. van der; Preu, R.		Conference Paper
2017Key aspects for fabrication of p-type Cz-Si PERC solar cells exceeding 22% conversion efficiency
Werner, S.; Lohmüller, E.; Saint-Cast, P.; Greulich, J.M.; Weber, J.; Schmidt, S.; Moldovan, A.; Brand, A.A.; Dannenberg, T.; Mack, S.; Wasmer, S.; Demant, M.; Linse, M.; Ackermann, R.; Wolf, A.; Preu, R.		Conference Paper
2017Metallization of passivating and carrier selective contacts: Status and perspectives at Fraunhofer ISE
Bivour, M.; Bartsch, J.; Clement, F.; Cimiotti, G.; Erath, D.; Feldmann, F.; Fellmeth, T.; Glatthaar, M.; Hermle, M.; Jahn, M.; Kluska, S.; Keding, R.; Lorenz, A.; Lacmago Lontchi, I.-C.; Mack, S.; Moldovan, A.; Nekarda, J.; Pospischil, M.; Rodofili, A.; Rentsch, J.; Steinhauser, B.; Schube, J.; Wolke, W.; Preu, R.; Glunz, S.W.		Conference Paper
2017A new pilot research facility for HJT and selective contact solar cells - PV-TEC SELECT
Rentsch, J.; Bivour, M.; Erath, D.; Feldmann, F.; Fischer, A.; Mack, S.; Moldovan, A.; Temmler, J.; Hermle, M.; Glunz, S.W.; Preu, R.		Conference Paper
2017Passivierte Siliciummaterialien für Li-Ionenbatteriezellen: Vortrag gehalten auf dem Batterieforum Deutschland 2017, Berlin, Germany, 25.01.2017-27.01.2017
Gentischer, H.; Hulitz, S.; Mader, M.; Singh, R.; Keding, R.; Preu, R.; Biro, D.		Presentation
2017Predicting bulk lifetime values by applying wet chemistry H-termination for inline quality control of silicon wafers
Al-Hajjawi, S.; Haunschild, J.; Zimmer, M.; Dannenberg, T.; Preu, R.		Conference Paper
2017Rear passivated mc-Si solar cells textured by atmospheric pressure dry etching
Saint-Cast, P.; Kafle, B.; Pandey, R.; Ridoy, A.I.; Hofmann, M.; Clochard, L.; Schwarze, T.; Pittroff, M.; Rentsch, J.; Preu, R.		Journal Article
2017The SPEER solar cell - simulation study of shingled bifacial PERC-technology-based stripe cells
Wöhrle, N.; Fellmeth, T.; Lohmüller, E.; Baliozian, P.; Fell, A.; Preu, R.		Conference Paper
2017Technical and economic potential of PV in Lebanon and Jordan aiming for regional readiness level development
Haidar, M.; Baliozian, P.; Mustafa, A.; Mourad, S.; Preu, R.		Conference Paper
2016biPERC silicon solar cells enabling bifacial applications for industrial solar cells with passivated rear sides
Krauss, K.; Fertig, F.; Greulich, J.; Rein, S.; Preu, R.		Journal Article
2016Economic feasibility of bifacial silicon solar cells
Fertig, F.; Nold, S.; Wöhrle, N.; Greulich, J.; Hädrich, I.; Krauß, K.; Mittag, M.; Biro, D.; Rein, S.; Preu, R.		Journal Article
2016The influence of nitrogen on laser doping from phosphorous doped a-SiNx layers
Steinhauser, B.; Jäger, U.; Benick, J.; Chong, E.; Lam, J.; Steeman, R.; Rostan, H.; Nekarda, J.; Hermle, M.; Preu, R.; Glunz, S.W.		Journal Article
2016Photovoltaic Development Standardizing Based on Roadmaps and Technology Readiness Levels
Baliozian, P.; Mourad, S.; Morse, D.; Kim, S.; Friedrich, L.; Preu, R.		Conference Paper
2016Photovoltaische Solarzelle
Krauß, Karin; Fertig, Fabian; Preu, Ralf; Jäger, Ulrich; Werner, Sabrina		Patent
2016Plasma-Free Dry-Chemical Texturing Process for High-Efficiency Multicrystalline Silicon Solar Cells
Kafle, B.; Freund, T.; Mannan, A.; Clochard, L.; Duffy, E.; Werner, S.; Saint-Cast, P.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2016Status of FolMet Technology: How to Produce PERC Cells More Cheaply than Al-BSF Cells
Nekarda, J.; Graf, M.; John, O.; Nold, S.; Nagel, H.; Eberlein, D.; Kraft, A.; Böhme, R.; Streek, A.; Preu, R.		Journal Article
2015Comprehensive comparison of different fine line printing technologies addressing the seed and plate approach with Ni-Cu-plating
Lorenz, A.; Kraft, A.; Gredy, C.; Filipovic, A.; Binder, S.; Krüger, K.; Bartsch, J.; Clement, F.; Biro, D.; Preu, R.; Reinecke, H.		Conference Paper
2015Comprehensive simulation and acceleration of the foil-metallization laser process
Graf, M.; Nekarda, J.; Lazzarotto Togny, F.; Streek, A.; Böhme, R.; Preu, R.		Journal Article
2015Foil metallization process for PERC solar cells towards industrial feasibility
Graf, M.; Eberlein, D.; Nagel, H.; Nekarda, J.; Böhme, R.; Streek, A.; Preu, R.		Conference Paper
2015Impact of texture roughness on the front-side metallization of stencil-printed silicon solar cells
Lorenz, A.; Strauch, T.; Demant, M.; Fellmeth, T.; Barnes Hofmeister, T.; Linse, M.; Dannenberg, T.; Seiffe, J.; Clement, F.; Biro, D.; Reinecke, H.; Preu, R.		Journal Article
2015Nanotextured multicrystalline Al-BSF solar cells reaching 18% conversion efficiency using industrially viable solar cell processes
Bishal, K.; Mannan, A.; Freund, T.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R.		Journal Article
2015Progress on industrial solar cell front side metallization by parallel dispensing technology
Pospischil, M.; Kuchler, M.; Klawitter, M.; Efinger, R.; Rodriguez, C.; Padilla, A.; Gentischer, H.; König, M.; Hörteis, M.; Wende, L.; Mette, A.; Clement, F.; Preu, R.; Biro, D.		Conference Paper
2014Advanced metallization concepts for p-type silicon Metal-Wrap-Through (MWT) solar cells
Hendrichs, M.; Thaidigsmann, B.; Lohmüller, E.; Nold, S.; Clement, F.; Biro, D.; Rech, B.; Preu, R.		Journal Article
2014The BOSCO cell concept: Bifacial operation with double-sided collection
Fertig, F.; Krauß, K.; Greulich, J.; Clement, F.; Biro, D.; Preu, R.; Rein, S.		Conference Paper
2014The BOSCO solar cell - a both sides collecting and contacted structure
Fertig, F.; Krauß, K.; Greulich, J.; Clement, F.; Biro, D.; Preu, R.; Rein, S.		Journal Article
2014The BOSCO Solar Cell: Double-sided Collection and Bifacial Operation
Fertig, F.; Krauß, K.; Greulich, J.; Clement, F.; Biro, D.; Preu, R.; Rein, S.		Journal Article
2014The BOSCO solar cell: Simulation and experiment
Fertig, F.; Greulich, J.; Krauss, K.; Clement, F.; Biro, D.; Preu, R.; Rein, S.		Journal Article
2014Influence of rear-side passivation on solar cell performance of bosco solar cells
Krauß, K.; Fertig, F.; Greulich, J.; Clement, F.; Biro, D.; Preu, R.; Rein, S.		Conference Paper
2014Investigations on the passivation mechanism of AlN:H and AlN:H-SiN:H stacks
Krugel, G.; Jenkner, F.; Moldovan, A.; Wolke, W.; Rentsch, J.; Preu, R.		Journal Article
2014Laserbasiertes Verfahren und Bearbeitungstisch zur lokalen Kontaktierung eines Halbleiterbauelements
Nekarda, Jan; Rodofili, Andreas; Brand, Andreas; Graf, Martin; Preu, Ralf		Patent
2014Laserbasiertes Verfahren und Bearbeitungstisch zur Metallisierung der Rückseite eines Halbleiterbauelements
Hauser, Hubert; Nekarda, Jan; Preu, Ralf; Bläsi, Benedikt		Patent
2014Optimization of multi-layer metallization design for large-area back-contact back-junction solar cells
Hendrichs, M.; Keding, R.; Spribille, A.; Fellmeth, T.; Nold, S.; Clement, F.; Wolf, A.; Biro, D.; Preu, R.		Conference Paper
2014PECVD Al2O3 for Surface Passivation: A Review of Solar Cell and Thin Layer Characteristics Silicon Solar Cell
Kühnhold, S.; Saint-Cast, P.; Hofmann, M.; Paramanathan, R.; El-Safoury, M.; Kafle, B.; Kania, D.; Weiss, L.; Heo, Y.-H.; Billot, E.; Olwal, P.; Rentsch, J.; Preu, R.		Conference Paper
2014Progress in laser-based foil metallization for industrial PERC solar cells
Graf, M.; Nekarda, J.; Eberlein, D.; Woehrle, N.; Preu, R.; Böhme, R.; Grosse, T.		Conference Paper
2014Reduction of Picosecond Laser Ablation Threshold and Damage Via Nanosecond Pre-Pulse for Removal of Dielectric Layers on Silicon Solar Cells
Brand, A.; Meyer, F.; Nekarda, J.-F.; Preu, R.		Journal Article
2014Vorrichtung und Verfahren zum Aufbringen einer Aluminiumoxidschicht auf ein Halbleitersubstrat
Saint-Cast, Pierre; Hofmann, Marc; Rentsch, Jochen; Preu, Ralf		Patent
2013Benefit of selective emitters for p-type silicon solar cells with passivated surfaces
Jäger, U.; Mack, S.; Wufka, C.; Wolf, A.; Biro, D.; Preu, R.		Journal Article
2013Cost-optimized metallization layout for metal wrap through (MWT) solar cells and modules
Hendrichs, M.; Thaidigsmann, B.; Fellmeth, T.; Nold, S.; Spribille, A.; Herrmann, P.; Mittag, M.; Hädrich, I.; Eitner, U.; Clement, F.; Biro, D.; Preu, R.		Conference Paper
2013Effects of high-temperature treatment on the hydrogen distribution in silicon oxynitride/silicon nitride stacks for crystalline silicon surface passivation
Schwab, C.; Hofmann, M.; Heller, R.; Seiffe, J.; Rentsch, J.; Preu, R.		Journal Article
2013Evaluation of cast mono silicon material for thermal oxide passivated solar cells
Schwab, C.; Haunschild, J.; Graf, M.; Wufka, C.; Wolf, A.; Biro, D.; Preu, R.		Journal Article
2013Evaluation of industrially relevant parameters for contact firing of screen printed front side silver contacts
Hönig, R.; Vössing, D.; Clement, F.; Biro, D.; Preu, R.; Wilde, J.		Journal Article
2013Investigation of methods for adhesion characterization of evaporated aluminum layers
Kumm, J.; Eberlein, D.; Hartmann, P.; Wolke, W.; Wolf, A.; Preu, R.		Conference Paper
2013Laser doping from borosilicate glass for metallization of boron emitters
Fernandez-Robledo, S.; Jäger, U.; Lohmüller, E.; Nekarda, J.; Preu, R.		Conference Paper
2013Laser-based foil metallization for industrial PERC solar cells
Nekarda, J.; Graf, M.; Rodofili, A.; Preu, R.; Böhme, R.; Sontag, D.		Conference Paper
2013Minimizing the optical cell-to-module losses for MWT-modules
Haedrich, I.; Wiese, M.; Thaidigsman, B.; Eberlein, D.; Clement, F.; Eitner, U.; Preu, R.; Wirth, H.		Journal Article
2013Multifunctional PECVD layers: Dopant source, passivation, and optics
Seiffe, J.; Pillath, F.; Trogus, D.; Brand, A.; Savio, C.; Hofmann, M.; Rentsch, J.; Preu, R.		Journal Article
2013P-Type MWT solar cells: Current status and future expectations
Thaidigsmann, B.; Hendrichs, M.; Nold, S.; Lohmüller, E.; Wolf, A.; Clement, F.; Biro, D.; Preu, R.		Conference Paper
2013Passivation of solar cell emitters using aluminum nitride
Krugel, G.; Sharma, A.; Moldovan, A.; Wolke, W.; Rentsch, J.; Preu, R.		Conference Paper
2013PECVD Al2O3/a-Si:B as a dopant source and surface passivation
Seiffe, J.; Gahoi, A.; Hofmann, M.; Rentsch, J.; Preu, R.		Journal Article
2013Potential-induced degradation on cell level: The inversion model
Saint-Cast, P.; Nagel, H.; Wagenmann, D.; Schön, J.; Schmitt, P.; Reichel, C.; Glunz, S.W.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2013Recombination and optical properties of wet chemically polished thermal oxide passivated Si surfaces
Schwab, C.; Wolf, A.; Graf, M.; Wöhrle, N.; Greulich, J.; Kühnhold, S.; Kästner, G.; Biro, D.; Preu, R.		Journal Article
2013Study of hydrogenated AlN as an anti-reflective coating and for the effective surface passivation of silicon
Krugel, G.; Sharma, A.; Wolke, W.; Rentsch, J.; Preu, R.		Journal Article
2013Technologies for mass production of > 20% efficient P-Type silicon solar cells
Mack, S.; Wolf, A.; Thaidigsmann, B.; Lohmüller, E.; Jäger, U.; Pospischil, M.; Clement, F.; Eberlein, D.; Preu, R.; Biro, D.		Conference Paper
2013Technology Options for a Multi-Gigawatt Fab in Europe
Preu, R.		Presentation
2013Wet chemical single-side emitter etch back for MWT solar cells with AL-BSF and challenges for via paste selection
Spribille, A.; Lohmüller, E.; Thaidigsmann, B.; Hamid, R.; Nussbaumer, H.; Clement, F.; Preu, R.		Conference Paper
2012Atomistic simulations of the silicon surface structure at the interface of silver thick film contacts on n-type silicon
Kontermann, S.; Ruf, A.; Preu, R.		Conference Paper
2012Cost modeling of silicon solar cell production innovation along the PV value chain
Nold, S.; Voigt, N.; Friedrich, L.; Weber, D.; Hädrich, I.; Mittag, M.; Wirth, H.; Thaidigsmann, B.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2012Crystalline silicon solar cells: State-of-the-art and future developments
Glunz, S.W.; Preu, R.; Biro, D.		Book Article
2012Erratum: "Comprehensive analytical model for locally contacted rear surface passivated solar cells" [J. Appl. Phys. 108, 124510 (2010)]
Wolf, A.; Biro, D.; Nekarda, J.; Kimmerle, A.; Mack, S.; Preu, R.		Journal Article
2012Evaluation of via pastes for p- and n-type metal wrap through (MWT) solar cells
Lohmüller, E.; Thaidigsmann, B.; Werner, S.; Clement, F.; Wolf, A.; Biro, D.; Preu, R.		Conference Paper
2012High-temperature stability of c-Si surface passivation by thick PECVD Al2O3 with and without hydrogenated capping layers
Saint-Cast, P.; Kania, D.; Heller, R.; Kuehnhold, S.; Hofmann, M.; Rentsch, J.; Preu, R.		Journal Article
2012HIP-MWT solar cells - pilot-line cell processing and module integration
Drews, A.; Clement, F.; Spribille, A.; Thaidigsmann, B.; Linse, M.; Gutscher, S.; Werner, S.; Reitenbach, V.; Ould Chighali, E.; Wolf, A.; Zimmer, M.; Nekarda, J.; Haedrich, I.; Tranitz, M.; Eitner, U.; Wirth, H.; Wilson, H.R.; Biro, D.; Preu, R.		Conference Paper
2012Impact of thermal treatment on PECVD Al2O3 passivation layers
Kühnhold, S.; Kafle, B.; Kroely, L.; Saint-Cast, P.; Hofmann, M.; Rentsch, J.; Preu, R.		Journal Article
2012Inline microwave-excited plasma deposition of thin amorphous silicon layers
Jeurink, J.; Morzè, N. von; Kroely, L.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2012Laser based foil rear side metallization for crystalline silicon solar cells
Nekarda, J.; Graf, M.; Rodofili, A.; Wolf, A.; Preu, R.		Conference Paper
2012Laser doping for high efficiency silicon solar cells
Jäger, U.; Wolf, A.; Steinhauser, B.; Benick, J.; Nekarda, J.; Preu, R.		Conference Paper
2012Loss analysis and efficiency potential of p-type MWT-PERC solar cells
Thaidigsmann, Benjamin; Greulich, Johannes; Lohmüller, Elmar; Schmeißer, Simon; Clement, Florian; Wolf, Andreas; Biro, Daniel; Preu, Ralf		Journal Article
2012Multifunctional PECVD layers - cost analysis of the X-pert approach
Seiffe, J.; Nold, S.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2012MWT solar cell processing by use of isishape® solar etch® SiD for rear contact and edge isolation
Spribille, A.; Greulich, J.; Lohmüller, E.; Clement, F.; Specht, J.; Biro, D.; Preu, R.; Doll, O.; Tüshaus, C.; Stockum, W.; Köhler, I.		Conference Paper
2012Nanosecond laser annealing to decrease the damage of picosecond laser ablation of anti-reflection layers on textured silicon surfaces
Brand, A.; Knorz, A.; Zeidler, R.; Nekarda, J.-F.; Preu, R.		Conference Paper
2012Passivation of inline wet chemically polished surfaces for industrial PERC devices
Schwab, C.; Wolf, A.; Graf, M.; Nekarda, J.; Kästner, G.; Zimmer, M.; Kühnhold, S.; Hofmann, M.; Biro, D.; Preu, R.		Journal Article
2012The path to industrial production of highly efficient metal wrap through silicon solar cells
Thaidigsmann, Benjamin; Linse, Michael; Wolf, Andreas; Clement, Florian; Biro, Daniel; Preu, Ralf		Journal Article
2012Performance requirements of crack detection systems in silicon solar cell production
Aßmus, M.; Nold, S.; Rein, S.; Hofmann, M.; Rentsch, J.; Preu, R.		Journal Article
2012Process characterisation of MWT solar cells - a new method to analyse via contacts
Reitenbach, V.; Spitz, M.; Drews, A.; Weiß, M.; Ould Chighali, E.; Thaidigsmann, B.; Lohmüller, E.; Knorz, A.; Clement, F.; Wolf, A.; Biro, D.; Preu, R.		Conference Paper
2012Recombination on locally processed wafer surfaces
Saint-Cast, P.; Nekarda, J.; Hofmann, M.; Kuehnhold, S.; Preu, R.		Journal Article
2012A review and comparison of one-and two-dimensional simulations of solar cells featuring selective emitters
Greulich, J.; Jäger, U.; Rein, S.; Preu, R.		Journal Article
2012A review of PECVD aluminum oxide for surface passivation
Saint-Cast, P.; Hofmann, M.; Kühnhold, S.; Kania, D.; Weiss, L.; Heo, Y.-H.; Billot, E.; Olwal, P.; Trogus, D.; Rentsch, J.; Preu, R.		Conference Paper
2012Selective emitters in passivated emitter and rear silicon solar cells enabling 20% on large area P-type silicon
Jäger, U.; Mack, S.; Wufka, C.; Wolf, A.; Biro, D.; Nekarda, J.; Preu, R.		Conference Paper
2012Simulating the interface morphology of silver thick film contacts on n-type Si-(100) and Si-(111)
Kontermann, S.; Ruf, A.; Preu, R.; Willeke, G.		Journal Article
2012Sputtered aluminum oxide for rear side passivation of p-type silicon solar cells
Krugl, G.; Wolke, W.; Wagner, F.; Rentsch, J.; Preu, R.		Conference Paper
2012Synergistic effects of rear-surface passivation and the metal wrap through concept
Thaidigsmann, B.; Drews, A.; Fellmeth, T.; Saint-Cast, P.; Wolf, A.; Clement, F.; Biro, D.; Preu, R.		Journal Article
2012Very low surface recombination velocity of boron doped emitter passivated with plasma-enhanced chemical-vapor-deposited AlOx layers
Saint-Cast, P.; Richter, A.; Billot, E.; Hofmann, M.; Benick, J.; Rentsch, J.; Preu, R.; Glunz, S.W.		Journal Article
201120% efficient passivated large-area metal wrap through solar cells on boron-doped Cz silicon
Lohmüller, E.; Thaidigsmann, B.; Pospischil, M.; Jäger, U.; Mack, S.; Specht, J.; Nekarda, J.; Retzlaff, M.; Krieg, A.; Clement, F.; Wolf, A.; Biro, D.; Preu, R.		Journal Article
201120.1% efficient silicon solar cell with aluminum back surface field
Fellmeth, T.; Mack, S.; Bartsch, J.; Erath, D.; Jäger, U.; Preu, R.; Clement, F.; Biro, D.		Journal Article
2011Beam Shaping for High Throughput Laser Doped Selective Emitter Solar Cells
Jäger, U.; Fertig, F.; Oesterlin, P.; Büchel, A.; Ullmann, R.; Zühlke, H.-U.; Preu, R.		Conference Paper
2011Calculating the specific contact resistance from the nanostructure at the interface of silver thick film contacts on n-type silicon
Kontermann, S.; Preu, R.; Willeke, G.		Journal Article
2011Charge carrier trapping at passivated silicon surfaces
Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.		Journal Article
2011Detection and analysis of micro-cracks in multi-crystalline silicon wafers during solar cell production
Demant, M.; Rein, S.; Krisch, J.; Schoenfelder, S.; Fischer, C.; Bartsch, S.; Preu, R.		Conference Paper
2011HIP-MWT - A New Cell Concept for Industrial Processing of High-Performance Metal Wrap Through Silicon Solar Cells
Thaidigsmann, B.; Spribille, A.; Plagwitz, H.; Schubert, G.; Fertig, F.; Clement, F.; Wolf, A.; Biro, D.; Preu, R.		Conference Paper
2011HIP-MWT: A simplified structure for metal wrap through solar cells with passivated rear surface
Thaidigsmann, B.; Clement, F.; Wolf, A.; Lohmüller, E.; Fertig, F.; Biro, D.; Preu, R.		Conference Paper
2011Impact of hydrogen concentration on the regeneration of light induced degradation
Krugel, G.; Wolke, W.; Geilker, J.; Rein, S.; Preu, R.		Conference Paper
2011Increased Ion Energies for Texturing in a High-Throughput Plasma Tool
Piechulla, P.; Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2011Industrially feasible all side passivated silicon based C-MWT concentrator solar cells
Fellmeth, T.; Drews, A.; Thaidigsmann, B.; Mack, S.; Wolf, A.; Clement, F.; Biro, D.; Preu, R.		Conference Paper
2011Influence of slow surface states on effective lifetime measurements
Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2011Interface Characterization of Dry-Etched Emitters
Clement, C.; Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.; Naumann, V.; Werner, M.		Conference Paper
2011Investigations on the Impact of Wafer Grippers on Optical and Electrical Properties of Alkaline Textured and A-Si Passivated Surfaces
Nold, S.; Aßmus, M.; Weil, A.; Haunschild, J.; Savio, C.; Hofmann, M.; Rentsch, J.; Preu, R.; Kunz, M.		Conference Paper
2011Large-area p-type HIP-MWT silicon solar cells with screen printed contacts exceeding 20% efficiency
Thaidigsmann, B.; Lohmüller, E.; Jäger, U.; Mack, S.; Lottspeich, F.; Spribille, A.; Birmann, K.; Erath, D.; Wolf, A.; Clement, F.; Biro, D.; Preu, R.		Journal Article
2011A laser based process for the formation of a local back surface field for n-type silicon solar cells
Jäger, U.; Suwito, D.; Benick, J.; Janz, S.; Preu, R.		Journal Article
2011Metal pinning through rear passivation layers: Characterization and effects on solar cells
Saint-Cast, P.; Haunschild, J.; Schwab, C.; Billot, E.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2011MWT meets PERC: Towards 20% efficient industrial silicon solar cells
Biro, D.; Thaidigsmann, B.; Clement, F.; Wolf, A.; Lohmüller, E.; Mack, S.; Fellmeth, T.; Drews, A.; Spribille, A.; Wotke, E.A.; Lottspeich, F.; Hofmann, M.; Jäger, U.; Preu, R.		Conference Paper
2011A Novel Approach for Mask-Free Selective Emitter Technology Combining Laser Doping and Wet Chemical Etch Back
Volk, A.; Jäger, U.; Rentsch, J.; Preu, R.		Conference Paper
2011Paths to Achieve Efficiencies over 20% with MWT Silicon Solar Cells
Clement, F.; Thaidigsmann, B.; Lohmüller, E.; Specht, J.; Jäger, U.; Mack, S.; Pospischil, M.; Spribille, A.; Erath, D.; Nekarda, J.; Hofmann, M.; Wolf, A.; Biro, D.; Preu, R.		Conference Paper
2011Plasma Deposition of a Amorphous Silicon Dopant Sources
Jeurink, J.; Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2011Processing of Highly-Efficient MWT Silicon Solar Cells
Clement, F.; Thaidigsmann, B.; Hoenig, R.; Fellmeth, T.; Spribille, A.; Lohmüller, E.; Krieg, A.; Glatthaar, M.; Wirth, H.; Biro, D.; Preu, R.; Menkoe, M.; Meyer, K.; Lahmer, D.; Krokoszinski, H.-J.; Neidert, M.; Henning, A.; Mohr, C.; Zhang, W.		Journal Article
2011Properties of purified direct steam grown silicon thermal oxides
Mack, S.; Wolf, A.; Walczak, A.; Thaidigsmann, B.; Wotke, E.A.; Spiegelman, J.J.; Preu, R.; Biro, D.		Journal Article
2011Quantitative comparison of simulated and experimental silver crystal formation at the interface of silver thick film contacts on n-type silicon
Kontermann, S.; Ruf, A.; Preu, R.		Conference Paper
2011Quantum efficiency analysis of highly doped areas for selective emitter solar cells
Jäger, U.; Thaidigsmann, B.; Okanovic, M.; Preu, R.		Conference Paper
2011Recombination at metal-emitter interfaces of front contact technologies for highly efficient silicon solar cells
Fellmeth, T.; Born, A.; Kimmerle, A.; Clement, F.; Biro, D.; Preu, R.		Conference Paper
2011Screen Printing Aluminium Pastes for Thin Silicon Solar Cells with Passivated Rear Surface and LFC Contacts
Schwab, C.; Thaidigsmann, B.; Nold, S.; Linse, M.; Lottspeich, F.; Prince, A.; Young, R.; Fuge, G.; Weigand, P.; Wolf, A.; Clement, F.; Biro, D.; Preu, R.		Conference Paper
2011Surface passivation of crystalline silicon by plasma-enhanced chemical vapor deposition double layers of silicon-rich silicon oxynitride and silicon nitride
Seiffe, J.; Gautero, L.; Hofmann, M.; Rentsch, J.; Preu, R.; Weber, S.; Eichel, R.A.		Journal Article
2011Surface Passivation of Highly and Lowly Doped P-Type Silicon Surfaces with PECVD Al2O3 for Industrially Applicable Solar Cell Concepts
Saint-Cast, P.; Billot, E.; Olwal, P.; Kühnhold, S.; Richter, A.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2011Variation of the layer thickness to study the electrical property of PECVD Al2O3 / C-Si interface
Saint-Cast, P.; Heo, Y.-H.; Billot, E.; Olwal, P.; Hofmann, M.; Rentsch, J.; Glunz, S.W.; Preu, R.		Conference Paper
201019.5% efficient screen printed crystalline silicon metal wrap through (MWT) solar cells for concentrator (2-25x) applications
Fellmeth, T.; Fritz, S.; Menkoe, M.; Clement, F.; Biro, D.; Preu, R.		Conference Paper
201021.1% efficient PERC silicon solar cells on large scale by using inline sputtering for metallization
Reinwand, D.; Specht, J.; Stüwe, D.; Seitz, S.; Nekarda, J.-F.; Biro, D.; Preu, R.; Trassl, R.		Conference Paper
2010Accurate IV-measurement for back contact solar cells
Glatthaar, M.; Hohl-Ebinger, J.; Krieg, A.; Greif, M.; Greco, L.; Clement, F.; Rein, S.; Warta, W.; Preu, R.		Conference Paper
2010Advanced analytical model for the effective recombination velocity of locally contacted surfaces
Saint-Cast, P.; Rüdiger, M.; Wolf, A.; Hofmann, M.; Rentsch, J.; Preu, R.		Journal Article
2010Advanced screen printing technique for high definition front side metallization of crystalline silicon solar cells
Erath, D.; Filipovi, A.; Retzlaff, M.; Goetz, A.K.; Clement, F.; Biro, D.; Preu, R.		Journal Article
2010Beam shaping - the key to high throughput selective emitter laser processing with a single laser system
Jäger, U.; Oesterlin, P.; Kimmerle, A.; Preu, R.		Conference Paper
2010Challenges and advances in back-side metallization
Preu, R.; Wolf, A.; Hofmann, M.; Clement, F.; Nekarda, J.; Rentsch, J.; Biro, D.		Journal Article
2010Characterisation of local Al-BSF formation for PERC solar cell structures
Grasso, F.S.; Gautero, L.; Rentsch, J.; Preu, R.; Lanzafame, R.		Conference Paper
2010Characterization and optimization of laser edge isolation
Gutscher, S.; Knorz, A.; Gundel, P.; Greulich, J.; Preu, R.		Conference Paper
2010Characterization of aluminium screen-printed local contacts
Grasso, F.S.; Gautero, L.; Rentsch, J.; Preu, R.; Lanzafame, R.		Conference Paper
2010Combining the advantages of wrap through metallization and rear surface passivation into industrial MWT-PERC devices
Thaidigsmann, B.; Wolf, A.; Clement, F.; Biro, D.; Preu, R.		Conference Paper
2010Comparison of different rear contacting approaches for industrial PERC solar cells on MC-SI wafer
Gautero, L.; Kania, D.; Seiffe, J.; Knorz, A.; Specht, J.; Nekarda, J.; Hofmann, M.; Rentsch, J.; Sallese, J.-M.; Preu, R.		Conference Paper
2010Comparison of three different metallization concepts for LFC cells
Nekarda, J.-F.; Hörteis, M.; Lottspeich, F.; Wolf, A.; Preu, R.		Conference Paper
2010Comprehensive analytical model for locally contacted rear surface passivated solar cells
Wolf, A.; Biro, D.; Nekarda, J.; Stumpp, S.; Kimmerle, A.; Mack, S.; Preu, R.		Journal Article
2010Development and modelling of crystalline silicon based metal wrap through (MWT) solar cells
Fellmeth, T.; Meyer, K.; Greulich, J.; Clement, F.; Biro, D.; Preu, R.; Menkoe, M.; Lahmer, D.; Krokoszinski, H.-J.		Conference Paper
2010Dispensing of etching paste and inkjetting of diffusion barrier for MWT solar cell processing
Spribille, A.; Clement, F.; Erath, D.; Specht, J.; Biro, D.; Preu, R.; Köhler, I.; Doll, O.; Stockum, W.; Tueshaus, C.		Conference Paper
2010Dry plasma processing for industrial crystalline silicon solar cell production
Hofmann, M.; Rentsch, J.; Preu, R.		Journal Article
2010Evaluating luminescence based voltage images of silicon solar cells
Glatthaar, M.; Haunschild, J.; Zeidler, R.; Demant, M.; Greulich, J.; Michl, B.; Warta, W.; Rein, S.; Preu, R.		Journal Article
2010Fast and precise resistance characterisation of laser drilled and metallized vias
Menkoe, M.; Reitenbach, H.; Hoenig, R.; Clement, F.; Biro, D.; Preu, R.		Conference Paper
2010Firing stable passivation layers for the front and rear side of high efficiency N-type back-contact back-junction solar cells
Woehl, R.; Mack, S.; Kohn, N.; Preu, R.; Biro, D.		Conference Paper
2010Front surface passivation for industrial-type solar cells by silicon oxynitride - silicon nitride stacks
Schwab, C.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2010Fundamental reactions during the formation of fired silver contacts and solar cell results
Hörteis, M.; Benick, J.; Nekarda, J.; Richter, A.; Preu, R.; Glunz, S.W.		Conference Paper
2010Fundamental studies on the front contact formation resulting in a 21% efficiency silicon solar cell with printed rear and front contacts
Hörteis, M.; Benick, J.; Nekarda, J.; Richter, A.; Preu, R.; Glunz, S.W.		Conference Paper
2010High efficiency p-type PERC solar cells applying PECVD ALOx layers
Saint-Cast, P.; Benick, J.; Kania, D.; Billot, E.; Richter, A.; Hermle, M.; Hofmann, M.; Rentsch, J.; Preu, R.; Glunz, S.W.		Conference Paper
2010High speed laser drilling: Parameter evaluation and characterisation
Knorz, A.; Gutscher, S.; Fell, A.; Gundel, P.; Preu, R.		Conference Paper
2010High temperature stability of PECVD aluminium oxide layers applied as negatively charged passivation on c-Si surfaces
Kania, D.; Saint-Cast, P.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2010High throughput via-metallization technique for multi-crystalline metal wrap through (MWT) silicon solar cells exceeding 16% efficiency
Clement, F.; Menkö, M.; Kubera, T.; Erath, D.; Hoenig, R.; Kwapil, W.; Wolke, W.; Preu, R.		Journal Article
2010High-efficiency c-Si solar cells passivated with ALD and PECVD aluminum oxide
Saint-Cast, P.; Benick, J.; Kania, D.; Weiss, L.; Hofmann, M.; Rentsch, J.; Preu, R.; Glunz, S.W.		Journal Article
2010Highly efficient industrially feasible metal wrap through (MWT) silicon solar cells
Fellmeth, T.; Menkoe, M.; Clement, F.; Biro, D.; Preu, R.		Journal Article
2010Improved emitters by dry etching
Seiffe, J.; Khandelwal, R.; Clement, C.; Jäger, U.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2010Industrial deposition of PECVD AIOx for rear passivation of PERC-type mc-SI solar cells
Rentsch, J.; Sperlich, H.-P.; Kohn, N.; Kania, D.; Saint-Cast, P.; Schetter, C.; Hofmann, M.; Preu, R.		Conference Paper
2010Industrial inline PVD metallization for silicon solar cells with laser fired contacts leading to 21.8% efficiency
Nekarda, J.; Reinwand, D.; Hartmann, P.; Preu, R.		Conference Paper
2010Industrially feasible rear side concept for n-type silicon solar cells approaching 700 mV of Voc
Suwito, D.; Jäger, U.; Benick, J.; Janz, S.; Hermle, M.; Preu, R.; Glunz, S.W.		Conference Paper
2010Influence of doping profile of highly doped regions for selective emitter solar cells
Jäger, U.; Mack, S.; Kimmerle, A.; Wolf, A.; Preu, R.		Conference Paper
2010Inkjet structured EWT silicon solar cells with evaporated aluminum metallization and laser-fired contacts
Fallisch, A.; Stüwe, D.; Neubauer, R.; Wagenmann, D.; Keding, R.; Nekarda, J.; Preu, R.; Biro, D.		Conference Paper
2010Investigation of the minority carrier lifetime reduction during industrial DC-sputtering of metal seed layers
Reinwand, D.; Graf, M.; Hartmann, P.; Preu, R.; Trassl, R.		Conference Paper
2010n-Type silicon - enabling efficiencies > 20% in industrial production
Glunz, S.W.; Benick, J.; Biro, D.; Bivour, M.; Hermle, M.; Pysch, D.; Rauer, M.; Reichel, C.; Richter, A.; Rüdiger, M.; Schmiga, C.; Suwito, D.; Wolf, A.; Preu, R.		Conference Paper
2010Novel MWT cell design on monocrystalline silicon wafers
Meyer, K.; Krokoszinski, H.-J.; Lahmer, D.; Wütherich, T.; Dupke, M.; Jesswein, R.; Lossen, J.; Zerrer, P.; Prießner, A.; Clement, F.; Biro, D.; Preu, R.		Conference Paper
2010P-type Cz-Si PERC-type solar cells applying PECVD aluminium oxide rear surface passivation
Saint-Cast, P.; Kania, D.; Billot, E.; Weiss, L.; Hofmann, M.; Gautero, L.; Kohn, N.; Biro, D.; Rentsch, J.; Preu, R.		Conference Paper
2010Paste development for screen printed mc-Si MWT solar cells exceeding 17% efficiency
Hoenig, R.; Clement, F.; Menkoe, M.; Retzlaff, M.; Biro, D.; Preu, R.; Neidert, M.; Henning, A.; Mohr, C.; Zhang, W.		Conference Paper
2010Photovoltaische Solarzelle und Verfahren zur Herstellung einer photovoltaischen Solarzelle
Thaidigsmann, B.; Clement, F.; Biro, D.; Wolf, A.; Preu, R.		Patent
2010Pilot line processing of 18.6% efficient rear surface passivated large area solar cells
Wolf, A.; Wotke, E.A.; Walczak, A.; Mack, S.; Bitnar, B.; Koch, C.; Preu, R.; Biro, D.		Conference Paper
2010Pilot processing of 18.6% efficient rear surface passivated silicon solar cells with screen printed front contacts
Wolf, A.; Wotke, E.A.; Mack, S.; Nekarda, J.-F.; Biro, D.; Preu, R.; Schlegel, K.; Weber, T.; Lossen, J.; Böscke, T.; Grohe, A.; Engelhart, P.; Müller, J.W.; Schubert, G.; Plagwitz, H.; Gassenbauer, Y.		Conference Paper
2010Pilot-line processing of highly-efficient MWT silicon solar cells
Clement, F.; Thaidigsmann, B.; Hoenig, R.; Fellmeth, T.; Spribille, A.; Lohmüller, E.; Krieg, A.; Glatthaar, M.; Wirth, H.; Biro, D.; Preu, R.; Menkoe, M.; Meyer, K.; Lahmer, D.; Krokoszinski, H.-J.; Neidert, M.; Henning, A.; Mohr, C.; Zhang, W.		Conference Paper
2010Plasma single-sided etching for rear emitter etch-back and flattening of industrial crystalline silicon solar cells
Khandelwal, R.; Hofmann, M.; Trogus, D.; Gautero, L.; Seiffe, J.; Rentsch, J.; Preu, R.		Conference Paper
2010Purified steam for industrial thermal oxidation processes
Mack, S.; Biro, D.; Wolf, A.; Thaidigsmann, B.; Walczak, A.; Spiegelman, J.J.; Preu, R.		Conference Paper
2010Silicon solar cells using aluminum foil as rear side metallization reaching 21.0 % efficiency
Nekarda, J.-F.; Lottspeich, F.; Wolf, A.; Preu, R.		Conference Paper
2010A simple laser based process for the formation of a LBSF for n-type silicon solar cells
Jäger, U.; Suwito, D.; Benick, J.; Janz, S.; Hermle, M.; Glunz, S.W.; Preu, R.		Conference Paper
2010Simultaneous front emitter and rear surface passivation by thermal oxidation - an industrially feasible approach to a 19% efficient PERC device
Mack, S.; Jäger, U.; Wolf, A.; Nold, S.; Preu, R.; Biro, D.		Conference Paper
2010Single side polish etching for the rear side of crystalline silicon wafers
Kästner, G.; Zimmer, M.; Birmann, K.; Souren, F.M.M.; Rentsch, J.; Preu, R.		Conference Paper
2010SiNTO EWT silicon solar cells
Fallisch, A.; Keding, R.; Kästner, G.; Bartsch, J.; Werner, S.; Stüwe, D.; Specht, J.; Preu, R.; Biro, D.		Conference Paper
2010Structuring technology and simulation of high efficiency back-contact back-junction silicon solar cells under low concentration
Woehl, R.; Rüdiger, M.; Erath, D.; Stüwe, D.; Preu, R.; Biro, D.		Conference Paper
2010Towards 19% efficient industrial PERC devices using simultaneous front emitter and rear surface passivation by thermal oxidation
Mack, S.; Jäger, U.; Kästner, G.; Wotke, E.A.; Belledin, U.; Wolf, A.; Preu, R.; Biro, D.		Conference Paper
2010Verfahren zur Erzeugung einer selektiven Dotierstruktur in einem Halbleitersubstrat zur Herstellung einer photovoltaischen Solarzelle
Jäger, U.; Biro, D.; Volk, A.-K.; Seiffe, J.; Mack, S.; Wolf, A.; Preu, R.		Patent
2010Verfahren zur Herstellung einer Metallstruktur auf einer Oberfläche eines Halbleitersubstrates
Reinwand, D.; Biro, D.; Specht, J.; Preu, R.; Stüwe, D.		Patent
2010Verfahren zur Herstellung einer photovoltaischen Solarzelle
Mack, S.; Jäger, U.; Wolf, A.; Biro, D.; Preu, R.; Kästner, G.		Patent
2009Advances in electroless nickel plating for the metallization of silicon solar cells using different structuring techniques for the ARC
Aleman, M.; Bay, N.; Barucha, D.; Knorz, A.; Biro, D.; Preu, R.; Glunz, S.W.		Conference Paper
2009All-screen-printed 120-µm-thin large-area silicon solar cells applying dielectric rear passivation and laser-fired contacts reaching 18% efficiency
Gautero, L.; Hoffmann, M.; Rentsch, J.; Bitnar, B.; Sallese, J.-M.; Preu, R.		Conference Paper
2009All-screen-printed 120-µM-thin large-area silicon solar cells applying dielectric rear passivation and laser-fired contacts reaching 18% efficiency
Gautero, L.; Hofmann, M.; Rentsch, J.; Lemke, A.; Mack, S.; Seiffe, J.; Nekarda, J.; Biro, D.; Wolf, A.; Bitnar, B.; Sallese, J.M.; Preu, R.		Conference Paper
2009Control and optimization of thermal oxidation processes for industrial solar cell fabrication
Mack, S.; Lemke, A.; Wolf, A.; Holzinger, B.; Zimmer, M.; Biro, D.; Preu, R.		Conference Paper
2009Development of crystalline silicon based metal wrap through (MWT) solar cells for low concentrator (2-30x) applications
Fellmeth, T.; Fritz, S.; Menkö, M.; Mingirulli, N.; Glatthaar, M.; Clement, F.; Biro, D.; Preu, R.		Conference Paper
2009Development of via pastes for high efficiency MWT cells with a low shunting behaviour
Neidert, M.; Clement, F.; Menkö, M.; Hoenig, R.; Henning, A.; Zhang, W.; Biro, D.; Preu, R.		Conference Paper
2009Firing stable passivation with a-Si/SiNx stack layers for crystalline silicon solar cells
Saint-Cast, P.; Hofmann, M.; Dimitrova, T.; Wagenmann, D.; Rentsch, J.; Preu, R.		Conference Paper
2009Front-side metallization of silicon solar cells by nickel plating and light induced silver plating
Aleman, M.; Bay, N.; Barucha, D.; Glunz, S.W.; Preu, R.		Journal Article
2009Impact of solar cell manufacturing processes on thermal oxide-passivated silicon surfaces
Mack, S.; Wolf, A.; Wotke, E.A.; Lemke, A.; Holzinger, B.; Dimitrova, T.; Biro, D.; Preu, R.		Conference Paper
2009Industrial negatively charged c-Si surface passivation by inline PECVD AlOx
Kania, D.; Saint-Cast, P.; Wagenmann, D.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2009Industrial PVD metallization for high efficiency crystalline silicon solar cells
Nekarda, J.; Reinwand, D.; Grohe, A.; Hartmann, P.; Preu, R.; Trassl, R.; Wieder, S.		Conference Paper
2009Industrial sputtering metallization technology for crystalline silicon solar cells
Reinwand, D.; Nekarda, J.; Grohe, A.; Hartmann, P.; Trassl, R.; Preu, R.		Conference Paper
2009Industrially feasible mc-Si solar cells with fine line printed front contacts on high emitter sheet resistance towards 17% efficiency
Clement, F.; Menkö, M.; Erath, D.; Retzlaff, M.; Goetz, A.K.; Hörteis, M.; Bartsch, J.; Hoenig, R.; Belledin, U.; Biro, D.; Preu, R.		Conference Paper
2009Industrially feasible multi-crystalline metal wrap through (MWT) silicon solar cells exceeding 16% efficiency
Clement, F.; Menkoe, M.; Kubera, T.; Harmel, C.; Hoenig, R.; Wolke, W.; Wirth, H.; Biro, D.; Preu, R.		Journal Article
2009Influence of different laser parameters in laser doping from phosphosilicate glass
Okanovic, M.; Jäger, U.; Ahrens, M.; Stute, U.; Grohe, A.; Preu, R.		Conference Paper
2009Laser ablation of antireflection coatings for plated contacts yielding solar cell efficiencies above 20 %
Knorz, A.; Aleman, M.; Grohe, A.; Preu, R.; Glunz, S.W.		Conference Paper
2009Laser ablation of etch resists for structuring and lift-off processes
Knorz, A.; Grohe, A.; Preu, R.		Conference Paper
2009LFC on screen printed aluminium rear side metallization
Nekarda, J.; Stumpp, S.; Gautero, L.; Hörteis, M.; Grohe, A.; Biro, D.; Preu, R.		Conference Paper
2009Microscopic homogeneity of emitters formed on textured silicon using in-line diffusion and phosphoric acid as the dopant source
Voyer, C.; Buettner, T.; Bock, R.; Biro, D.; Preu, R.		Conference Paper
2009Novel laser technologies for crystalline silicon solar cell production
Grohe, A.; Knorz, A.; Nekarda, J.; Jaeger, U.; Mingirulli, N.; Preu, R.		Conference Paper
2009Optimizing annealing steps for crystalline silicon solar cells with screen printed front side metallization and an oxide-passivated rear surface with local contacts
Kontermann, S.; Wolf, A.; Reinwand, D.; Grohe, A.; Biro, D.; Preu, R.		Journal Article
2009Overview on crystalline silicon solar cells using PECVD rear passivation and laser-fired contacts
Hofmann, M.; Saint-Cast, P.; Suwito, D.; Seiffe, J.; Schmidt, C.; Kambor, S.; Gautero, L.; Kohn, N.; Nekarda, J.-F.; Leimenstoll, A.; Wagenmann, D.; Erath, D.; Catoir, J.; Wolke, W.; Janz, S.; Biro, D.; Grohe, A.; Rentsch, J.; Glunz, S.W.; Preu, R.		Conference Paper
2009Physical understanding of the behavior of silver thick-film contacts on n-type silicon under annealing conditions
Kontermann, S.; Hörteis, M.; Kasemann, M.; Grohe, A.; Preu, R.; Pink, E.; Trupke, T.		Journal Article
2009Pilot-line processing of Cz-Si MWT solar cells with an efficiency gain of 0,3%
Lahmer, D.; Lossen, J.; Meyer, K.; Krokoszinski, H.-J.; Clement, F.; Menkö, M.; Hoenig, R.; Biro, D.; Preu, R.		Conference Paper
2009Pilot-line processing of screen-printed Cz-Si MWT solar cells exceeding 17% efficiency
Clement, F.; Menkö, M.; Hoenig, R.; Haunschild, J.; Biro, D.; Preu, R.; Lahmer, D.; Lossen, J.; Krokoszinski, H.-J.		Conference Paper
2009PV-TEC: Retrospection to the three years of operation of a production oriented research platform
Biro, D.; Belledin, U.; Weil, A.; Zimmer, M.; Grohe, A.; Rein, S.; Rentsch, J.; Preu, R.		Conference Paper
2009Recent developments in rear-surface passivation at Fraunhofer ISE
Hofmann, M.; Janz, S.; Schmidt, C.; Kambor, S.; Suwito, D.; Kohn, N.; Rentsch, J.; Preu, R.; Glunz, S.W.		Conference Paper
2009Relevant pinhole characterisation methods for dielectric layers for silicon solar cells
Saint-Cast, P.; Tanay, F.; Aleman, M.; Reichel, C.; Bartsch, J.; Hofmann, M.; Rentsch, J.; Preu, R.		Conference Paper
2009A review on 5 years cell development within the european integrated project crystal clear
John, J.; Beaucarne, G.; Choulat, P.; Ma, Y.; Russell, R.; Romijn, I.; Lamers, M.; Mewe, A.; Weeber, A.; Hofmann, M.; Preu, R.; Gautero, J.; Slaoui, A.; Quang, A.Q. le; Nichiporuk, O.; Canizo, C. del; Pan, A.; Solheim, H.; Evju, J.; Nagel, H.; Bitnar, B.; Heemeier, M.; Weber, T.; Kaes, M.; Raabe, B.; Haverkamp, H.; Struempel, C.; Hahn, G.		Conference Paper
2009Selective emitter by laser doping from phosphosilicate glass
Jäger, U.; Okanovic, M.; Hörteis, M.; Grohe, A.; Preu, R.		Conference Paper
2009Selective laser ablation of SiNx layers on textured surfaces for low temperature front side metallizations
Knorz, A.; Peters, M.; Grohe, A.; Harmel, C.; Preu, R.		Journal Article
2009The SINTO process: Utilizing a SINx anti-reflection layer for emitter masking during thermal oxidation
Wolf, A.; Walczak, A.; Mack, S.; Wotke, E.A.; Lemke, A.; Bertram, C.; Belledin, U.; Biro, D.; Preu, R.		Conference Paper
2009Solarzelle und Verfahren zur Herstellung einer Solarzelle aus einem Siliziumsubstrat
Biro, D.; Schultz-Wittmann, O.; Lemke, A.; Rentsch, J.; Clement, F.; Hofmann, M.; Wolf, A.; Gautero, L.; Mack, S.; Preu, R.		Patent
2009Spatially resolved contact-resistance measurements on crystalline silicon solar cells
Kontermann, S.; Hörteis, M.; Ruf, A.; Feo, S.; Preu, R.		Journal Article
2009Spectroscopical analysis of wet chemical processes
Zimmer, M.; Oltersdorf, A.; Rentsch, J.; Preu, R.		Journal Article
2009Thermal oxidation as a key technology for high efficiency screen printed industrial silicon solar cells
Biro, D.; Mack, S.; Wolf, A.; Lemke, A.; Belledin, U.; Erath, D.; Holzinger, B.; Wotke, E.A.; Hofmann, M.; Gautero, L.; Nold, S.; Rentsch, J.; Preu, R.		Conference Paper
2009Thermal stability of PECVD a-Si:H single and PECVD a-Si:H + PECVD a-SiOx:H double layers for silicon solar cell rear side passivation
Hofmann, M.; Schmidt, C.; Raabe, B.; Rentsch, J.; Preu, R.		Conference Paper
2009Thermally activated p- and n-doped passivation layers
Seiffe, J.; Suwito, D.; Korte, L.; Hofmann, M.; Janz, S.; Rentsch, J.; Preu, R.		Conference Paper
2009Towards a-Si:H rear passivated industrial-type silicon solar cells
Hofmann, M.; Saint-Cast, P.; Bareis, D.; Wagenmann, D.; Rentsch, J.; Preu, R.		Conference Paper
2009Verfahren zur Herstellung einer EWT-Solarzelle
Mingirulli, N.; Biro, D.; Preu, R.		Patent
2009Very low surface recombination velocity on p-type c-Si by high-rate plasma-deposited aluminum oxide
Saint-Cast, P.; Kania, D.; Hofmann, M.; Benick, J.; Rentsch, J.; Preu, R.		Journal Article
2009Wet chemical processing for c-Si solar cells - status and perspectives
Rentsch, J.; Ackermann, R.; Birmann, K.; Furtwängler, H.; Haunschild, J.; Kästner, G.; Neubauer, R.; Nievendick, J.; Oltersdorf, A.; Rein, S.; Schütte, A.; Zimmer, M.; Preu, R.		Conference Paper
2008Analysis of hydrogen passivation by sputtered silicon nitride
Catoir, J.; Wolke, W.; Griesshammer, M.; Preu, R.; Trassl, R.; Grambole, D.		Conference Paper
2008Detailed analysis of annealing silver front side contacts on silicon solar cells
Kontermann, S.; Grohe, A.; Preu, R.		Conference Paper
2008Industrial approach for the deposition, through-vias wet opening and firing activation of a backside passivation layer applied on solar cells
Gautero, L.; Rentsch, J.; Weiss, L.; Kohn, N.; Eigner, S.; Zimmer, M.; Specht, J.; Nekarda, J.; Stüwe, D.; Retzlaff, M.; Biro, D.; Sallese, J.-M.; Preu, R.		Conference Paper
2008Industrial type CZ silicon solar cells with screen-printed fine line front contacts and passivated rear contacted by laser firing
Hofmann, M.; Erath, D.; Bitnar, B.; Gautero, L.; Nekarda, J.; Grohe, A.; Biro, D.; Rentsch, J.; Preu, R.		Conference Paper
2008Industrially feasible front-side metallization based on ink-jet masking and nickel plating
Aleman, M.; Bay, N.; Gautero, J.; Specht, J.; Stüwe, D.; Neubauer, R.; Baurcha, D.; Biro, D.; Rentsch, J.; Glunz, S.W.; Preu, R.		Conference Paper
2008Industrially feasible mc-Si metal wrap through (MWT) solar cells with high emitter sheet resistances exceeding 16% efficiency
Clement, F.; Belledin, U.; Wotke, E.; Menkö, M.; Kubera, T.; Hönig, R.; Harmel, C.; Spitz, M.; Wirth, H.; Biro, D.; Preu, R.		Conference Paper
2008Industrially feasible multi crystalline metal wrap through (mwt) silicon solar cells exceeding 16% efficiency
Clement, F.; Lutsch, M.; Kubera, T.; Wirth, H.; Harmel, C.; Wolke, W.; Biro, D.; Preu, R.		Conference Paper
2008Investigation of blistering of sputtered silicon nitride anti-reflection layer
Catoir, J.; Wolke, W.; Hartmann, P.; Gernot, E.; Preu, R.; Trassl, R.; Wieder, S.		Conference Paper
2008Passivation of laser-drilled via holes for emitter-wrap-through-cells
Mingirulli, N.; Trittler, S.; Bui, M.; Grohe, A.; Biro, D.; Preu, R.; Glunz, S.W.		Conference Paper
2008PECVD-ONO: A new deposited firing stable rear surface passivation layer system for crystalline silicon solar cells
Hofmann, M.; Kambor, S.; Schmidt, C.; Grambole, D.; Rentsch, J.; Glunz, S.W.; Preu, R.		Journal Article
2008Plasma cluster processing for advanced solar cell manufacturing
Rentsch, J.; Seiffe, J.; Walter, F.; Hofmann, M.; Weiss, L.; Gautero, L.; Decker, D.; Schlemm, H.; Preu, R.		Conference Paper
2008Resistance analysis of wrapped through emitters
Mingirulli, N.; Driessen, M.; Grote, D.; Biro, D.; Preu, R.		Conference Paper
2008Simulation of MWT-solar cells using a multi 2D circuit calculation tool based on spice
Kubera, T.; Clement, F.; Grote, D.; Thaidigsmann, B.; Biro, D.; Warta, W.; Preu, R.		Conference Paper
2008Single side etching - key technology for industrial high efficiency processing
Rentsch, J.; Gautero, L.; Lemke, A.; Eigner, S.; Zimmer, M.; Walter, F.; Hofmann, M.; Preu, R.		Conference Paper
2008Single-wafer tracking in PV production lines
Rein, S.; Krieg, A.; Weil, A.; Emanuel, G.; Glatthaar, M.; Grohe, A.; Preu, R.; Sattler, B.; Lorch, P.; Vayhinger, K.		Conference Paper
2008Solar cell process development in the european integrated project crystalclear
Beaucarne, G.; John, J.; Choulat, P.; Ma, Y.; Russel, R.; Romijn, I.; Weeber, A.; Hofmann, M.; Preu, R.; Slaoui, A.; Quang, N. le; Nichiporuk, O.; Canizo, C. del; Pan, A.; Solheim, H.; Evju, J.; Nagel, H.; Horzel, J.; Bitnar, B.; Heemeier, M.; Weber, T.; Raabe, B.; Haverkamp, H.; Strümpel, C.; Junge, J.; Riegel, S.; Seren, S.; Hahn, G.		Conference Paper
2008Solarzelle und Solarzellenmodul mit einseitiger Verschaltung
Biro, D.; Mingirulli, N.; Clement, F.; Preu, R.; Woehl, R.		Patent
2008Stack system of PECVD amorphous silicon and PECVD silicon oxide for silicon solar cell rear side passivation
Hofmann, M.; Schmidt, C.; Kohn, N.; Rentsch, J.; Glunz, S.W.; Preu, R.		Journal Article
2008Using hotmelt-inkjet as a structuring method for higher efficiency industrial silicon solar cells
Specht, J.; Biro, D.; Mingirulli, N.; Aleman, M.; Belledin, U.; Efinger, R.; Erath, D.; Gautero, L.; Lemke, A.; Stüwe, D.; Rentsch, J.; Preu, R.		Conference Paper
2008Verfahren zur lokalen Kontaktierung und lokalen Dotierung einer Halbleiterschicht
Preu, R.; Grohe, A.; Biro, D.; Rentsch, J.; Hofmann, M.; Wolf, A.; Nekarda, J.		Patent
2007Aluminum foil as back side metallization for LFC cells
Nekarda, J.-F.; Grohe, A.; Schultz, O.; Preu, R.		Conference Paper
2007Detailed analysis of amorphous silicon passivation layers deposited in industrial in-line and laboratory-type PECVD reactors
Hofmann, M.; Schmidt, C.; Kohn, N.; Grambole, D.; Rentsch, J.; Glunz, S.W.; Preu, R.		Conference Paper
2007Firing stable surface passivation using all-PECVD stacks of SiOx:H and SiNx:H
Hofmann, M.; Kambor, S.; Schmidt, C.; Grambole, D.; Rentsch, J.; Glunz, S.W.; Preu, R.		Conference Paper
2007Industrial realization of dry plasma etching for PSG removal and rear side emitter etching
Rentsch, J.; Decker, D.; Hofmann, M.; Schlemm, H.; Roth, K.; Preu, R.		Conference Paper
2007Inkjet printing for high definition industrial masking processes for solar cell production: Presented at 17th International Photovoltaic Science and Engineering Conference Dec. 3-7, 2007, Fukuoka, Japan
Biro, D.; Erath, D.; Belledin, U.; Specht, J.; Stüwe, D.; Lemke, A.; Aleman, M.; Mingirulli, N.; Rentsch, J.; Preu, R.; Schlosser, R.; Bitnar, B.; Neuhaus, H.		Presentation
2007Investigations of diffusion barriers for application in back-contacted solar cells
Drießen, M.; Mingirulli, N.; Pingel, S.; Schubert, M.; Biro, D.; Preu, R.		Conference Paper
2007Investigations on the influence of different annealing steps on silicon solar cells with silver thick film contacts
Kontermann, S.; Grohe, A.; Erath, D.; Preu, R.; Willeke, G.		Conference Paper
2007Laser processes for the industrial production of high efficiency silicon solar cells
Grohe, A.; Wütherich, T.; Knorz, A.; Nekarda, J.; Mingirulli, N.; Harmel, C.; Preu, R.; Glunz, S.W.		Conference Paper
2007Lifetime studies on laser drilled vias for application in emitter-wrap-through-solar cells
Mingirulli, N.; Grohe, A.; Dohrn, A.; Hofmann, M.; Schubert, M.; Roth, T.; Biro, D.; Preu, R.		Conference Paper
2007Mechanisms involved in the formation of phosphosilicate glass by dehydration of sprayed phosphoric acid in an in-line diffusion furnace
Voyer, C.; Biro, D.; Buettner, T.; Preu, R.		Conference Paper
2007Method for determination of recombination activity of cylindric conduction channels for back-contacted solar cells
Mingirulli, N.; Biro, D.; Preu, R.; Glunz, S.W.; Riepe, S.		Journal Article
2007Phosphorus gettering and multi-crystalline silicon solar cells using in-line diffusion and sprayed phosphoric acid as the dopant source
Voyer, C.; Biro, D.; Buettner, T.; Preu, R.		Conference Paper
2007Pilot-line processing of very large (21 x 21 cm²) and thin mc-Si solar cells
Clement, F.; Preu, R.; Reis, I.E.; Biro, D.; Rentsch, J.; Zimmer, M.; Rein, S.; Emanuel, G.; Krieg, A.; Müller, A.; Martin, F.		Conference Paper
2007Processing and comprehensive characterisation of screen-printed mc-Si Metal Wrap Through (MWT) solar cells
Clement, F.; Lutsch, M.; Kubera, T.; Kasemann, M.; Kwapil, W.; Harmel, C.; Mingirulli, N.; Erath, D.; Wirth, H.; Biro, D.; Preu, R.		Conference Paper
2007Progress in selective laser ablation of dielectric layers
Knorz, A.; Grohe, A.; Harmel, C.; Preu, R.; Luther, J.		Conference Paper
2007PV-TEC - Forschungsfabrik für Solarzellen
Preu, R.		Journal Article
2007Series resistance characterization of industrial silicon solar cells with screen-printed contacts using hotmelt paste
Mette, A.; Pysch, D.; Emanuel, G.; Erath, D.; Preu, R.; Glunz, S.W.		Journal Article
2007Silicon solar cells with screen-printed front side metallization exceeding 19% efficiency
Schultz, O.; Mette, A.; Preu, R.; Glunz, S.W.		Conference Paper
2007Thermal oxidation and wet chemical cleaning of silicon wafers for industrial solar cell production
Lemke, A.; Furtwängler, H.; Rentsch, J.; Biro, D.; Preu, R.		Conference Paper
2007Verfahren zur Präzisionsbearbeitung von Substraten und dessen Verwendung
Mayer, K.; Aleman, M.; Kray, D.; Glunz, S.; Mette, A.; Preu, R.; Grohe, A.		Patent
200621%-efficient silicon solar cells using amorphous silicon rear side passivation
Hofmann, M.; Glunz, S.; Preu, R.; Willeke, G.		Conference Paper
2006Boundary conditions for the industrial production of LFC cells
Grohe, A.; Fleischhauer, B.; Preu, R.; Glunz, S.W.; Willeke, G.P.		Conference Paper
2006Boundary conditions for the industrial production of LFC cells - Results from the joint project INKA
Grohe, A.; Catoir, J.; Fleischhauer, B.; Preu, R.; Glunz, S.W.; Willeke, G.P.; Schneiderlöchner, E.; Lüdemann, R.; Liu, J.; Schramm, S.; Trassl, R.; Wieder, S.		Conference Paper
2006Characterisation of silver thick-film contact formation on textured monocrystalline silicon solar cells
Kontermann, S.; Emanuel, G.; Benick, J.; Preu, R.; Willeke, G.		Conference Paper
2006Fabrication of textured solar cells using sprayed phosphoric acid as the dopant source for the in-line emitter diffusion
Voyer, C.; Biro, D.; Wagner, K.; Benick, J.; Preu, R.		Conference Paper
2006High efficiencies on large area screen printed silicon solar cells and contacting high sheet resistance emitters using hotmelt ink
Mette, A.; Emanuel, G.; Erath, D.; Preu, R.; Willeke, G.		Conference Paper
2006High-efficiency solar cells with laser-grooved buried contact front and laser-fired rear for industrial production
Schultz, O.; Glunz, S.W.; Warta, W.; Preu, R.; Grohe, A.; Köber, M.; Willeke, G.P.; Russel, R.; Fernandez, J.; Morilla, C.; Bueno, R.; Vincueria, I.		Conference Paper
2006Laser applications in crystalline silicon solar cell production
Grohe, A.; Preu, R.; Glunz, S.W.; Willeke, G.		Conference Paper
2006Novel low temperature front side metallisation scheme using selective laser ablation of anti reflection coatings and electroless nickel plating
Grohe, A.; Knorz, A.; Aleman, M.; Harmel, C.; Glunz, S.W.; Preu, R.; Willeke, G.P.		Conference Paper
2006PECVD PSG as a dopant source for industrial solar cells
Benick, J.; Rentsch, J.; Schetter, C.; Voyer, C.; Biro, D.; Preu, R.		Conference Paper
2006PV-Tec: Photovoltaic technology evaluation center: Design and implementation of a production research unit
Biro, D.; Preu, R.; Glunz, S.W.; Rein, S.; Rentsch, J.; Emanuel, G.; Brucker, I.; Faasch, T.; Faller, C.; Willeke, G.; Luther, J.		Conference Paper
2006Selective laser ablation of anti-reflection coatings for novel metallization techniques
Grohe, A.; Harmel, C.; Knorz, A.; Glunz, S.W.; Preu, R.; Willeke, G.P.		Conference Paper
2006The status of silicon solar cell production technology development at Fraunhofer ISE
Preu, R.; Biro, D.; Rentsch, J.; Clement, F.; Erath, D.; Emanuel, G.; Grohe, A.; Hofmann, M.; Mette, A.; Voyer, C.; Wolke, W.; Glunz, S.W.; Willeke, G.P.		Conference Paper
2006Successful market entry of applied materials' ATON™ system for sputtered SiN:H
Trassl, R.; Ratschat, H.; Daube, C.; Wieder, S.; Wolke, W.; Preu, R.		Conference Paper
2006Technology route towards industrial application of rear passivated silicon solar cells
Rentsch, J.; Schultz, O.; Grohe, A.; Biro, D.; Preu, R.; Willeke, G.P.		Conference Paper
2006Verfahren zum Aufbringen von elektrischen Kontakten auf halbleitende Substrate, halbleitendes Substrat und Verwendung des Verfahrens
Aleman, M.; Mette, A.; Glunz, S.; Preu, R.		Patent
2006Verfahren zur simultanen Dotierung und Oxidation von Halbleitersubstraten und dessen Verwendung
Biro, D.; Preu, R.; Rentsch, J.		Patent
2005Analysis of silver thick-film contact formation on industrial silicon solar cells
Grupp, G.; Biro, D.; Emanuel, G.; Preu, R.; Schitthelm, F.; Willeke, G.		Conference Paper
2005Comparison of different dielectric passivation layers for application in industrially feasible high-efficiency crystalline silicon solar cells
Glunz, S.W.; Grohe, A.; Hermle, M.; Hofmann, M.; Janz, S.; Roth, T.; Schultz, O.; Vetter, M.; Martin, I.; Ferré, R.; Bermejo, S.; Wolke, W.; Warta, W.; Preu, R.; Willeke, G.		Conference Paper
2005Determining trade-offs between costs of production and cell/module-efficiency with the concept of indifference curves
Jaus, J.; Rentsch, J.; Preu, R.		Conference Paper
2005Economical and ecological aspects of plasma processing for industrial solar cell fabrication
Rentsch, J.; Jaus, J.; Roth, K.; Preu, R.		Conference Paper
2005Experimental investigation towards high throughput rapid thermal firing of EFG SI solar cells
Horzel, J.; Grupp, G.; Preu, R.; Schmidt, W.		Conference Paper
2005Hot melt ink for the front side metallisation of silicon solar cells
Mette, A.; Erath, D.; Ruiz, R.; Emanuel, G.; Kasper, E.; Preu, R.		Conference Paper
2005Industrialisation of dry phosphorus silicate glass etching and edge isolation for crystalline silicon solar cells
Rentsch, J.; Schetter, C.; Schlemm, H.; Roth, K.; Preu, R.		Conference Paper
2005Isotropic plasma texturing of mc-Si for industrial solar cell fabrication
Rentsch, J.; Kohn, N.; Bamberg, F.; Roth, K.; Peters, S.; Lüdemann, R.; Preu, R.		Conference Paper
2005A large area production technology for solar cells - sputter deposition of SiN:H
Ruske, M.; Liu, J.; Wieder, S.; Preu, R.; Wolke, W.		Conference Paper
2005Laser soldering - A technology for better contacts?
Schmidhuber, H.; Klappert, S.; Stollhof, J.; Erfurt, G.; Eberspächer, M.; Preu, R.		Conference Paper
2005Low temperature back contact for high efficiency silicon solar cells
Brendle, W.; Nguyen, V.; Brenner, K.; Rostan, P.J.; Grohe, A.; Schneiderlöchner, E.; Preu, R.; Rau, U.; Palfinger, G.; Werner, J.H.		Conference Paper
2005Peak firing temperature dependence of the microstructure of Ag thick-film contacts on silicon solar cells - a detailed AFM study of the interface
Grupp, G.; Huljic, D.M.; Preu, R.; Willeke, G.; Luther, J.		Conference Paper
2005Progress in the characterisation of laser-fired contacts
Grohe, A.; Zastrow, U.; Meertens, D.; Houben, L.; Brendle, W.; Bilger, G.; Schneiderlöchner, E.; Glunz, S.W.; Preu, R.; Willeke, G.		Conference Paper
2005Progress in the use of sprayed phosphoric acid as an inexpensive dopant source for industrial solar cells
Voyer, C.; Biro, D.; Wagner, K.; Benick, J.; Preu, R.; Koriath, J.; Heintze, M.; Wanka, H.N.		Conference Paper
2005Status and advancement in transferring the laser-fired contact technology to screen-printed silicon solar cells
Schneiderlöchner, E.; Grohe, A.; Fleischhauer, B.; Hofmann, M.; Glunz, S.W.; Preu, R.; Willeke, G.		Conference Paper
2005Surface passivation for solar cells by large scale inline sputtering of silicon nitride
Wolke, W.; Catoir, J.; Preu, R.; Emanuel, G.; Liu, J.; Ruske, M.		Conference Paper
2005Texturing of multicrystalline silicon by laser ablation
Rentsch, J.; Bamberg, F.; Schneiderlöchner, E.; Preu, R.		Conference Paper
2005Verfahren zur Verminderung der Reflexion an Halbleiteroberflaechen
Schneiderloechner, E.; Rentsch, J.; Preu, R.		Patent
2004Comprehensive study of rapid thermal firing for industrial production of crystalline silicon thick-film solar cells
Huljic, D.M.; Grupp, G.; Horzel, J.; Preu, R.		Conference Paper
2004Dry phosphorus silicate glass etching for crystalline Si solar cells
Rentsch, J.; Binaie, F.; Schetter, C.; Schlemm, H.; Roth, K.; Theirich, D.; Preu, R.		Conference Paper
2004Evaluation of dopant sources and deposition methods suitable for in-line diffusion in the PV industry
Voyer, C.; Biro, D.; Emanuel, G.; Preu, R.; Koriath, J.; Wanka, H.		Conference Paper
2004Inline plasma etching of silicon oxides and nitrides for dry processing in silicon solar cell fabrication
Roth, K.; Rentsch, J.; Binaie, F.; Schetter, C.; Preu, R.; Schlemm, H.		Conference Paper
2004Innovative and efficient production processes for silicon solar cells and modules - SOLPRO IV
Preu, R.; Emanuel, G.; Untiedt, D.; Klappert, S.; Schmidhuber, H.; Biro, D.; Voyer, C.; Wolke, W.; Schneiderlöchner, E.		Conference Paper
2004Laser-fired contact silicon solar cells on p- and n-substrates
Glunz, S.W.; Schneiderlöchner, E.; Kray, D.; Grohe, A.; Hermle, M.; Kampwerth, H.; Preu, R.; Willeke, G.		Conference Paper
2004Ökonomische und ökologische Bewertung von Inline-Plasmaätzverfahren zur Herstellung von Siliziumsolarzellen
Jaus, J.; Rentz, O. (Prüfer); Rosen, J. (Prüfer); Willeke, G. (Prüfer); Preu, R. (Prüfer); Rentsch, J. (Prüfer) 		Thesis
2004On the photon-enhanced diffusion of phosphorus in silicon wafers during rapid isothermal processing
Peters, S.; Hickel, P.-E.; Horzel, J.; Noel, S.; Preu, R.		Conference Paper
2004Plasma etching for industrial in-line processing of c-si solar cells: Presentation held at the 19th European Photovoltaic Solar Energy Conference
Rentsch, J.; Emanuel, G.; Schetter, C.; Aumann, T.; Theirich, D.; Gentischer, J.; Roth, K.; Fritzsche, M.; Dittrich, K.-H.; Preu, R.		Presentation
2004Production experience and lifetime investigations of industrally fabricated p-type Cz-silicon solar cells
Rentsch, J.; Sparber, W.; Peters, S.; Neuhaus, H.; Glunz, S.W.; Preu, R.; Lüdermann, R.		Conference Paper
2004Silicon nitride - silicon oxide stacks for solar cell rear side passivation
Hofmann, M.; Schneiderlöchner, E.; Wolke, W.; Preu, R.		Conference Paper
2004Silicon solar cells with screen printed-front contact and dielectrically passivated, laser-fired rear electrode
Schneiderlöchner, E.; Emanuel, G.; Grupp, G.; Lautenschlager, H.; Leimenstoll, A.; Glunz, S.W.; Preu, R.; Willeke, G.		Conference Paper
2004SiN:H anti-reflection coatings for c-Si solar cells by large scale inline sputtering
Wolke, W.; Jäckle, A.; Preu, R.; Wieder, S.; Ruske, M.		Conference Paper
2004Transport systems for industrial in-line diffusion of silicon solar cells
Biro, D.; Preu, R.; Willeke, G.; Untiedt, D.; Wandel, G.; Gentischer, J.		Conference Paper
2003Analysis of laser-fired local back surface fields using n+np+ cell structures
Glunz, S.W.; Grohe, A.; Hermle, M.; Schneiderlöchner, E.; Dicker, J.; Preu, R.; Mäckel, H.; Macdonald, D.; Cuevas, A.		Conference Paper
2003Characterization of laser-fired contacts processed on wafers with different resistivity
Grohe, A.; Schneiderlöchner, E.; Hermle, M.; Preu, R.; Glunz, S.W.; Willeke, G.; Walz, S.		Conference Paper
2003Comparison of texturing methods for monocrystalline silicon solar cells using KOH and Na2CO3
Sparber, W.; Schultz, O.; Biro, D.; Emanuel, G.; Preu, R.; Poddey, A.; Borchert, D.		Conference Paper
2003Lifetime improvements of multicrystalline silicon analysed by spatially resolved lifetime measurements
Emanuel, G.; Wolke, W.; Preu, R.		Conference Paper
2003Plasma etching for industrial in-line processing of c-Si solar cells
Rentsch, J.; Emanuel, G.; Schetter, C.; Aumann, T.; Theirich, D.; Gentischer, J.; Roth, K.; Fritzsche, M.; Dittrich, K.-H.; Preu, R.		Conference Paper
2003Scanning ND:YAG laser system for industrially applicable processing in silicon solar cell manufacturing
Schneiderlöchner, E.; Grohe, A.; Glunz, S.W.; Preu, R.; Willeke, G.		Conference Paper
2003Technology path to the industrial production of highly efficient and thin c-Si solar cells
Preu, R.; Biro, D.; Emanuel, G.; Grohe, A.; Hofmann, M.; Huljic, D.M.; Reis, I.E.; Rentsch, J.; Schneiderlöchner, E.; Sparber, W.; Wolke, W.; Willeke, G.		Conference Paper
2003Verfahren zur Herstellung eines Halbleiter-Metallkontaktes durch eine dielektrische Schicht
Preu, R.; Schneiderloechner, E.; Glunz, S.; Luedemann, R.		Patent
2002Advanced diffusion system for low contamination in-line rapid thermal processing of silicon solar cells
Biro, D.; Preu, R.; Schultz, O.; Peters, S.; Huljic, D.M.; Zickermann, D.; Schindler, R.; Ludemann, R.; Willeke, G.		Journal Article
2002High capacity walking string diffusion furnace
Biro, D.; Emanuel, G.; Preu, R.; Willeke, G.		Conference Paper
2002High throughput laser isolation of crystalline silicon solar cells
Emanuel, G.; Schneiderlöchner, E.; Stollhof, J.; Gentischer, J.; Preu, R.; Lüdemann, R.		Conference Paper
2002High-efficiency cell structures for medium-quality silicon
Glunz, S.W.; Dicker, J.; Kray, D.; Lee, J.Y.; Preu, R.; Rein, S.; Schneiderlöchner, E.; Sölter, J.; Warta, W.; Willeke, G.		Conference Paper
2002High-efficiency silicon solar cells for low-illumination applications
Glunz, S.W.; Dicker, J.; Esterle, M.; Hermle, M.; Isenberg, J.; Kamerewerd, F.; Knobloch, J.; Kray, D.; Leimenstoll, A.; Lutz, F.; Oßwald, D.; Preu, R.; Rein, S.; Schäffer, E.; Schetter, C.; Schmidhuber, H.; Schmidt, H.; Steuder, M.; Vorgrimler, C.; Willeke, G.		Conference Paper
2002Innovation in solar cell production technology
Lüdemann, R.; Preu, R.; Willeke, G.		Conference Paper
2002Innovative production technologies for solar modules - SOLPRO III
Klappert, S.; Untiedt, D.; Preu, R.; Emanuel, G.; Huljic, D.; Lüdemann, R.; Eversheim, W.		Conference Paper
2002Investigations on laser-fired contacts for passivated rear solar cells
Schneiderlöchner, E.; Grohe, A.; Ballif, C.; Glunz, S.W.; Preu, R.; Willeke, G.		Conference Paper
2002Laser fired contacts - a fast contact process for passivated rear silicon solar cells
Schneiderlöchner, E.; Grohe, A.; Preu, R.; Glunz, S.W.; Willeke, G.		Conference Paper
2002Laser-fired contacts - transfer of a simple high efficiency process scheme to industrial production
Preu, R.; Schneiderlöchner, E.; Grohe, A.; Glunz, S.W.; Willeke, G.		Conference Paper
2002Laser-fired contacts (LFC)
Schneiderlöchner, E.; Preu, R.; Lüdemann, R.; Glunz, S.W.; Willeke, G.		Conference Paper
2002Laser-fired rear contacts for crystalline silicon solar cells
Schneiderlöchner, E.; Preu, R.; Lüdemann, R.; Glunz, S.W.		Journal Article
2002Laserunterstütztes Verfahren zur Kontaktierung der Rückseite von Silicium-Solarzellen
Grohe, A.; Schneiderlöchner, E.; Emanuel, G.; Preu, R.		Abstract
2002Pad printed front contacts for c-Si solar cells - a technological and economical evaluation
Huljic, D.M.; Thormann, S.; Preu, R.; Lüdemann, R.; Willeke, G.		Conference Paper
2002Progress in screen printed front side metallization schemes for CSiTF solar cells
Rentsch, J.; Huljic, D.M.; Reber, S.; Preu, R.; Lüdemann, R.		Conference Paper
2002Rapid thermal surface passivation of silicon solar cells
Peters, S.; Ballif, C.; Borchert, D.; Huljic, D.M.; Lee, J.Y.; Preu, R.; Radt, V.; Schindler, R.; Schneiderlöchner, E.; Warta, W.		Conference Paper
2002Screen printed selective emitters prepared by fast and rapid thermal diffusion
Biro, D.; Schultz, O.; Preu, R.; Ballif, C.; Zickermann, D.; Lüdemann, R.		Conference Paper
2001Advanced diffusion system for low contamination in-line rapid thermal processing of silicon solar cells
Biro, D.; Preu, R.; Schulz, O.; Peters, S.; Huljic, D.M.; Zickermann, D.; Schindler, R.; Lüdemann, R.; Willeke, G.		Conference Paper
2001Innovative Produktionstechnologien für kristalline Silicium-Solarzellen
Preu, R.		Dissertation
2000Innovative production technologies for solar cells - SOLPRO
Preu, R.; Lüdemann, R.; Emanuel, G.; Wettling, W.; Eversheim, W.; Güthenke, G.; Untiedt, D.; Schweitzer, G.		Conference Paper
2000Laser ablation - a new low-cost approach for passivated rear contact formation in crystalline silicon solar cell technology
Preu, R.; Glunz, S.W.; Schäfer, S.; Lüdemann, R.; Wettling, W.; Pfleging, W.		Conference Paper
2000Laser micromachining for applications in thin film technology
Pfleging, W.; Ludwig, A.; Seemann, K.; Preu, R.; Mäckel, H.; Glunz, S.W.		Journal Article
2000New simplified methods for patterning the rear contact of RP-PERC high-efficiency solar cells
Glunz, S.W.; Preu, R.; Schaefer, S.; Schneiderlöchner, E.; Pfleging, W.; Lüdemann, R.; Willeke, G.		Conference Paper
2000Plasma etched PERC and buried base contact solar cells
Schaefer, S.; Preu, R.; Lüdemann, R.; Glunz, S.W.		Conference Paper
2000Rapid thermal firing of screen printed contacts for large area crystalline silicon solar cells
Huljic, D.M.; Biro, D.; Preu, R.; Craff-Castillo, C.; Lüdemann, R.		Conference Paper
2000Sputtering - a key technology for thin film coatings in crystalline silicon solar cell production
Krempel-Hesse, J.; Preu, R.; Lautenschlager, H.; Lüdemann, R.		Conference Paper
2000Sputtering - a key technology for thin film deposition in crystalline silicon solar cell production?
Preu, R.; Krempel-Hesse, J.; Biro, D.; Huljic, D.M.; Mäckel, H.; Lüdemann, R.		Conference Paper
2000Verfahren und Vorrichtung zur selektiven Kontaktierung von Solarzellen
Preu, R.; Glunz, S.		Patent
1999Fine-line screen printing for solar cells
Reis, I.E.; Huljic, D.; Hahne, P.; Preu, R.; Zickermann, D.; Bucher, B.; Fleischer, P.V.		Conference Paper
1998Pad printing - a novel thick-film technique of fine-line printing for solar cells
Hahne, P.; Reis, I.E.; Hirth, E.; Huljic, D.M.; Preu, R.		Conference Paper
1998Screen printed and RT-processed emitters for crystalline silicon solar cells
Preu, R.; Schumacher, J.O.; Hahne, P.; Lautenschlager, H.; Reis, I.E.; Glunz, S.W.; Warta, W.		Conference Paper
1997Optimisation of cell interconnectors for PV module performance enhancement
Preu, R.; Koltay, P.; Schmidhuber, H.; Bücher, K.		Conference Paper
1995Einfache Beschreibung des temperatur- und einstrahlungsabhängigen Verhaltens von Solarzellen
Kleiss, G.; Lipps, F.; Preu, R.; Reiche, F.; Bücher, K.		Abstract
1995PV-module reflection losses: Measurement, simulation and influence on energy yield and performance ratio
Preu, R.; Kleiss, G.; Reiche, K.; Bücher, K.		Conference Paper
1994Effects of advantageous placing of PV cells and modules in generating units
Reiche, K.; Preu, R.; Kleiss, G.; Bücher, K.		Conference Paper
This publication list has been generated from the publication database Fraunhofer-Publica.

Awards & outstanding achievements

Laser Fired Contact Technology for the Production of Highly Efficient Silicon Solar Cells

Joseph von Fraunhofer Prize
Fraunhofer Society e.V.
May 2016

Innovation Award Laser Technology

Working Group Laser Technology e.V. / European Laser Institute

May 2014

Dr. Meyer-Struckmann Science Award

Brandenburg University of Technology Cottbus (BTU)

January 2003