Micro-structured surfaces

Scanning electron micrographs of the structured surfaces after different processing steps. A: Hexagonal pattern with a period of 8 µm in a positive photoresist after interference ithography. This structure is used as a master.

Surfaces: Conditioning, Passivation and Light-Trapping

The surface structure of a solar cell has a significant impact on its efficiency potential. For this reason, we work on various methods and technologies for conditioning and passivation, as well as on optimizing light trapping in silicon solar cells. The key areas of our work include:

Coatings:

  • Single and multilayer anti-reflection coatings
  • Dopant precursors and multifunctional coatings
  • Passivation coatings and coating systems (incl. SiNx, SiOx, SiCx, Al2O3)
  • Barrier layers


Dry etching:

  • Texturing (fluorochemistry, HCl)
  • Processes for conditioning prior to passivation as well as emitter optimization and removal
  • Patterning
  • Selective removal of dielectric layers

Selected Research Projects

 

MASSE

 

THESSO

Simultaneos Co-Diffusion Processes for n-Type Solar Cells

 

 

ForTes: OPTOS

Determination of Refelction and Absorption of Solar Cells with Surfaces Textured on Both Sides

 

 

 

Current publications - Surfaces: Conditioning, Passivation and Light-Trapping: