Fraunhofer Institute for Solar Energy Systems ISE
Fraunhofer Institute for Solar Energy Systems ISE

Micro-structured surfaces

Scanning electron micrographs of the structured surfaces after different processing steps. A: Hexagonal pattern with a period of 8 µm in a positive photoresist after interference ithography. This structure is used as a master.

© Fraunhofer ISE

Surfaces: Conditioning, Passivation and Light-Trapping

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The surface structure of a solar cell has a significant impact on its efficiency potential. For this reason, we work on various methods and technologies for conditioning and passivation, as well as on optimizing light trapping in silicon solar cells. The key areas of our work include:

Coatings:

  • Single and multilayer anti-reflection coatings
  • Dopant precursors and multifunctional coatings
  • Passivation coatings and coating systems (incl. SiNx, SiOx, SiCx, Al2O3)
  • Barrier layers


Dry etching:

  • Texturing (fluorochemistry, HCl)
  • Processes for conditioning prior to passivation as well as emitter optimization and removal
  • Patterning
  • Selective removal of dielectric layers

Selected Research Projects

 

© Fraunhofer ISE

MASSE

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© Fraunhofer ISE

THESSO

Simultaneos Co-Diffusion Processes for n-Type Solar Cells

 

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© Fraunhofer ISE

ForTes: OPTOS

Determination of Refelction and Absorption of Solar Cells with Surfaces Textured on Both Sides

 

 

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Current Publications - Surfaces: Conditioning, Passivation and Light-Trapping:

Jahr
Year		Titel/Autor:in
Title/Author		Publikationstyp
Publication Type
2022 Investigation of the Defect Distribution of Laser Contact Opening Applied to poly-Si/SiNx Stacks
Steinhauser, B.; Arya, V.; Jakob, L.; Heinz, F.; Schmiga, C.; Grübel, B.; Brand, A.; Kluska, S.; Nekarda, J.		 Zeitschriftenaufsatz
Journal Article
2022 Effective Charge Dynamics in Al2O3/SiO2 Multilayer Stacks and their Influence on Silicon Surface Passivation
Patel, H.; Reichel, C.; Richter, A.; Masuch, P.; Benick, J.; Glunz, S.W.		 Zeitschriftenaufsatz
Journal Article
2022 Optimizing Emitter Diffusion Process for Atmospheric Pressure Dry Nanotextured Monocrystalline PERC
Ridoy, A.; Khan, N.; Kafle, B.; Schmidt, S.; Clochard, L.; Hofmann, M.; Rentsch, J.		 Zeitschriftenaufsatz
Journal Article
2021 Progress in P-type Tunnel Oxide-Passivated Contact Solar Cells with Screen-Printed Contacts
Mack, S.; Herrmann, D.; Lenes, M.; Renes, M.; Wolf, A.		 Zeitschriftenaufsatz
Journal Article
2021 Use of Optical Emission Spectroscopy to Predict Silicon Nitride Layer Properties
Rachdi, L.; Hofmann, M.		 Zeitschriftenaufsatz
Journal Article
2021 Increasing Throughput of Industrial PERC Production
Meßmer, M.; Wolf, A.; Zimmer, M.; Meyer, F.; Hoppe, G.; Lorenz, A.; Tepner, S.; Ourinson, D.; Emanuel, G.; Nold, S.; Goraya, B.S.; Clement, F.		 Zeitschriftenaufsatz
Journal Article
2021 Extraordinarily High Minority Charge Carrier Lifetime Observed in Crystalline Silicon
Steinhauser, B.; Niewelt, T.; Richter, A.; Eberle, R.; Schubert, M.		 Zeitschriftenaufsatz
Journal Article
2021 Revised Parametrization of the Recombination Velocity at SiO2/SiNX-Passivated Phosphorus-Diffused Surfaces
Wolf, A.; Egle, J.; Mack, S.; Höffler, H.; Herrmann, D.; Lohmüller, S.; Horzel, J.; Fell, A.		 Vortrag
Presentation
2021 Optimizing Metal Grating Back Reflectors for III-V-on-Silicon Multijunction Solar Cells
Tillmann, P.; Bläsi, B.; Burger, S.; Hammerschmidt, M.; Höhn, O.; Becker, C.; Jäger, K.		 Zeitschriftenaufsatz
Journal Article
2021 Hocheffiziente Solarzellen durch selektive Kontakte
Moldovan, A.; Ding, K.; Rau, U.; Peibst, R.; Korte, L.; Stannowski, B.		 Konferenzbeitrag
Conference Paper
2021 Deep Learning vs. Classical Modeling of Processes for Fault Detection in Industrial Heating-Cooling Systems
Garcia Rosas, K.R.; Zimmer, M.; Nebel, B.		 Konferenzbeitrag
Conference Paper
2021 Passivated, Highly Reflecting, Laser Contacted Ge Rear Side for III-V Multi-Junction Solar Cells
Weiss, C.; Schön, J.; Höhn, O.; Fuhrmann, B.; Dimroth, F.; Janz, S.		 Zeitschriftenaufsatz
Journal Article
2021 A Round Robin-Highliting on the Passivating Contact Technology
Fellmeth, T.; Feldmann, F.; Steinhauser, B.; Nagel, H.; Mack, S.; Hermle, M.; Torregrosa, F.; Ingenito, A.; Haug, F.-J.; Morisset, A.; Buchholz, F.; Chaudhary, A.; Desrues, T.; Haase, F.; Min, B.; Peibst, R.; Tous, L.		 Zeitschriftenaufsatz
Journal Article
2021 Influence of Intrinsic Silicon Layer and Intermediate Silicon Oxide Layer on the Performance of Inline PECVD Deposited Boron-Doped TOPCon
Harter, A.; Polzin, J.-I.; Tutsch, L.; Temmler, J.; Hofmann, M.; Moldovan, A.; Feldmann, F.		 Zeitschriftenaufsatz
Journal Article
2021 Effect of Thermal Annealing on the Charge Carrier Selectivity of Ultra-Thin Organic Interface Dipoles in Silicon Organic Heterojunction Solar Cells
Reichel, C.; Würfel, U.; Hack, J.H.; Winkler, K.; Messmer, C.A.; Schleiermacher, H.-F.; Kohlstädt, M.; Hermle, M.; Glunz, S.W.		 Zeitschriftenaufsatz
Journal Article
2021 Revised Parametrization of the Recombination Velocity at SiO2/SiNx-Passivated Phosphorus-Diffused Surfaces
Wolf, A.; Egle, J.; Mack, S.; Höffler, H.; Herrmann, D.; Lohmüller, S.; Horzel, J.; Fell, A.		 Zeitschriftenaufsatz
Journal Article
2021 The MorphoColor Concept for Colored Photovoltaic Modules and Solar Thermal Collectors
Bläsi, B.; Wessels, A.; Callies, A.; Eisenlohr, J.; Ensslen, F.; Kuhn, T.; Kroyer, T.; Höhn, O.		 Vortrag
Presentation
2021 Industrial High Throughput Emitter Formation and Thermal Oxidation for Silicon Solar Cells by the High Temperature Stack Oxidation Approach
Meßmer, M.; Lohmüller, S.; Weber, J.; Wolf, A.		 Zeitschriftenaufsatz
Journal Article
2020 On the Formation of Black Silicon Features by Plasma-Less Etching of Silicon in Molecular Fluorine Gas
Kafle, B.; Ridoy, A.I.; Miethig, E.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.		 Zeitschriftenaufsatz
Journal Article
2020 Plating for Passivated-Contact Solar Cells
Kluska, S.; Hatt, T.; Grübel, B.; Cimiotti, G.; Schmiga, C.; Arya, V.; Steinhauser, B.; Feldmann, F.; Bartsch, J.; Goraya, B.S.; Nold, S.; Brand, A.A.; Nekarda, J.; Glatthaar, M.; Glunz, S.W.		 Zeitschriftenaufsatz
Journal Article
2020 Numerical Simulation of an Entire Wafer Surface during Ozone-Based Wet Chemical Etching
Mohr, L.; Dannenberg, T.; Moldovan, A.; Zimmer, M.; Müller, C.		 Zeitschriftenaufsatz
Journal Article
2020 A density functional theory study on the passivation mechanisms of hydrogenated Si/Al2O3 interfaces
Colonna, F.; Kühnhold-Pospischil, S.; Elsässer, C.		 Zeitschriftenaufsatz
Journal Article
2020 The effects of carbon incorporation on the refractive index of PECVD silicon oxide layers
Torda, Benjamin; Rachdi, Lazhar; Mohamed Okasha Mohamed Okasha, Asmaa; Saint-Cast, Pierre; Hofmann, Marc		 Zeitschriftenaufsatz
Journal Article
2020 Application of Hydrosilane-Free Atmospheric Pressure Chemical Vapor Deposition of SiOx Films in the Manufacture of Crystalline Silicon Solar Cells
Issa, E.; Nagel, H.; Bartsch, J.; Glatthaar, M.; Rädlein, E.		 Zeitschriftenaufsatz
Journal Article
2020 Modeling and realization of photonic structures for silicon-based tandem solar cells
Höhn, Oliver; Hauser, Hubert; Tucher, Nico; Müller, Ralph; Bläsi, Benedikt		 Konferenzbeitrag
Conference Paper
2020 Simultaneous Boron Emitter Diffusion and Crystallization of TOPCon Layers via Rapid Vapour-Phase Direct Doping
Drießen, M.; Richter, A.; Steinhauser, B.; Feldmann, F.; Polzin, J.-I.; Sahajad, F.; Ohnemus, M.; Weiss, C.; Benick, J.; Janz, S.		 Konferenzbeitrag
Conference Paper
2020 POCl3-Based Emitter Diffusion Process with Lower Recombination Current Density and Homogeneous Sheet Resistance for Nanotextured Monocrystalline Silicon with atmospheric Pressure Dry Etching
Khan, N.W.; Ridoy, A.I.; Kafle, B.; Klitzke, M.; Schmidt, S.; Clochard, L.; Wolf, A.; Hofmann, M.; Rentsch, J.		 Konferenzbeitrag
Conference Paper
2020 Spray Pyrolysis - a Versatile Technique for Thin Film Deposition in PV
Bartsch, J.; Heitmann, U.; Jakob, L.; Mahmoud Algazzar, R.; Tutsch, L.; Hermann, R.; Kluska, S.; Bivour, M.; Bläsi, B.; Hauser, H.; Janz, S.; Glatthaar, M.		 Konferenzbeitrag
Conference Paper
2020 Tailored Disorder: A Self-Organized Photonic Contact for Light Trapping in Silicon-Based Tandem Solar Cells
Hauser, Hubert; Mühlbach, Kai; Höhn, Oliver; Müller, Ralph; Seitz, Sonja; Rühe, Jürgen; Glunz, Stefan W.; Bläsi, Benedikt		 Zeitschriftenaufsatz
Journal Article
2020 Improved passivation of n-Type Poly-Si based passivating Contacts by the Application of Hydrogen-Rich Transparent Conductive Oxides
Tutsch, L.; Feldmann, F.; Macco, B.; Bivour, M.; Kessels, E.; Hermle, M.		 Zeitschriftenaufsatz
Journal Article
2020 Origin of the Tunable carrier Selectivity of Atomic-Layer-Deposited TiOx Nanolayers in Crystalline Silicon Solar Cells
Matsui, T.; Bivour, M.; Ndione, P.F.; Bonilla, R.S.; Hermle, M.		 Zeitschriftenaufsatz
Journal Article
2020 Influence of Layer Thickness on Passivation Properties in SiOx/Al2O3 Stacks
Ek, A.; Reichel, C.; Richter, A.; Benick, J.		 Zeitschriftenaufsatz
Journal Article
2019 P-Type Silicon Solar Cells with Passivating Rear Contact Formed by LPCVD p+ Polysilicon and Screen Printed Ag Metallization
Mack, S.; Lenes, M.; Luchies, J.-M.; Wolf, A.		 Zeitschriftenaufsatz
Journal Article
2019 Assessing the operating temperature of multi-junction solar cells with novel rear side layer stack and local electrical contacts
Alonso-Ãlvarez, D.; Weiss, C.; Fernandez, J.; Janz, S.; Ekins-Daukes, N.		 Zeitschriftenaufsatz
Journal Article
2019 Passivation and Microstructure of Dual Intrinsic a-Si:H Layers for SHJ Solar Cells
Temmler, J.; Bodlak, L.; Moldovan, A.; Bivour, M.; Wolf, A.; Rentsch, J.		 Konferenzbeitrag
Conference Paper
2019 Effect of Hydrogen Addition on Bulk Properties of Sputtered Indium Tin Oxide Thin Films
Juneja, N.; Tutsch, L.; Feldmann, F.; Fischer, A.; Bivour, M.; Moldovan, A.; Hermle, M.		 Konferenzbeitrag
Conference Paper
2019 Plated Front Side Metallization on Transparent Conduction Oxide Utilizing Low-Cost APCVD SiO2 Insulating Layer
Issa, E.; Nagel, H.; Guzik, L.; Javanbakht, H.; Coron, E.; Rädlein, E.; Glatthaar, M.; Glunz, S.W.		 Konferenzbeitrag
Conference Paper
2019 Inline Deposited PassDop Layers for Rear Side Passivation and Contacting of p-type c-Si PERL Solar Cells with High Bifaciality
Norouzi, M.H.; Saint-Cast, P.; Lohmüller, E.; Lohmüller, S.; Steinhauser, B.; Wolf, A.; Hofmann, M.		 Konferenzbeitrag
Conference Paper
2019 Surface Passivation of Atmospheric Pressure Dry Etched Multicrystalline Silicon Surfaces
Ridoy, A.I.; Kafle, B.; Khan, N.W.; Klitzke, M.; Lohmüller, S.; Clochard, L.; Duffy, E.; Wolf, A.; Hofmann, M.		 Konferenzbeitrag
Conference Paper
2019 Approach to Clarify the Cause of Handling Defects in Silicon Heterojunction Cell Production through the Interplay of Different Imaging Techniques
Fischer, A.; Vulcanean, I.V.; Moldovan, A.; Rentsch, J.		 Konferenzbeitrag
Conference Paper
2019 Broadband Antireflection Mie Scatterers Revisited - a Solar Cell and Module Analysis
Stevens, L.; Tucher, N.; Höhn, O.; Hauser, H.; Müller, C.; Bläsi, B.		 Zeitschriftenaufsatz
Journal Article
2019 Implementing transparent conducting oxides on ultrathin SiOx/poly-Si passivating contacts by DC sputtering
Tutsch, Leonard; Feldmann, Frank; Polzin, Jana-Isabelle; Bivour, Martin; Moldovan, Anamaria; Macco, Bart; Hermle, Martin; Kessels, Erwin; Glunz, Stefan W.		 Vortrag
Presentation
2019 Implementing transparent conducting oxides by DC sputtering on ultrathin SiOx / poly-Si passivating contacts
Tutsch, L.; Feldmann, F.; Polzin, J.; Luderer, C.; Bivour, M.; Moldovan, A.; Rentsch, J.; Hermle, M.		 Zeitschriftenaufsatz
Journal Article
2019 Plasma Oxidation for the Front Side Passivation of PERC Solar Cells
Mohamed Okasha Mohamed Okasha, A.; Kafle, B.; Torda, B.; Teßmann, C.; Moldovan, A.; Hofmann, M.		 Konferenzbeitrag
Conference Paper
2019 Polymer-Based Rear Side Light Trapping Structures for Silicon-Based Tandem Solar Cells
Hauser, Hubert; Höhn, Oliver; Müller, Ralph; Tucher, Nico; Mühlbach, Kai; Silva Freitas, Rita Marlene da; Benick, Jan; Hermle, Martin; Bläsi, Benedikt		 Konferenzbeitrag
Conference Paper
2019 Numerical Simulation of an Ozone-Based Wet-Chemical Etching
Mohr, L.; Krick, T.; Zimmer, M.; Fischer, A.; Moldovan, A.		 Konferenzbeitrag
Conference Paper
2019 Front Side Structures in TiO2 for Crystalline Silicon Solar Cells. Which Effects can they Achieve?
Stevens, L.; Hauser, H.; Höhn, O.; Tucher, N.; Wellens, C.; Stauch, C.; Jahn, R.; Müller, C.; Bläsi, B.		 Konferenzbeitrag
Conference Paper
2019 Multivariate Statistical Modelling to Correlate PECVD Layer Properties with Plasma Chemistry during Silicon Nitride Deposition
Rachdi, L.; Hofmann, M.		 Konferenzbeitrag
Conference Paper
2019 Improved Passivation for SHJ Utilizing Dual Intrinsic a-Si:H Layers on an Inline PECVD Tool
Bodlak, Lara; Temmler, Jan; Moldovan, Anamaria; Rentsch, Jochen		 Konferenzbeitrag
Conference Paper
2019 Impact of Vacuum Grippers Utilized for Automated Wafer Handling Prior a-Si Passivation for Silicon Heterojunction Solar Cells
Fischer, A.; Moldovan, A.; Rentsch, J.		 Konferenzbeitrag
Conference Paper
2019 Energy yield analysis of textured perovskite silicon tandem solar cells and modules
Tucher, Nico; Höhn, Oliver; Narasimha Murthy, Jayanth; Martínez Sánchez, Juan Francisco; Steiner, Marc; Armbruster, Alfons; Lorenz, Elke; Bläsi, Benedikt; Goldschmidt, Jan Christoph		 Zeitschriftenaufsatz
Journal Article
2019 An Analytical Model for Resistance-Limited Recombination at Line Defects in Solar Cells
Saint-Cast, P.; Fell, A.		 Zeitschriftenaufsatz
Journal Article
2018 Approach of a fluid dynamic model for the investigation of an industrial wet chemical process bath
Mohr, L.; Zimmer, M.		 Konferenzbeitrag
Conference Paper
2018 Texturisation of Multicrystalline DWS Wafers by HF/HNO3/H2SO4 at Elevated Temperature
Krieg, K.; Jenek, N.A.; Zimmer, M.		 Konferenzbeitrag
Conference Paper
2018 Advanced module optics of textured perovskite silicon tandem solar cells
Tucher, N.; Höhn, O.; Bläsi, B.; Goldschmidt, J.C.		 Konferenzbeitrag
Conference Paper
2018 Excellent surface passivation quality using industrial-scale direct-plasma TOPCon deposition technology
Steinhauser, B.; Polzin, J.-I.; Feldmann, F.; Hermle, M.; Glunz, S.W.		 Zeitschriftenaufsatz
Journal Article
2018 Efficiency Potential of P-Type PERT vs. PERC Solar Cells
Meier, S.; Wasmer, S.; Fell, A.; Wöhrle, N.; Greulich, J.; Wolf, A.		 Konferenzbeitrag
Conference Paper
2018 Towards 90% Bifaciality for p-Type Cz-Si Solar Cells by Adaption of Industrial PERC Processes
Lohmüller, E.; Lohmüller, S.; Norouzi, M.H.; Saint-Cast, P.; Weber, J.; Meier, S.; Wolf, A.		 Konferenzbeitrag
Conference Paper
2018 Emitter Formation and Passivation Dependence on Crystal Grain Orientations after Atmospheric Pressure Dry Nanotexturing
Ridoy, A.I.; Kafle, B.; Saint-Cast, P.; Lohmüller, S.; Norouzi, M.H.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R.		 Konferenzbeitrag
Conference Paper
2018 Development of an Ozone-Based Inline Cleaning and Conditioning Concept
Fischer, A.; Moldovan, A.; Temmler, J.; Zimmer, M.; Rentsch, J.		 Konferenzbeitrag
Conference Paper
2018 Field stitching approach for the wave optical modeling of black silicon structures
Tucher, N.; Gebrewold, H.T.; Bläsi, B.		 Zeitschriftenaufsatz
Journal Article
2018 Large Area TOPCon Technology Achieving 23.4% Efficiency
Steinhauser, B.; Feldmann, F.; Polzin, J.-I.; Tutsch, L.; Arya, V.; Grübel, B.; Fischer, A.; Moldovan, A.; Benick, J.; Richter, A.; Brand, A.A.; Kluska, S.; Hermle, M.		 Konferenzbeitrag
Conference Paper
2018 Fabrication of APCVD PSG Emitter-Based Industrial PERC Solar Cells Reaching >21.0% Conversion Efficiencies
Kafle, B.; Saint-Cast, P.; Belledin, U.; Lohmüller, S.; Zunft, H.; Knauss, H.; Palinginis, P.; Kusterer, C.; Köhler, R.; Zehl, T.; Wolf, A.; Hofmann, M.		 Konferenzbeitrag
Conference Paper
2018 Role of oxygen for boron diffusion from borosilicate glass layers deposited by atmospheric pressure chemical vapor deposition
Meier, S.; Wolf, A.; Mack, S.; Lohmüller, S.; Glunz, S.W.		 Zeitschriftenaufsatz
Journal Article
2018 SiO2 surface passivation layers - a key technology for silicon solar cells
Glunz, S.W.; Feldmann, F.		 Zeitschriftenaufsatz
Journal Article
2018 Light scattering at random pyramid textures: Effects beyond geometric optics
Höhn, O.; Tucher, N.; Richter, A.; Hermle, M.; Bläsi, B.		 Konferenzbeitrag
Conference Paper
2018 Development of 4 nm-Thin PECVD aluminium oxide using plasma analysis and its application to PERC solar cells and modules
Hofmann, Marc; Wagenmann, Dirk; Teßmann, Christopher; Jäcklein, Martin; Saint-Cast, Pierre; Eberlein, Dirk; Kraft, Achim; Dippell, Torsten; May, Frank; Dörr, Manfred; Cord, Bernhard; Schütte, Thomas; Neiß, Peter; Eichhorn, Lutz; Klick, Michael; Richter, Uwe; Siemers, Michael; Wiedemuth, Peter		 Konferenzbeitrag
Conference Paper
2018 Influence of Interconnection Concepts for IBC Solar Cell Performance by Simulation
Huyeng, J.D.; Spribille, A.; Rendler, L.C.; Ebert, C.; Eitner, U.; Keding, R.		 Konferenzbeitrag
Conference Paper
2018 High-Efficiency Diamond Wire-Sawn mc-Si-Based PERC Solar Cells Textured by Atmospheric Pressure Dry Etching
Kafle, B.; Ridoy, A.I.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Duncker, K.; Petter, K.; Peters, S.; Hofmann, M.		 Konferenzbeitrag
Conference Paper
2018 Downshifting maximization procedure applied to [Eu(bphen)(tta)3] at different concentrations applied to a photovoltaic device and covered with a hemispherical reflector
Guerrero-Lemus, R.; Sanchiz, J.; Sierra-Ramos, M.; Martín, I.R.; Hernandez-Rodriguez, C.; Borchert, D.		 Zeitschriftenaufsatz
Journal Article
2018 Highly luminescent film as enhancer of photovoltaic devices
González-Pérez, S.; Sanchiz, J.; Rodríguez, V.D.; Canadillas-Ramallo, D.; González-Platas, J.; Borchert, D.; Gonzalez-Diaz, B.; Hernandez-Rodriguez, C.; Guerrero-Lemus, R.		 Zeitschriftenaufsatz
Journal Article
2018 Integrating transparent conductive oxides to improve the infrared response of silicon solar cells with passivating rear contacts
Tutsch, Leonard; Feldmann, Frank; Bivour, Martin; Wolke, Winfried; Hermle, Martin; Rentsch, Jochen		 Konferenzbeitrag
Conference Paper
2018 Theoretical study of pyramid sizes and scattering effects in silicon photovoltaic module stacks
Höhn, O.; Tucher, N.; Bläsi, B.		 Zeitschriftenaufsatz
Journal Article
2018 Trends in Solar Electricity
Bett, A.W.		 Vortrag
Presentation
2018 Photonic structures for III-V//Si multi-junction solar cells with efficiency >33%
Bläsi, Benedikt; Höhn, Oliver; Hauser, Hubert; Tucher, Nico; Cariou, Romain; Benick, Jan; Feldmann, Frank; Beutel, Paul; Lackner, David; Siefer, Gerald; Glunz, Stefan W.; Bett, Andreas W.; Dimroth, Frank; Hermle, Martin		 Konferenzbeitrag
Conference Paper
2018 Nanoimprinted sol-gel materials for antireflective structures on silicon solar cells
Stevens, L.; Hauser, H.; Höhn, O.; Tucher, N.; Wellens, C.; Jahn, R.; Glaubitt, W.; Müller, C.; Bläsi, B.		 Konferenzbeitrag
Conference Paper
2018 Selective Emitter Using APCVD PSG Layer as Doping Source
Saint-Cast, P.; Belledin, U.; Lohmüller, E.; Kafle, B.; Weber, J.; Seren, S.; Lohmüller, S.; Wolf, A.; Hofmann, M.		 Konferenzbeitrag
Conference Paper
2018 Inline PECVD Deposition of Poly-Si-Based Tunnel Oxide Passivating Contacts
Temmler, J.; Polzin, J.-I.; Feldmann, F.; Kraus, L.; Kafle, B.; Mack, S.; Moldovan, A.; Hermle, M.; Rentsch, J.		 Zeitschriftenaufsatz
Journal Article
2018 PECVD-AlOx
Saint-Cast, P.; Hofmann, M.		 Aufsatz in Buch
Book Article
2017 Fluid dynamic modeling of an industrial wet chemical process bath for the production of silicon solar cells
Mohr, L.; Zimmer, M.; Moldovan, A.; Menschick, M.; Mandlmeier, B.; Müller, C.		 Konferenzbeitrag
Conference Paper
2017 Influence of surface preparation and cleaning on the passivation of boron diffused silicon surfaces for high efficiency photovoltaics
Ali, H.; Moldovan, A.; Mack, S.; Wilson, M.; Schoenfeld, W.V.; Davis, K.O.		 Zeitschriftenaufsatz
Journal Article
2017 Optical performance of the honeycomb texture - a cell and module level analysis using the OPTOS formalism
Tucher, N.; Müller, B.; Jakob, P.; Eisenlohr, J.; Höhn, O.; Hauser, H.; Goldschmidt, J.C.; Hermle, M.; Bläsi, B.		 Zeitschriftenaufsatz
Journal Article
2017 Development and characterization of multifunctional PassDop layers for local p+-laser doping
Norouzi, M.; Saint-Cast, P.; Lohmüller, E.; Steinhauser, B.; Benick, J.; Werner, S.; Bitnar, B.; Palinginis, P.; Neuhaus, H.; Hofmann, M.; Wolf, A.		 Zeitschriftenaufsatz
Journal Article
2017 Characterizing the degradation of PDMS stamps in nanoimprint lithography
Tucher, N.; Höhn, O.; Hauser, H.; Müller, C.; Bläsi, B.		 Zeitschriftenaufsatz
Journal Article
2017 Key aspects for fabrication of p-type Cz-Si PERC solar cells exceeding 22% conversion efficiency
Werner, S.; Lohmüller, E.; Saint-Cast, P.; Greulich, J.M.; Weber, J.; Schmidt, S.; Moldovan, A.; Brand, A.A.; Dannenberg, T.; Mack, S.; Wasmer, S.; Demant, M.; Linse, M.; Ackermann, R.; Wolf, A.; Preu, R.		 Konferenzbeitrag
Conference Paper
2017 Metallisation of boron-doped polysilicon layers by screen printed silver pastes
Mack, S.; Schube, J.; Fellmeth, T.; Feldmann, F.; Lenes, M.; Luchies, J.-M.		 Zeitschriftenaufsatz
Journal Article
2017 Interference and nanoimprint lithography for the patterning of large areas
Tucher, N.; Hauser, H.; Höhn, O.; Kübler, V.; Wellens, C.; Müller, C.; Bläsi, B.		 Konferenzbeitrag
Conference Paper
2017 Influence of the transparent electrode sputtering process on the interface passivation quality of silicon heterojunction solar cells
Tutsch, Leonard; Bivour, Martin; Wolke, Winfried; Hermle, Martin; Rentsch, Jochen		 Konferenzbeitrag
Conference Paper
2017 Comprehensive analysis of optical texture properties at solar cell and module level using the OPTOS formalism
Tucher, N.; Müller, B.; Jakob, P.; Eisenlohr, J.; Höhn, O.; Hauser, H.; Goldschmidt, J.C.; Hermle, M.; Bläsi, B.		 Vortrag
Presentation
2017 Rear passivated mc-Si solar cells textured by atmospheric pressure dry etching
Saint-Cast, P.; Kafle, B.; Pandey, R.; Ridoy, A.I.; Hofmann, M.; Clochard, L.; Schwarze, T.; Pittroff, M.; Rentsch, J.; Preu, R.		 Zeitschriftenaufsatz
Journal Article
2017 High-Efficiency n-Type HP MC Silicon Solar Cells
Benick, J.; Richter, A.; Müller, R.; Hauser, H.; Feldmann, F.; Krenckel, P.; Riepe, S.; Schindler, F.; Schubert, M.C.; Hermle, M.; Bett, A.W.; Glunz, S.W.		 Zeitschriftenaufsatz
Journal Article
2017 Transmission electron microscopy based interface analysis of the origin of the variation in surface recombination of silicon for different surface preparation methods and passivation materials
Ali, H.; Moldovan, A.; Mack, S.; Schoenfeld, W.V.; Davis, K.O.		 Zeitschriftenaufsatz
Journal Article
2017 Inline PECVD deposition of a-Si layers for heterojunction solar cells on an industrial scale
Temmler, J.; Moldovan, A.; Putra, D.; Bivour, M.; Rentsch, J.		 Konferenzbeitrag
Conference Paper
2017 On the nature of emitter diffusion and screen-printing contact formation on nanostructured silicon surfaces
Kafle, B.; Freund, T.; Schön, J.; Werner, S.; Lorenz, A.; Wolf, A.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.		 Zeitschriftenaufsatz
Journal Article
2017 Angle dependence of solar cells and modules: The role of cell texturization
Geisemeyer, I.; Tucher, N.; Müller, B.; Steinkemper, H.; Hohl-Ebinger, J.; Schubert, M.C.; Warta, W.		 Zeitschriftenaufsatz
Journal Article
2017 Screen-printed metallization for p-Type poly-Si passivated contacts formed by LPCVD
Mack, S.; Fellmeth, T.; Schube, J.; Feldmann, F.; Lenes, M.; Luchies, J.R.M.		 Konferenzbeitrag
Conference Paper
2016 Rear side gratings for silicon solar cells: Efficiency enhancement finally demonstrated
Bläsi, B.; Tucher, N.; Eisenlohr, J.; Lee, B.G.; Benick, J.; Hauser, H.; Hermle, M.; Goldschmidt, J.C.		 Konferenzbeitrag
Conference Paper
2016 High-efficiency n-type silicon solar cells: Advances in PassDop technology and NiCu plating on boron emitter
Steinhauser, B.; Kamp, M.; Brand, A.A.; Jäger, U.; Bartsch, J.; Benick, J.; Hermle, M.		 Zeitschriftenaufsatz
Journal Article
2016 Ultrathin titanium dioxide nanolayers by atomic layer deposition for surface passivation of crystalline silicon
Gad, K.M.; Vössing, D.; Richter, A.; Rayner, B.; Reindl, L.M.; Mohney, S.E.; Kasemann, M.		 Zeitschriftenaufsatz
Journal Article
2016 Activation Energy of Negative Fixed Charges in Thermal ALD Al2O3
Kühnhold-Pospischil, S.; Saint-Cast, P.; Richter, A.; Hofmann, M.		 Zeitschriftenaufsatz
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