Doping and Diffusion

Solar cells must comprise differently doped zones that perform different functions, e.g. the p-n junction or high-low junctions. A range of methods is available at Fraunhofer ISE to achieve such doping either across the entire surface or in specific areas. These include the established tube furnace diffusion method as well as a variety of other options:

  • Diffusion from deposited/printed coatings, patterned if necessary, in tube furnace and continuous through-feed processes
  • Laser diffusion from deposited/printed coatings or liquid phase, as well as laser transfer doping
  • Ion implantation incl. annealing


This development work aims to achieve ideal, tailored solutions for creating doped zones in the many different solar cell types. The specific challenges here lie in generating a physically perfect doping profile (metal semiconductor contact, minimized recombination, structure size, etc.) and in using methods that are both inexpensive and viable at the throughput rate required for production.

Selected Research Projects

 

MASSE

In-Line Annealing – High Throughput and Controlled Atmosphere

 

 

THESSO

Simultaneous Co-Diffusion Processes for n-Type Solar Cells

 

20plµs

 

 

 

Current Publications - Doping and Diffusion:

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2023 Numerical Simulation of Thermal Silicon Dioxide Growth in the Gap between Stacked Wafers
Meßmer, Marius; Emmer, Lena; Wolf, Andreas
Zeitschriftenaufsatz
Journal Article
2022 Optimizing Emitter Diffusion Process for Atmospheric Pressure Dry Nanotextured Monocrystalline PERC
Ridoy, A.; Khan, N.; Kafle, B.; Schmidt, S.; Clochard, L.; Hofmann, M.; Rentsch, J.
Zeitschriftenaufsatz
Journal Article
2022 Polysilicon Contact Structures for Silicon Solar Cells Using Atomic Layer Deposited Oxides and Nitrides as Ultra-thin Dielectric Interlayers
Reichel, C.; Feldmann, F.; Richter, A.; Benick, J.; Hermle, M.; Glunz, S.W.
Zeitschriftenaufsatz
Journal Article
2021 Progress in P-type Tunnel Oxide-Passivated Contact Solar Cells with Screen-Printed Contacts
Mack, S.; Herrmann, D.; Lenes, M.; Renes, M.; Wolf, A.
Zeitschriftenaufsatz
Journal Article
2021 Increasing Throughput of Industrial PERC Production
Meßmer, M.; Wolf, A.; Zimmer, M.; Meyer, F.; Hoppe, G.; Lorenz, A.; Tepner, S.; Ourinson, D.; Emanuel, G.; Nold, S.; Goraya, B.S.; Clement, F.
Zeitschriftenaufsatz
Journal Article
2021 High Throughput Solar Cell Processing by Oxidation of Wafer Stacks
Meßmer, M.; Lohmüller, S.; Braun, F.; Weber, J.; Wolf, A.
Konferenzbeitrag
Conference Paper
2021 Influence of Dopant Elements on Degradation Phenomena in B- and Ga-Doped Czochralski-grown Silicon
Kwapil, W.; Dalke, J.; Post, R.; Niewelt, T.
Zeitschriftenaufsatz
Journal Article
2021 Driven-in RVD Emitters and Adapted TOPCon Layers for Simultaneous Crystallization During RVD
Richter, A.; Drießen, M.; Polzin, J.-I.; Feldmann, F.; Steinhauser, B.; Ohnemus, M.; Benick, J.; Janz, S.
Vortrag
Presentation
2021 Revised Parametrization of the Recombination Velocity at SiO2/SiNX-Passivated Phosphorus-Diffused Surfaces
Wolf, A.; Egle, J.; Mack, S.; Höffler, H.; Herrmann, D.; Lohmüller, S.; Horzel, J.; Fell, A.
Vortrag
Presentation
2021 Epitaxial GaInP/GaAs/Si Triple-Junction Solar Cell with 25.9% AM1.5g Efficiency Enabled by Transparent Metamorphic AlxGa1-xAsyP1-y Step-Graded Buffer Structures
Feifel, Markus; Lackner, David; Schön, Jonas; Ohlmann, Jens; Benick, Jan; Siefer, Gerald; Predan, Felix; Hermle, Martin; Dimroth, Frank
Zeitschriftenaufsatz
Journal Article
2021 Industrial High Throughput Emitter Formation and Thermal Oxidation for Silicon Solar Cells by the High Temperature Stack Oxidation Approach
Meßmer, M.; Lohmüller, S.; Weber, J.; Wolf, A.
Zeitschriftenaufsatz
Journal Article
2021 Revised Parametrization of the Recombination Velocity at SiO2/SiNx-Passivated Phosphorus-Diffused Surfaces
Wolf, A.; Egle, J.; Mack, S.; Höffler, H.; Herrmann, D.; Lohmüller, S.; Horzel, J.; Fell, A.
Zeitschriftenaufsatz
Journal Article
2020 High Throughput Low Energy Industrial Emitter Diffusion and Oxidation
Meßmer, M.; Lohmüller, S.; Weber, J.; Piechulla, A.; Nold, S.; Horzel, J.; Wolf, A.
Konferenzbeitrag
Conference Paper
2020 LeTID- and (Extended) BO-Related Degradation and Regeneration in B- and Ga-Doped Monocrystalline Silicon during Dark and Illuminated Anneals
Kwapil, W.; Dalke, J.; Niewelt, T.; Schubert, M.C.
Konferenzbeitrag
Conference Paper
2020 Radiation hardness and post irradiation regeneration behavior of GaInAsP solar cells
Lang, R.; Schön, J.; Lefèvre, J.; Boizot, B.; Dimroth, F.; Lackner, D.
Zeitschriftenaufsatz
Journal Article
2020 Screen-Printed Borosilicate Glass Derived from Sol-Gel Materials for Back-Contact Back-Junction Solar Cells
Huyeng, J.D.; Efinger, R.; Keding, R.J.; Doll, O.; Clement, F.
Zeitschriftenaufsatz
Journal Article
2020 Simultaneous Boron Emitter Diffusion and Crystallization of TOPCon Layers via Rapid Vapour-Phase Direct Doping
Drießen, M.; Richter, A.; Steinhauser, B.; Feldmann, F.; Polzin, J.-I.; Sahajad, F.; Ohnemus, M.; Weiss, C.; Benick, J.; Janz, S.
Konferenzbeitrag
Conference Paper
2020 A Scanning Spreading Resistance Microscopy Study on a Laser-Doped Selective Phosphorous Emitters
Weber, J.; Brand, A.A.
Zeitschriftenaufsatz
Journal Article
2020 MOVPE Growth of GaAs with Growth Rates up to 280 µm/h
Lang, R.; Habib, F.; Dauelsberg, M.; Dimroth, F.; Lackner, D.
Zeitschriftenaufsatz
Journal Article
2019 Impact of POCl3 Diffusion Process Parameters on Oxygen Precipitation in Czochralski-Grown Silicon
Maus, S.; Lohmüller, S.; Mu, D.; Schön, J.; Niewelt, T.; Wolf, A.; Preu, R.
Konferenzbeitrag
Conference Paper
2019 Direct Growth of GaInP/GaAs/Si Triple-Junction Solar Cell with 22.3% AM1.5g efficiency
Feifel, Markus; Lackner, David; Ohlmann, Jens; Benick, Jan; Hermle, Martin; Dimroth, Frank
Zeitschriftenaufsatz
Journal Article
2019 Impact of Non-Uniform Carrier Density on the Determination of Metal Induced Recombination Losses
Herrmann, D.; Fell, A.; Höffler, H.; Lohmüller, S.; Wolf, A.
Konferenzbeitrag
Conference Paper
2019 Back-Contacted Back-Junction Si Solar Cells with Locally Overcompensated Diffusion Regions - Comparison of Buried Emitter and Floating Base Design
Reichel, C.; Fell, A.; Hermle, M.; Glunz, S.W.
Zeitschriftenaufsatz
Journal Article
2019 Inline Deposited PassDop Layers for Rear Side Passivation and Contacting of p-type c-Si PERL Solar Cells with High Bifaciality
Norouzi, M.H.; Saint-Cast, P.; Lohmüller, E.; Lohmüller, S.; Steinhauser, B.; Wolf, A.; Hofmann, M.
Konferenzbeitrag
Conference Paper
2018 Advanced BBr3 diffusion with second deposition step for selective emitter formation by laser doping
Lohmüller, S.; Lohmüller, E.
Zeitschriftenaufsatz
Journal Article
2018 Role of oxygen for boron diffusion from borosilicate glass layers deposited by atmospheric pressure chemical vapor deposition
Meier, S.; Wolf, A.; Mack, S.; Lohmüller, S.; Glunz, S.W.
Zeitschriftenaufsatz
Journal Article
2018 Black silicon significantly enhances phosphorus diffusion gettering
Pasanen, T.; Laine, H.S.; Vähänissi, V.; Schön, J.; Savin, H.
Zeitschriftenaufsatz
Journal Article
2018 Towards 90% Bifaciality for p-Type Cz-Si Solar Cells by Adaption of Industrial PERC Processes
Lohmüller, E.; Lohmüller, S.; Norouzi, M.H.; Saint-Cast, P.; Weber, J.; Meier, S.; Wolf, A.
Konferenzbeitrag
Conference Paper
2018 Improving GaAs Solar Cell Performance and Growth Efficiency at MOVPE Growth Rates of 100 µm/h
Lang, R.; Schön, J.; Dimroth, F.; Lackner, D.
Vortrag
Presentation
2018 Trends in Solar Electricity
Bett, A.W.
Vortrag
Presentation
2018 Simulations on Laser-Phosphorous-Doped Selective Emitters
Weber, J.; Lohmüller, S.; Lohmüller, E.; Wasmer, S.; Nekarda, J.; Brand, A.A.
Konferenzbeitrag
Conference Paper
2018 Efficiency Potential of P-Type PERT vs. PERC Solar Cells
Meier, S.; Wasmer, S.; Fell, A.; Wöhrle, N.; Greulich, J.; Wolf, A.
Konferenzbeitrag
Conference Paper
2018 High-Efficiency Diamond Wire-Sawn mc-Si-Based PERC Solar Cells Textured by Atmospheric Pressure Dry Etching
Kafle, B.; Ridoy, A.I.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Duncker, K.; Petter, K.; Peters, S.; Hofmann, M.
Konferenzbeitrag
Conference Paper
2018 Challenges for the Quantification of Metal Induced Recombination Losses
Herrmann, D.; Lohmüller, S.; Höffler, H.; Fell, A.; Brand, A.A.; Wolf, A.
Konferenzbeitrag
Conference Paper
2018 Towards the Efficiency Limits of Multicrystalline Silicon Solar Cells
Schindler, F.; Fell, A.; Müller, R.; Benick, J.; Richter, A.; Feldmann, F.; Krenckel, P.; Riepe, S.; Schubert, M.C.; Glunz, S.W.
Zeitschriftenaufsatz
Journal Article
2018 Laser-Doped Selective Emitter - Process Development and Speed-Up
Weber, J.; Gutscher, S.; Lohmüller, S.; Lohmüller, E.; Brand, A.A.
Konferenzbeitrag
Conference Paper
2018 Direct growth of III-V/silicon triple-junction solar cells with 19.7% efficiency
Feifel, Markus; Ohlmann, Jens; Benick, Jan; Hermle, Martin; Belz, Jürgen; Beyer, Andreas; Volz, Kerstin; Hannappel, Thomas; Bett, Andreas W.; Lackner, David; Dimroth, Frank
Zeitschriftenaufsatz
Journal Article
2018 Optimization of GaAs solar cell performance and growth efficiency at MOVPE growth rates of 100 mm/h
Lang, Robin; Schön, Jonas; Dimroth, Frank; Lackner, David
Zeitschriftenaufsatz
Journal Article
2017 Key aspects for fabrication of p-type Cz-Si PERC solar cells exceeding 22% conversion efficiency
Werner, S.; Lohmüller, E.; Saint-Cast, P.; Greulich, J.M.; Weber, J.; Schmidt, S.; Moldovan, A.; Brand, A.A.; Dannenberg, T.; Mack, S.; Wasmer, S.; Demant, M.; Linse, M.; Ackermann, R.; Wolf, A.; Preu, R.
Konferenzbeitrag
Conference Paper
2017 Fast co-diffusion process for bifacial n-type solar cells
Meier, S.; Maier, S.; Demberger, C.; Wolf, A.; Biro, D.; Glunz, S.W.
Zeitschriftenaufsatz
Journal Article
2017 Suitability of POCL3 diffusion processes with in-situ oxidation for forming laser-doped selective emitters with low carrier recombination
Werner, S.; Lohmüller, E.; Weber, J.; Wolf, A.
Konferenzbeitrag
Conference Paper
2017 Metallisation of boron-doped polysilicon layers by screen printed silver pastes
Mack, S.; Schube, J.; Fellmeth, T.; Feldmann, F.; Lenes, M.; Luchies, J.-M.
Zeitschriftenaufsatz
Journal Article
2017 A laser induced forward transfer process for selective boron emitters
Fernandez-Robledo, S.; Nekarda, J.; Büchler, A.
Zeitschriftenaufsatz
Journal Article
2017 Optimized multicrystalline silicon for solar cells enabling conversion efficiencies of 22%
Schindler, F.; Michl, B.; Krenckel, P.; Riepe, S.; Benick, J.; Müller, R.; Richter, A.; Glunz, S.W.; Schubert, M.C.
Zeitschriftenaufsatz
Journal Article
2017 On the nature of emitter diffusion and screen-printing contact formation on nanostructured silicon surfaces
Kafle, B.; Freund, T.; Schön, J.; Werner, S.; Lorenz, A.; Wolf, A.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Zeitschriftenaufsatz
Journal Article
2017 How to achieve efficiencies exceeding 22% with multicrystalline n-type silicon solar cells
Schindler, F.; Michl, B.; Krenckel, P.; Riepe, S.; Benick, J.; Müller, R.; Richter, A.; Glunz, S.W.; Schubert, M.C.
Zeitschriftenaufsatz
Journal Article
2017 Influence of the transition region between p-and n-type polycrystalline silicon passivating contacts on the performance of interdigitated back contact silicon solar cells
Reichel, C.; Müller, R.; Feldmann, F.; Richter, A.; Hermle, M.; Glunz, S.W.
Zeitschriftenaufsatz
Journal Article
2017 High-Efficiency n-Type HP MC Silicon Solar Cells
Benick, J.; Richter, A.; Müller, R.; Hauser, H.; Feldmann, F.; Krenckel, P.; Riepe, S.; Schindler, F.; Schubert, M.C.; Hermle, M.; Bett, A.W.; Glunz, S.W.
Zeitschriftenaufsatz
Journal Article
2017 Selective boron emitters using laser-induced forward transfer versus laser doping from borosilicate glass
Fernandez-Robledo, S.; Kluska, S.; Greulich, J.; Nekarda, J.
Zeitschriftenaufsatz
Journal Article
2017 Bifacial p-type silicon PERL solar cells with screen-printed pure silver metallization and 89% bifaciality
Lohmüller, E.; Werner, S.; Norouzi, M.H.; Mack, S.; Demant, M.; Gutscher, S.; Saint-Cast, P.; Wasmer, S.; Wöhrle, N.; Bitnar, B.; Steckemetz, S.; Palinginis, P.; Neuhaus, H.; König, M.; Wolf, A.
Konferenzbeitrag
Conference Paper
2017 Development and characterization of multifunctional PassDop layers for local p+-laser doping
Norouzi, M.; Saint-Cast, P.; Lohmüller, E.; Steinhauser, B.; Benick, J.; Werner, S.; Bitnar, B.; Palinginis, P.; Neuhaus, H.; Hofmann, M.; Wolf, A.
Zeitschriftenaufsatz
Journal Article
2016 Minority carrier lifetime limitations in Si wafer solar cells with gallium phosphide window layers
Janz, S.; Feifel, M.; Ohlmann, J.; Benick, J.; Weiss, C.; Hermle, M.; Bett, A.W.; Dimroth, F.; Lackner, D.
Konferenzbeitrag
Conference Paper
2016 Physically sound parameterization of incomplete ionization in aluminum-doped silicon
Steinkemper, H.; Altermatt, P.P.; Hermle, M.
Zeitschriftenaufsatz
Journal Article
2014 19.9 % efficient bifacial n-type solar cell produced by co-diffusion-cobin
Rothhardt, P.; Meier, S.; Jiang, K.; Wolf, A.; Biro, D.
Konferenzbeitrag
Conference Paper
2014 POCL3-based co-diffusion process for N-type back-contact back-junction solar cells
Keding, R.; Hendrichs, M.; Stüwe, D.; Jahn, M.; Reichel, C.; Borchert, D.; Wolf, A.; Reinecke, H.; Biro, D.
Konferenzbeitrag
Conference Paper
2014 Process optimization for the front side of P-type silicon solar cells
Werner, S.; Lohmüller, E.; Maier, S.; Kimmerle, A.; Spribille, A.; Wasmer, S.; Clement, F.; Wolf, A.
Konferenzbeitrag
Conference Paper
2014 Heavily doped Si:P emitters of crystalline Si solar cells: Recombination due to phosphorus precipitation
Min, B.; Wagner, H.; Dastgheib-Shirazi, A.; Kimmerle, A.; Kurz, H.; Altermatt, P.P.
Zeitschriftenaufsatz
Journal Article
2014 Local boron doping for P-type PERL silicon solar cells fabricated by laser processing of doped silicon nanoparticle paste
Jäger, U.; Wolf, A.; Wufka, C.; Tomizawa, Y.; Imamura, T.; Soeda, M.; Ikeda, Y.; Shiro, T.
Konferenzbeitrag
Conference Paper
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica