In the project “EmitterPlus”, gas phase emitters (RVD: rapid vapor-phase direct doping) are investigated as an alternative to conventional emitters in solar cells with selective contacts (TOPCon: tunnel oxide passivated contacts). The aim is to develop an integrated process for emitter diffusion and annealing of the selective contacts, with which solar cells can be produced with an efficiency of 25%. For this purpose, existing processes will be adapted and further developed. In addition to the demonstration of highly efficient solar cells, the process and machine know-how necessary for an industrial implementation of the gas phase emitter process will be generated in order to subsequently develop the industrial implementation together with machine builders. | Duration: 06/2018 - 05/2020
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