Fraunhofer Institute for Solar Energy Systems ISE
In our cleanroom laboratory, we process epitaxial wafers into functional components. A modern infrastructure is available for this purpose in our Center for High Efficiency Solar Cells. The wafer processing is designed for 8×4-inch or 8×6-inch batches.
The Processes Available and Used in our Laboratories Include:
- Photolithography for microstructuring
- Nano-imprint lithography
- Deposition of metallic and dielectric layers
- Wet and dry chemical processes
- Wafer bonding (including GaAs, InP, GaSb, Si, Ge)
- Chemical mechanical polishing
- Surface cleaning