Einseitige Inline-Kupferabscheidung auf Siliciumsolarzellen mit lichtinduzierter Galvanik

Kontaktierung und Strukturierung

FuE-Leistungen

Im Thema Kontaktierung und Strukturierung bieten wir folgende Forschungs- und Entwicklungsleistungen

Kontaktierung/ Metallisierung

  • Sieb-, Inkjet-, Rotations-, Aerosoldruck, Dispensen etc.
  • Hochraten-Aufdampfen Ti, Ni:V etc.
  • Galvanik, chemische Verfahren

Strukturierung

  • drucktechnologisch
  • photolithographisch
  • laserbasiert

Materialentwicklung und Evaluation

  • Pasten, Tinten, Ätzmedien, Barrieren

Der Bereich der Kontaktierung und Strukturierung ist mit allen anderen Bereichen der Solarzellenherstellung sehr eng verknüpft. Es können unterschiedliche Medien mit verschiedenen Verfahren sowohl ganzflächig als auch in feinsten Strukturen verdruckt werden. Durch das Ersetzen von Silber durch Kupfer gelingt es z. B., hohe Zellwirkungsgrade und hervorragende Langzeitstabilität bei gleichzeitig sinkenden Kosten zu erzielen. Optische Alignierungssysteme erlauben das passgenaue Drucken von Strukturen auf den Wafern, z. B. zur Herstellung von ineinandergreifenden Kontaktstrukturen oder selektiven Emittern. Umfangreiche Charakterisierungsmöglichkeiten erlauben eine quantitative Bewertung der Prozessergebnisse.

 

Aktuelle Veröffentlichungen zum Thema Kontaktierung und Strukturierung:

YearTitle/AuthorDocument Type
2017On the nature of emitter diffusion and screen-printing contact formation on nanostructured silicon surfaces
Kafle, B.; Freund, T.; Schön, J.; Werner, S.; Lorenz, A.; Wolf, A.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Journal Article
2016Adhesion quality of evaporated aluminum layers on passivation layers for rear metallization of silicon solar cells
Kumm, J.; Hartmann, P.; Eberlein, D.; Wolf, A.
Journal Article
2016Analysis of Al diffusion processes in TiN barrier layers for the application in silicon solar cell metallization
Kumm, J.; Samadi, H.; Chacko, R.V.; Hartmann, P.; Wolf, A.
Journal Article
2016Efficiency increase of crystalline silicon solar cells with nanoimprinted rear side gratings for enhanced light trapping
Eisenlohr, J.; Tucher, N.; Hauser, H.; Graf, M.; Benick, J.; Bläsi, B.; Goldschmidt, J.C.; Hermle, M.
Journal Article
2016Enabling Solderability of PVD Al Rear Contacts on High-Efficiency Crystalline Silicon Solar Cells by Wet Chemical Treatment
Nagel, H.; Kamp, M.; Eberlein, D.; Kraft, A.; Bartsch, J.; Glatthaar, M.; Glunz, S.W.
Conference Paper
2016High-efficiency n-type silicon solar cells: Advances in PassDop technology and NiCu plating on boron emitter
Steinhauser, B.; Kamp, M.; Brand, A.A.; Jäger, U.; Bartsch, J.; Benick, J.; Hermle, M.
Journal Article
2016Impact of Firing Temperature Profiles on Local BSF Formation in PERC Solar Cells
Mack, S.; Richter, P.; Werner, S.; Clement, F.; Wolf, A.
Conference Paper
2016Influence of surface near doping concentration on contact formation of silver thick film contacts
Rothhardt, P.; Meier, S.; Hoenig, R.; Wolf, A.; Biro, D.
Journal Article
2016Long-Term Stability Evaluation of Copper-Containing Contacts on Cell and Module Level
Kluska, S.
Conference Paper
2016Optimizing Adhesion of Laser Structured Plated Ni-Cu Contacts with Insights from Micro Characterization
Büchler, A.; Kluska, S.; Bartsch, J.; Cimiotti, G.; Brand, A.A.; Schubert, M.C.; Glatthaar, M.
Conference Paper
2016Status of FolMet Technology: How to Produce PERC Cells More Cheaply than Al-BSF Cells
Nekarda, J.; Graf, M.; John, O.; Nold, S.; Nagel, H.; Eberlein, D.; Kraf,t A.; Böhme, R.; Streek, A.; Preu, R.
Journal Article
2016Ultrathin titanium dioxide nanolayers by atomic layer deposition for surface passivation of crystalline silicon
Gad, K.M.; Vössing, D.; Richter, A.; Rayner, B.; Reindl, L.M.; Mohney, S.E.; Kasemann, M.
Journal Article
2015Analysis and performance of dispensed and screen printed front side contacts at cell and module level
Rodriguez, C.; Pospischil, M.; Padilla, A.; Kuchler, M.; Klawitter, M.; Geipel, T.; Padilla, M.; Fellmeth, T.; Brand, A.; Efinger, R.; Linse, M.; Gentischer, H.; König, M.; Hörteis, M.; Wende, L.; Doll, O.; Clement, F.; Biro, D.
Conference Paper
2015Characterization of copper diffusion in silicon solar cells: 5th Workshop on Metallization of Crystalline Silicon Solar Cells 2014, Konstanz, Germany, 20.10.2014-21.10.2014
Kraft, A.; Wolf, C.; Bartsch, J.; Glatthaar, M.
Journal Article
2015Combined Microstructural and Electrical Characterization of Metallization Layers in Industrial Solar Cells
Kumar, P.; Willsch, B.; Dürrschnabel, M.; Aabdin, Z.; Hönig, R.; Peranio, N.; Clement, F.; Biro, D.; Eibl, O.
Conference Paper
2015Design Rules for Solar Cells with Plated Metallization
Cimiotti, G.; Bartsch, J.; Kraft, A.; Mondon, A.; Glatthaar, M.
Journal Article
2015Dispensing Technology on the Route to an Industrial Metallization Process
Pospischil, M.; Kuchler, M.; Klawitter, M.; Rodriguez, C.; Padilla, M.; Efinger, R.; Linse, M.; Padilla, A.; Gentischer, H.; König, M.; Hörteis, M.; Wende, L.; Doll, O.; Zengerle, R.; Clement, F.; Biro, D.
Conference Paper
2015Electrical and Mechanical Properties of Plated Ni/Cu Contacts for Si Solar Cells
Kluska, S.; Bartsch, J.; Büchler, A.; Cimiotti, G.; Brand, A.A.; Hopman, S.; Glatthaar, M.
Conference Paper
2015Electrical properties of the rear contact structure of MWT silicon solar cells
Lohmüller, E.; Thanasa, M.; Thaidigsmann, B.; Clement, F.; Biro, D.
Journal Article
2015Electrochemical contact separation for PVD aluminum back contact solar cells
Kamp, M.; Maywald, A.; Bartsch, J.; Efinger, R.; Keding, R.; Glatthaar, M.; Glunz, S.W.; Krossing, I.
Journal Article
2015Evaluation of flexographic printing technology for multi-busbar solar cells
Lorenz, A.; Senne, A.; Rohde, J.; Kroh, S.; Wittenberg, M.; Krüger, K.; Clement, F.; Biro, D.
Journal Article
2015Foil metallization process for PERC solar cells towards industrial feasibility
Graf, M.; Eberlein, D.; Nagel, H.; Nekarda, J.; Böhme, R.; Streek, A.; Preu, R.
Conference Paper
2015Impact of boron doping profiles on the specific contact resistance of screen printed Ag-Al contacts on silicon
Lohmüller, E.; Werner, S.; Hoenig, R.; Greulich, J.; Clement, F.
Journal Article
2015Impact of texture roughness on the front-side metallization of stencil-printed silicon solar cells
Lorenz, A.; Strauch, T.; Demant, M.; Fellmeth, T.; Barnes Hofmeister, T.; Linse, M.; Dannenberg, T.; Seiffe, J.; Clement, F.; Biro, D.; Reinecke, H.; Preu, R.
Journal Article
2015Influence of random pyramid surface texture on silver screen-printed contact formation for monocrystalline silicon wafer solar cells
Khanna, A.; Basu, P.; Filipovic, A.; Shanmugam, V.; Schmiga, C.; Aberle, A.; Müller, T.
Journal Article
2015Investigation of acetic acid corrosion impact on printed solar cell contacts
Kraft, A.; Labusch, L.; Ensslen, T.; Durr, I.; Bartsch, J.; Glatthaar, M.; Glunz, S.; Reinecke, H.
Journal Article
2015Long term stability of copper front side contacts for crystalline silicon solar cells
Kraft, A.; Wolf, C.; Bartsch, J.; Glatthaar, M.; Glunz, S.
Journal Article
2015Long-term and annealing stable, solderable PVD metallization with optimized Al diffusion barrier
Kumm, J.; Chacko, R.V.; Samadi, H.; Hartmann, P.; Eberlein, D.; Jäger, U.; Wolf, A.
Journal Article
2015Manufacturing 100-µm-thick silicon solar cells with efficiencies greater than 20% in a pilot production line
Terheiden, B.; Ballmann, T.; Horbelt, R.; Schiele, Y.; Seren, S.; Ebser, J.; Hahn, G.; Mertens, V.; Koentopp, M.B.; Scherff, M.; Müller, J.W.; Holman, Z.C.; Descoeudres, A.; Wolf, S. de; Nicolas, S.M. de; Geissbuehler, J.; Ballif, C.; Weber, B.; Saint-Cast, P.; Rauer, M.; Schmiga, C.; Glunz, S.W.; Morrison, D.J.; Devenport, S.; Antonelli, D.; Busto, C.; Grasso, F.; Ferrazza, F.; Tonelli, E.; Oswald, W.
Journal Article
2015Overcoming Electrical and Mechanical Challenges of Continuous Wave Laser Processing for Ni-Cu Plated Solar Cells
Geisler, C.; Hördt, W.; Kluska, S.; Mondon, A.; Hopman, S.; Glatthaar, M.
Journal Article
2015Passivation-induced cavity defects in laser-doped selective emitter Si solar cells - formation model and recombination analysis
Geisler, C.; Kluska, S.; Hopman, S.; Glatthaar, M.
Journal Article
2015Progress on industrial solar cell front side metallization by parallel dispensing technology
Pospischil, M.; Kuchler, M.; Klawitter, M.; Efinger, R.; Rodriguez, C.; Padilla, A.; Gentischer, H.; König, M.; Hörteis, M.; Wende, L.; Mette, A.; Clement, F.; Preu, R.; Biro, D.
Conference Paper
2015Quantification of Front Side Metallization Area on Silicon Wafer Solar Cells for Background Plating Detection
Heinrich, M.; Lieder, M.; Hoex, B.; Aberle, A.G.; Glatthaar, M.
Conference Paper
2015Tunnel oxide passivated contacts formed by ion implantation for applications in silicon solar cells
Reichel, C.; Feldmann, F.; Müller, R.; Reedy, R.C.; Lee, B.G.; Young, D.L.; Stradins, P.; Hermle, M.; Glunz, S.W.
Journal Article
201421.8% efficient n-type solar cells with industrially feasible plated metallization
Bartsch, J.; Kamp, M.; Hartleb, D.; Wittich, C.; Mondon, A.; Steinhauser, B.; Feldmann, F.; Richter, A.; Benick, J.; Glatthaar, M.; Hermle, M.; Glunz, S.W.
Journal Article
2014Accurate potential drop sheet resistance measurements of laser-doped areas in semiconductors
Heinrich, M.; Kluska, S.; Binder, S.; Hameiri, Z.; Hoex, B.; Aberle, A.G.
Journal Article
2014Advanced metallization concepts for p-type silicon Metal-Wrap-Through (MWT) solar cells
Hendrichs, M.; Thaidigsmann, B.; Lohmüller, E.; Nold, S.; Clement, F.; Biro, D.; Rech, B.; Preu, R.
Journal Article
2014Analytical investigation of aerosol jet printing
Binder, S.; Glatthaar, M.; Rädlein, E.
Journal Article
2014Contacting bare silicon solar cells with advanced cell metallisation
Geisemeyer, I.; Kallies, C.; Hohl-Ebinger, J.; Warta, W.
Conference Paper
2014Continuous wave laser processing for electrical and mechanical stable solar cells with Ni-Cu metallization
Geisler, C.; Hördt, W.; Kluska, S.; Mondon, A.; Hopman, S.; Glatthaar, M.
Journal Article
2014Developing a high throughput metallization approach for silicon solar cells based on flexographic printing
Lorenz, A.; Kalio, A.; Barnes Hofmeister, T.; Kroh, S.; Kraft, A.; Bartsch, J.; Clement, F.; Biro, D.
Conference Paper
2014Developing a high throughput printing technology for silicon solar cell front side metallisation using flexography
Lorenz, A.; Kalio, A.; Hofmeister, T.B.; Kraft, A.; Bartsch, J.; Clement, F.; Reinecke, H.; Biro, D.
Journal Article
2014Failure mechanisms for solar cells with laser doped selective emitter and plated Ni-Cu metal contacts
Hördt, W.; Geisler, C.; Hopman, S.; Bartsch, J.; Mondon, A.; Glatthaar, M.; Kluska, S.
Conference Paper
2014Inkjet-printing for maskless separation of metal structures for back-contact silicon solar cells
Stüwe, D.; Hartmann, P.; Keding, R.; Thaidigsmann, B.; Clement, F.; Prokopiak, S.; Fastnacht, P.; Jesswein, R.; Geppert, T.; Woehl, R.; Korvink, J.G.; Biro, D.
Journal Article
2014Investigation of Salicide Process from Sputtered Nickel on Structured SiNx ARC for Mono-Crystalline Si Solar Cells
Jambaldinni, S.; Bartsch, J.; Mondon, A.; Kluska, S.; Padilla, M.; Büchler, A.; Glatthaar, M.; Glunz, S.
Conference Paper
2014Long term stability analysis of copper front side metallization for silicon solar cells
Kraft, A.; Wolf, C.; Lorenz, A.; Bartsch, J.; Glatthaar, M.; Glunz, S.W.
Journal Article
2014Micro characterization and imaging of spikes in nickel plated solar cells
Büchler, A.; Kluska, S.; Brand, A.; Geisler, C.; Hopman, S.; Glatthaar, M.
Journal Article
2014Micro characterization of laser structured solar cells with plated Ni-Ag contacts
Kluska, S.; Fleischmann, C.; Büchler, A.; Hördt, W.; Geisler, C.; Hopman, S.; Glatthaar, M.
Journal Article
2014Microscopic origin of the aluminium assisted spiking effects in n-type silicon solar cells
Heinz, F.D.; Breitwieser, M.; Gundel, P.; König, M.; Hörteis, M.; Warta, W.; Schubert, M.C.
Journal Article
2014Microstructure analysis of the interaction between watts-type nickel electrolyte and screen printed solar cell contacts
Kraft, A.; Pernia, Y.; Ni, L.; Filipovic, A.; Hähnel, A.; Graff, A.; Bartsch, J.; Glatthaar, M.
Journal Article
2014Nanometallic silver inks for metallization of ITO-coated silicon solar cells. Influence of organic components
Gautrein, A.; Schmiga, C.; Glatthaar, M.; Tremel, W.; Glunz, S.W.
Conference Paper
2014Nanoscale Investigation of the Interface Situation of Plated Nickel and Thermally Formed Nickel Silicide for Silicon Solar Cell Metallization
Mondon, A.; Wang, D.; Zuschlag, A.; Bartsch, J.; Glatthaar, M.; Glunz, S.W.
Journal Article
2014Next generation printing technologies for fine-line metallization of Si solar cells: Paper presented at 6th World Conference on Photovoltaic Energy Conversion 2014, Kyoto, Japan, 23.11.2014-27.11.2014
Clement, F.; Pospischil, M.; Lorenz, A.; Linse, M.; Erath, D.; Kuchler M.; Klawitter, M.; Spribille, A.; Hoenig, R.; Efinger, R.; Fellmeth, T.; Biro, D.
Presentation
2014Optimized aerosol jet printed silver contacts on lowly doped phosporous and boron emitters
Binder, S.; Schmiga, C.; Glatthaar, M.; Glunz, S.W.
Conference Paper
2014Plated Nickel-Copper contacts on c-Si. From microelectronic processing to cost effective silicon solar cell production
Mondon, A.; Bartsch, J.; Kamp, M.; Brand, A.; Steinhauser, B.; Bay, N.; Horzel, J.; Glatthaar, M.; Glunz, S.W.
Conference Paper
2014Plating processes on aluminium and application to novel solar cell concepts
Kamp, M.; Bartsch, J.; Keding, R.; Jahn, M.; Müller, R.; Glatthaar, M.; Glunz, S.W.; Krossing, I.
Journal Article
2014Progress in laser-based foil metallization for industrial PERC solar cells
Graf, M.; Nekarda, J.; Eberlein, D.; Woehrle, N.; Preu, R.; Böhme, R.; Grosse, T.
Conference Paper
2014Recombination characteristics of p+ regions alloyed from screen-printed aluminum pastes containing boron additives
Rauer, M.; Steinkemper, H.; Schmiga, C.; Glatthaar, M.; Glunz, S.W.
Conference Paper
2014Synthesis of a lead- and particle-free metal-organic Ink for front side metallization of crystalline silicon solar cells
Tamari, Y.; Gautrein, A.; Schmiga, C.; Binder, S.; Glatthaar, M.; Glunz, S.W.
Journal Article
2014Zincate processes for silicon solar cell metallization
Kamp, M.; Bartsch, J.; Cimiotti, G.; Keding, R.; Zogaj, A.; Reichel, C.; Kalio, A.; Glatthaar, M.; Glunz, S.
Journal Article
2013Alloying from screen-printed aluminum pastes containing boron additives
Rauer, M.; Schmiga, C.; Glatthaar, M.; Glunz, S.W.
Journal Article
2013Co-diffused back-contact back-junction silicon solar cells without gap regions
Keding, R.; Stüwe, D.; Kamp, M.; Reichel, C.; Wolf, A.; Woehl, R.; Borchert, D.; Reinecke, H.; Biro, D.
Journal Article
2013Comparison of cleaning processes for enabling solderability of LFC-PERC silicon solar cells with evaporated Al as rear side metallization
Samadi, H.; Kumm, J.; Eberlein, D.; Hartmann, P.; Wolf, A.; Mack, S.
Conference Paper
2013Cost-optimized metallization layout for metal wrap through (MWT) solar cells and modules
Hendrichs, M.; Thaidigsmann, B.; Fellmeth, T.; Nold, S.; Spribille, A.; Herrmann, P.; Mittag, M.; Hädrich, I.; Eitner, U.; Clement, F.; Biro, D.; Preu, R.
Conference Paper
2013Current trends in c-Si PV front-side metallization
Bartsch, J.; Glatthaar, M.; Kraft, A.; Mondon, A.; Lorenz, A.; Sutor, L.; Nold, S.; Glunz, S.W.
Journal Article
2013Development of a high-throughput fine line metallization process using CFD-simulation
Pospischil, M.; Klawitter, M.; Kuchler, M.; Specht, J.; Gentischer, H.; Efinger, R.; König, M.; Hörteis, M.; Mohr, C.; Wende, L.; Lossen, J.; Weiss, M.; Doll, O.; Köhler, I.; Zengerle, R.; Clement, F.; Biro, D.
Conference Paper
2013Development of temperature-stable, solderable PVD rear metallization for industrial silicon solar cells
Kumm, J.; Samadi, H.; Hartmann, P.; Nold, S.; Wolf, A.; Wolke, W.
Conference Paper
2013Etching of PVD metal layers for contact separation of back contact silicon solar cells using inkjet-printing
Stüwe, D.; Hartmann, P.; Keding, R.; Clement, F.; Woehl, R.; Biro, D.; Fastnacht, P.; Jesswein, R.; Geppert, T.; Prokopiak, S.; Korvink, J.G.
Conference Paper
2013Evaluation of industrially relevant parameters for contact firing of screen printed front side silver contacts
Hönig, R.; Vössing, D.; Clement, F.; Biro, D.; Preu, R.; Wilde, J.
Journal Article
2013Fine-line silver pastes for seed layer screen printing with varied glass content
Olweya, S.; Kalio, A.; Kraft, A.; Deront, E.; Filipovic, A.; Bartsch, J.; Glatthaar, M.
Journal Article
2013Fire-through contacts - a new approach to contact the rear side of passivated silicon solar cells
Thaidigsmann, Benjamin; Kick, Christopher; Drews, Andreas; Clement, Florian; Wolf, Andreas; Biro, Daniel
Journal Article
2013Flexographic printing - high throughput technology for fine line seed layer printing on silicon solar cells
Lorenz, A.; Kalio, A.; Hofmeister, G.; Nold, S.; Kraft, A.; Bartsch, J.; Wolf, D.; Dreher, M.; Clement, F.; Biro, D.
Conference Paper
2013Influence of the chemicals used in Nickel and Copper plating solutions on the adhesion of screen-printed silver contacts
Kraft, A.; Ni, L.; Kalio, A.; Moldovan, A.; Bartsch, J.; Glatthaar, M.; Glunz, S.W.
Journal Article
2013Investigation of methods for adhesion characterization of evaporated aluminum layers
Kumm, J.; Eberlein, D.; Hartmann, P.; Wolke, W.; Wolf, A.; Preu, R.
Conference Paper
2013Laser-based foil metallization for industrial PERC solar cells
Nekarda, J.; Graf, M.; Rodofili, A.; Preu, R.; Böhme, R.; Sontag, D.
Conference Paper
2013Microstructure analysis of the interface situation and adhesion of thermally formed nickel silicide for plated nickel-copper contacts on silicon solar cells
Mondon, A.; Jawaid, M.N.; Bartsch, J.; Glatthaar, M.; Glunz, S.W.
Journal Article
2013The nature of screen printed front side silver contacts - results of the Project MikroSol
Hönig, R.; Dürrschnabel, M.; Mierlo, W. van; Aabdin, Z.; Bernhard, J.; Biskupek, J.; Eibl, O.; Kaiser, U.; Wilde, J.; Clement, F.; Biro, D.
Journal Article
2013Nickel-plated front contacts for front and rear emitter silicon solar cells
Rauer, M.; Mondon, A.; Schmiga, C.; Bartsch, J.; Glatthaar, M.; Glunz, S.W.
Journal Article
2013A novel approach to high performance and cost effective surface cleaning for high efficiency solar cells
Moldovan, A.; Zimmer, M.; Rentsch, J.; Ferstl, B.; Rajagopalan, B.; Thate, S.; Hoogboom, J.; Ross, M.
Conference Paper
2013Process development for a high-throughput fine line metallization approach based on dispensing technology
Pospischil, M.; Klawitter, M.; Kuchler, M.; Specht, J.; Gentischer, H.; Efinger, R.; Kroner, C.; Luegmair, M.; König, M.; Hörteis, M.; Mohr, C.; Wende, L.; Lossen, J.; Weiß, M.; Doll, O.; Koehler, I.; Zengerle, R.; Clement, F.; Biro, D.
Journal Article
2013Recombination and microstructural properties of soldering pads and their impact on solar cell performance
Krauß, K.; Fertig, F.; Rein, S.
Journal Article
2013Study of contact formation of printed contacts through different passivation layers on lowly doped emitters
Kalio, A.; Richter, A.; Glatthaar, M.; Wilde, J.
Journal Article
This publication list has been generated from the publication database Fraunhofer-Publica.